Measurement Apparatus
    187.
    发明公开

    公开(公告)号:US20230236116A1

    公开(公告)日:2023-07-27

    申请号:US18101644

    申请日:2023-01-26

    CPC classification number: G01N21/31 G01N33/0027 G01N2201/02 G01N2201/0636

    Abstract: A gas measurement apparatus includes an optical resonator that resonates light, a light source that generates light for irradiation of the optical resonator, and a photodetector that detects light taken out of the optical resonator. The optical resonator includes a plurality of mirrors, a holding member, a hollow tubular member, a hollow tubular member, and a temperature adjustment instrument. The holding member is lower in thermal expansion coefficient than the hollow tubular member. The hollow tubular member includes a portion higher in thermal conductivity than the holding member and a bellows higher in elasticity than a first portion. The hollow tubular member is equal to or higher than the hollow tubular member in thermal conductivity, and is provided as far as positions of the plurality of mirrors on an inner side of the bellows.

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