公开(公告)号：US20050263458A1

公开(公告)日：2005-12-01

申请号：US10852166

申请日：2004-05-25

Applicant: Kon-Tsu Kin ,  Pei-Lin Chang ,  Farhang Shadman ,  Hsiao-Fen Cheng

Inventor： Kon-Tsu Kin ,  Pei-Lin Chang ,  Farhang Shadman ,  Hsiao-Fen Cheng

IPC: C02F1/20 ,  C02F1/32 ,  C02F1/42 ,  C02F1/78 ,  C02F9/00

CPC classification number: C02F9/00 ,  C02F1/20 ,  C02F1/32 ,  C02F1/42 ,  C02F1/78 ,  C02F2103/04 ,  C02F2301/046 ,  C02F2301/08 ,  Y10S210/90

Abstract: In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.

Abstract translation: 为了将超纯水中的总有机碳（TOC）降低至低于1ppb的水平，进行几次臭氧接触/ UV照射处理。 优选地，第一循环还包括施加到所得UV照射水的离子交换处理。