High vacuum housing with improved sealing means
    167.
    发明授权
    High vacuum housing with improved sealing means 失效
    具有改进密封装置的高真空外壳

    公开(公告)号:US5887746A

    公开(公告)日:1999-03-30

    申请号:US976785

    申请日:1997-11-24

    CPC classification number: H05G1/02 B01J3/006 B01J3/03

    Abstract: A high vacuum housing with a first and second housing part and in which the housing parts are secured together to form an interior housing chamber. In order to seal the housing parts, an annular outwardly extending sealing ring having a flat radial surface is formed on one of the housing parts. An annular alignment recess is formed on the other housing part which registers with and receives the alignment ring. A thin walled seal is disposed between the housing parts. When the housing parts are secured together by bolts, an outer periphery of the seal is compressibly sandwiched between the flat radial surface on the sealing ring and the flat surface on the second housing part thus sealing the window to the housing.

    Abstract translation: 具有第一和第二壳体部分的高真空壳体,其中壳体部件固定在一起以形成内部容纳室。 为了密封壳体部分,在一个壳体部分上形成具有平坦的径向表面的环形向外延伸的密封环。 另一个壳体部分上形成一个环形的对准凹槽,该凹槽与对准环配准并接收。 在壳体部件之间设置薄壁密封件。 当通过螺栓将壳体部件固定在一起时,密封件的外周被可压缩地夹在密封环上的平坦的径向表面和第二壳体部件上的平坦表面之间,从而将窗口密封到壳体。

    Decompression container
    169.
    发明授权
    Decompression container 失效
    减压容器

    公开(公告)号:US5676757A

    公开(公告)日:1997-10-14

    申请号:US628016

    申请日:1996-04-04

    CPC classification number: H01L21/67017 B01J3/03 C23C14/566

    Abstract: There is a gap between the respective inner regions of the end face of the cylindrical side wall and the abutting portion of the top plate, which are situated inside the seal member. Even though the top plate is bent inward by atmospheric pressure when the container is decompressed to a predetermined degree of vacuum, therefore, the abutting portion thereof cannot come into contact with the inner edge of the end face of the cylindrical side wall. Thus, if decompression and exposure to atmospheric pressure are repeated to bend the cylindrical side wall repeatedly, there is no possibility of the inner edge portion of the end face of the cylindrical side wall being separated or rubbed off to produce dust. Moreover, the cylindrical side wall and top plate are joined together in the region outside the seal member. If dust is produced by the contact between the cylindrical side wall and top plate at their junctions outside the seal member, therefore, it is prevented from entering the container by the seal member. Thus, a clean atmosphere in the container cannot be contaminated by the dust.

    Abstract translation: 在圆筒形侧壁的端面的各个内部区域和位于密封构件内部的顶板的抵接部分之间存在间隙。 因此,即使当容器减压到预定的真空度时顶板向内弯曲,因此其抵接部分不能与圆筒形侧壁的端面的内边缘接触。 因此,如果重复减压和暴露于大气压力以反复地弯曲圆筒形侧壁,则不会使圆柱形侧壁的端面的内边缘部分分离或摩擦而产生灰尘。 此外,圆筒形侧壁和顶板在密封构件外部的区域中接合在一起。 因此,如果在密封部件外侧的接合处产生圆筒形侧壁和顶板之间的灰尘,则可防止密封件进入容器。 因此,容器中的清洁气氛不会被灰尘污染。

    Super high vacuum vessel
    170.
    发明授权
    Super high vacuum vessel 失效
    超高真空容器

    公开(公告)号:US5478524A

    公开(公告)日:1995-12-26

    申请号:US98151

    申请日:1993-07-28

    CPC classification number: C22C14/00 B01J3/002 B01J3/006 B01J3/03

    Abstract: A light-weight super high vacuum vessel is disclosed in which a super high vacuum pressure over 10.sup.-10 Torr or over 10.sup.-11 Torr can be achieved using a simple evacuation system and/or with a sealing structure. The super high vacuum vessel contains a member comprising: from 0.02 wt. % to 1.00 wt. % of at least one platinum-group metal selected from the group consisting of Pd, Pt, Rh, Ru, Re, and Os; from 0.1 wt. % to 3.0 wt. % of at least one transition metal selected from the group consisting of Co, Fe, Cr, Ni, Mn, and Cu; from 0.02 wt. % to 0.50 wt. % of at least one rare earth series element selected from the group consisting of La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, and Y; impurity elements of C, N, and O, C being equal to or less than 0.05 wt. %, N being equal to or less than 0.05 wt. %, O being equal to or less than 0.08 wt. %; and Ti and inevitable impurities.

    Abstract translation: 公开了一种轻质超高真空容器,其中使用简单的排气系统和/或具有密封结构可以实现超过10-10托或超过10-11托的超高真空压力。 超高真空容器含有一种成分,其含有:0.02重量% %〜1.00重量% %的至少一种选自Pd,Pt,Rh,Ru,Re和Os的铂族金属; 0.1重量% %〜3.0重量% %的至少一种选自Co,Fe,Cr,Ni,Mn和Cu的过渡金属; 0.02重量% %至0.50重量% %的至少一种选自La,Ce,Pr,Nd,Sm,Gd,Tb,Dy,Ho,Er和Y的稀土系列元素; C,N和O的杂质元素C等于或小于0.05重量%。 %,N等于或小于0.05wt。 %,O等于或小于0.08wt。 %; 和Ti和不可避免的杂质。

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