公开(公告)号：US06362091B1

公开(公告)日：2002-03-26

申请号：US09524766

申请日：2000-03-14

Applicant: Ebrahim Andideh ,  Qing Ma ,  Quan Tran ,  Steve Towle

Inventor： Ebrahim Andideh ,  Qing Ma ,  Quan Tran ,  Steve Towle

IPC: H01L214763

CPC classification number: H01L23/5329 ,  H01L21/76801 ,  H01L21/76807 ,  H01L21/76829 ,  H01L21/76835 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An improved semiconductor device and method for making it. That semiconductor device includes a first insulating layer, having a low-k dielectric constant that preferably comprises a carbon doped oxide, that is formed on a substrate. The device further includes a second layer, which is formed on the first layer, that has a relatively high dielectric constant and superior mechanical strength. The second layer is preferably under compressive stress. A third layer may be formed on the second layer, which has a relatively low dielectric constant and relatively poor mechanical strength, and a fourth layer may be formed on the third layer, which has a relatively high dielectric constant and superior mechanical strength.

公开(公告)号：US20100100991A1

公开(公告)日：2010-04-22

申请号：US12254636

申请日：2008-10-20

Applicant: Byong M. Kim ,  Robert N. Stark ,  Quan Tran ,  Wade Hassler ,  Qing Ma ,  Donald E. Adams ,  Yevgeny V. Anoikin

Inventor： Byong M. Kim ,  Robert N. Stark ,  Quan Tran ,  Wade Hassler ,  Qing Ma ,  Donald E. Adams ,  Yevgeny V. Anoikin

IPC: G01N27/00

CPC classification number: G01Q60/32 ,  G01Q60/40 ,  G11B9/02 ,  H01L41/0906

Abstract: A device to detect polarization of a ferroelectric material comprises a probe tip, a charge amplifier electrically connected with the probe tip to convert a charge coupled to the probe tip from the ferroelectric material into an output voltage. The ferroelectric material is oscillated at a reference signal so that a charge is coupled to the probe tip and converted to an output voltage by the charge amplifier. A lock-in amplifier that receives the reference voltage and applies the reference voltage to the output voltage to extract a signal output representing the polarization.

Abstract translation: 用于检测铁电材料的极化的装置包括探针尖端，与探针尖端电连接的电荷放大器，以将耦合到探针尖端的电荷从铁电材料转换成输出电压。 铁电材料以参考信号振荡，使得电荷耦合到探针尖端并通过电荷放大器转换成输出电压。 锁定放大器，其接收参考电压并将参考电压施加到输出电压以提取表示极化的信号输出。

公开(公告)号：US07602261B2

公开(公告)日：2009-10-13

申请号：US11317960

申请日：2005-12-22

Applicant: Tsung-Kuan Allen Chou ,  Quan Tran

Inventor： Tsung-Kuan Allen Chou ,  Quan Tran

IPC: H01P1/10

CPC classification number: H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H1/5822 ,  H01H2059/0063 ,  H01H2059/0072

Abstract: An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.

Abstract translation: 机电开关包括致动电极，悬臂电极，触点，悬挂导体和信号线。 致动电极安装在基板上，悬臂电极悬挂在致动电极附近，接触件安装在悬臂电极上。 悬挂的导体耦合到接触件并跨越悬臂电极的一部分。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点和悬挂导体形成闭合电路。

公开(公告)号：US07321275B2

公开(公告)日：2008-01-22

申请号：US11165795

申请日：2005-06-23

Applicant: Tsung-Kuan Allen Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

Inventor： Tsung-Kuan Allen Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

IPC: H01P1/10

CPC classification number: H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

Abstract: An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

Abstract translation: 机电开关包括致动电极，锚，悬臂电极，触点和信号线。 致动电极和锚固件安装到基板上。 悬臂电极由致动电极上方的锚固件支撑。 触点安装到悬臂电极。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点形成闭合电路，导致悬臂电极以拉链的方式朝着致动电极弯曲，从悬臂的远端开始 电极。

公开(公告)号：US20060176126A1

公开(公告)日：2006-08-10

申请号：US11335920

申请日：2006-01-19

Applicant: Li-Peng Wang ,  Eyal Bar-Sadeh ,  Valluri Rao ,  John Heck ,  Qing Ma ,  Quan Tran ,  Alexander Talalyevsky ,  Eyal Ginsburg

Inventor： Li-Peng Wang ,  Eyal Bar-Sadeh ,  Valluri Rao ,  John Heck ,  Qing Ma ,  Quan Tran ,  Alexander Talalyevsky ,  Eyal Ginsburg

IPC: H04R17/00

CPC classification number: H03H9/564 ,  H03H3/02 ,  Y10T29/42

Abstract: A film bulk acoustic resonator filter may be formed with a plurality of interconnected series and shunt film bulk acoustic resonators formed on the same membrane. Each of the film bulk acoustic resonators may be formed from a common lower conductive layer which is defined to form the bottom electrode of each film bulk acoustic resonator. A common top conductive layer may be defined to form each top electrode of each film bulk acoustic resonator. A common piezoelectric film layer, that may or may not be patterned, forms a continuous or discontinuous film.

