DISTRIBUTED RAMAN H2 SENSORS
    181.
    发明公开

    公开(公告)号:US20240302282A1

    公开(公告)日:2024-09-12

    申请号:US18118938

    申请日:2023-03-08

    Inventor: Mark D. Ray

    CPC classification number: G01N21/65 G01M3/04 G01N2201/0636 G01N2201/08

    Abstract: A gas detection system includes a first optical fiber bundle connected to a first multi-pass cell for connecting the first multi-pass cell to a Raman spectrum analyzer. A second optical fiber bundle is connected to the first multi-pass cell for connecting the first multi-pass cell to a second multi-pass cell. The second optical fiber bundle can include a delay coil configured to provide temporal spacing between spectral returns from the first multi-pass cell and from the second multi-pass cell. The first and second multi-pass cells can be biconic multipass cells with a the first optical fiber bundle directed toward a first D-mirror, which is directed toward a T-mirror, which is directed toward a second D-mirror, which is directed toward the second optical fiber bundle. The D-mirrors can be on an opposite end of the first multi-pass cell from the T-mirror and the first and second optical fiber bundles.

    Optical Device And Spectroscopic Device
    183.
    发明公开

    公开(公告)号:US20240288362A1

    公开(公告)日:2024-08-29

    申请号:US18586650

    申请日:2024-02-26

    CPC classification number: G01N21/31 G02B26/0816 G01N2201/0636

    Abstract: An optical device includes: an incident optical system; an analysis optical system; and a length measurement optical system. The incident optical system includes a laser light source, and an incident light dividing element that divides the laser light. The analysis optical system includes a first light dividing element that divides the first divided light and then mixes the light, a first mirror that adds a first modulation signal to the one first divided light by movement and reflection, a second mirror, and a first light receiving element that receives the first divided light including a sample-derived signal and the first modulation signal. The length measurement optical system includes a second light dividing element that divides the second divided light and then mixes the light, an optical feedback unit that feeds back the one second divided light to the second light dividing element, and a second light receiving element that receives the second divided light including a displacement signal generated by the first mirror.

    Excitation light irradiating apparatus and excitation light irradiating method

    公开(公告)号:US12066392B2

    公开(公告)日:2024-08-20

    申请号:US17922500

    申请日:2021-04-19

    CPC classification number: G01N24/10 G01N21/64 G02B17/004 G01N2201/0636

    Abstract: A substrate 1 includes a color center excited by excitation light, and at least a pair of reflection members 21a, 21b are arranged with gaps from the substrate 1. The substrate 1 causes the excitation light entering the substrate 1 to exit through its surfaces without reflection, and the reflection members 21a, 21b cause the exited excitation light to reflect at the reflection surface 21-1 or 21-2 and enter the substrate 1, and cause the excitation light to repeatedly enter and exit the substrate 1 and thereby pass through the substrate 1 only a predetermined number of times. Here, the irradiating device 4 emits the excitation light such that the excitation light is incident to the reflection surface 21-1 or 21-2 with an angle perpendicular to one axis among two axes of the reflection surface 21-1 or 21-2 and with a predetermined slant angle from the other axis.

    ARC SCANNING METHODS FOR LASER INDUCED BREAKDOWN SPECTROSCOPY APPLICATIONS

    公开(公告)号:US20240255432A1

    公开(公告)日:2024-08-01

    申请号:US18560906

    申请日:2022-05-03

    Inventor: Patrick LANCUBA

    CPC classification number: G01N21/718 G01N2201/06113 G01N2201/0636

    Abstract: A method for compositional analysis, in particular laser-induced breakdown spectroscopy (LIBS), includes providing a sample having a surface, moving an ablation point to a plurality of positions on the surface along an arc path defined by a plurality of arcs, wherein the plurality of arcs extend from an edge of the area to another edge of the area, wherein the arc path follows adjacent arcs of the plurality of arcs, pulsing an energy source to provide an electromagnetic energy beam to ablate material at the ablation point, collecting an emission spectrum in response to pulsing the energy source, and analyzing the emission spectrum to determine a composition at the surface.

    Gas sensing with porous scattering material

    公开(公告)号:US12019017B2

    公开(公告)日:2024-06-25

    申请号:US17090090

    申请日:2020-11-05

    Applicant: Lumileds LLC

    Abstract: A gas sensing system can allow a gas sample to permeate hollow spaces within a porous scattering material. The porous scattering material can be substantially transparent at an illumination wavelength. An emitter can illuminate the porous scattering material and the gas sample with light having a spectrum that includes the illumination wavelength. A sensor can detect a level of light that has traversed the porous scattering material. Using, for example, the Beer-Lambert Law, the system can determine a concentration of the gas material in the gas sample. The scattering can greatly increase an optical path length through the porous scattering material, compared with a linear dimension of the porous scattering material. The increased optical path length can allow a gas chamber to shrink in size, thereby decreasing a size of the gas sensing system without a corresponding decrease in a sensitivity and/or an accuracy of the system.

    WAFER DEFECT INSPECTION APPARATUS
    189.
    发明公开

    公开(公告)号:US20240175826A1

    公开(公告)日:2024-05-30

    申请号:US18082562

    申请日:2022-12-15

    CPC classification number: G01N21/9505 G01N2201/0636

    Abstract: A wafer defect inspection apparatus including a carrier base, a light source module, a beam splitter, filters and image sensors are provided. The carrier base carries a sample to be tested. The light source module includes an illuminating unit and a pellicle mirror. The illuminating unit emits an inspection light ray. A reflective surface is capable of reflecting the inspection light ray to the sample to be tested, so that a reflective light ray formed by reflecting the inspection light ray reflected by the sample to be tested passes through the pellicle mirror and is then split into splitting light rays by the beam splitter. The filters are configured to be passed through by different bands corresponding to the splitting light rays. The image sensors receive the splitting light rays to generate imaging frames. Two corresponding positions in any two of the imaging frames have two different contrast ratios.

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