Abstract translation: 薄膜体声波谐振器滤波器可以形成有形成在同一膜上的多个互连串联和分流膜体声波谐振器。 膜体积声谐振器中的每一个可以由限定为形成每个膜体声波谐振器的底部电极的公共下导电层形成。 可以限定共同的顶部导电层以形成每个膜体声波谐振器的每个顶部电极。 可以或可以不被图案化的公共压电膜层形成连续或不连续的膜。

公开(公告)号：US06903452B2

公开(公告)日：2005-06-07

申请号：US10643427

申请日：2003-08-19

Applicant: Qing Ma ,  Valluri Rao ,  Li-Peng Wang ,  John Heck ,  Quan Tran

Inventor： Qing Ma ,  Valluri Rao ,  Li-Peng Wang ,  John Heck ,  Quan Tran

IPC: B81B7/00 ,  H01L23/02 ,  H01L23/34 ,  H01L23/48

CPC classification number: B81B7/0006 ,  B81C2203/0118 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A microelectromechanical system may be enclosed in a hermetic cavity defined by joined, first and second semiconductor structures. The joined structures may be sealed by a solder sealing ring, which extends completely around the cavity. One of the semiconductor structures may have the system formed thereon and an open area may be formed underneath said system. That open area may be formed from the underside of the structure and may be closed by covering with a suitable film in one embodiment.

Abstract translation: 微机电系统可封闭在由连接的第一和第二半导体结构限定的密封腔中。 接合结构可以通过完全围绕空腔延伸的焊料密封环密封。 半导体结构中的一个可以具有形成在其上的系统，并且可以在所述系统下方形成开放区域。 该开放区域可以由结构的下侧形成，并且在一个实施例中可以通过用适当的膜覆盖来封闭。

公开(公告)号：US06812814B2

公开(公告)日：2004-11-02

申请号：US10681550

申请日：2003-10-07

Applicant: Qing Ma ,  Valluri Rao ,  John Heck ,  Li-Peng Wang ,  Dong Shim ,  Quan Tran

Inventor： Qing Ma ,  Valluri Rao ,  John Heck ,  Li-Peng Wang ,  Dong Shim ,  Quan Tran

IPC: H01P110

CPC classification number: H01H59/0009 ,  H01H2001/0078 ,  H01H2059/0036

Abstract: This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

公开(公告)号：US20070146095A1

公开(公告)日：2007-06-28

申请号：US11317960

申请日：2005-12-22

Applicant: Tsung-Kuan Allen Chou ,  Quan Tran

Inventor： Tsung-Kuan Allen Chou ,  Quan Tran

IPC: H01P1/10

CPC classification number: H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H1/5822 ,  H01H2059/0063 ,  H01H2059/0072

Abstract: An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.

Abstract translation: 机电开关包括致动电极，悬臂电极，触点，悬挂导体和信号线。 致动电极安装在基板上，悬臂电极悬挂在致动电极附近，接触件安装在悬臂电极上。 悬挂的导体耦合到接触件并跨越悬臂电极的一部分。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点和悬挂导体形成闭合电路。

公开(公告)号：US20060290443A1

公开(公告)日：2006-12-28

申请号：US11165795

申请日：2005-06-23

Applicant: Tsung-Kuan Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

Inventor： Tsung-Kuan Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

IPC: H01P1/10

CPC classification number: H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

Abstract: An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

Abstract translation: 机电开关包括致动电极，锚，悬臂电极，触点和信号线。 致动电极和锚固件安装到基板上。 悬臂电极由致动电极上方的锚固件支撑。 触点安装到悬臂电极。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点形成闭合电路，导致悬臂电极以拉链的方式朝着致动电极弯曲，从悬臂的远端开始 电极。

公开(公告)号：US20050007219A1

公开(公告)日：2005-01-13

申请号：US10912413

申请日：2004-08-04

Applicant: Qing Ma ,  Valluri Rao ,  John Heck ,  Li-Peng Wang ,  Dong Shim ,  Quan Tran

Inventor： Qing Ma ,  Valluri Rao ,  John Heck ,  Li-Peng Wang ,  Dong Shim ,  Quan Tran

IPC: H01H59/00 ,  H01H51/22

CPC classification number: H01H59/0009 ,  H01H2001/0078 ,  H01H2059/0036

Abstract: This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

Abstract translation: 本申请公开了一种微机电（MEMS）开关设备，其包括附接到基板的锚固件和附接到锚固件并与其接触的导电梁。 所述梁包括具有近端和远端的锥形部分，所述近端附接到所述锚固件，附接到所述锥形部分的远端的致动部分，附接到所述致动部分的尖端，所述尖端具有触点 在其上的凹坑。 开关装置还包括附接到基板并位于致动部分和基板之间的致动电极。 还描述和要求保护附加实施例。