Flow path switching valve and manufacturing method therefor

    公开(公告)号:US10907748B2

    公开(公告)日:2021-02-02

    申请号:US16127807

    申请日:2018-09-11

    Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.

    Vacuum control valve and vacuum control apparatus
    13.
    发明授权
    Vacuum control valve and vacuum control apparatus 有权
    真空控制阀和真空控制装置

    公开(公告)号:US09234595B2

    公开(公告)日:2016-01-12

    申请号:US13957299

    申请日:2013-08-01

    CPC classification number: F16K3/06 F16J1/01 F16K31/1262 F16K51/02 H01L21/67017

    Abstract: A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.

    Abstract translation: 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体,通过执行线性运动来调节升程来操纵阀开口的阀体,杆 其从产生驱动力的线性驱动单元传递驱动力,在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面,外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。

    Liquid control device and mesh-like body assembly applied thereto
    15.
    发明授权
    Liquid control device and mesh-like body assembly applied thereto 有权
    液体控制装置和网状体组件应用于其上

    公开(公告)号:US09022366B2

    公开(公告)日:2015-05-05

    申请号:US13940102

    申请日:2013-07-11

    CPC classification number: B01F3/04 B01D1/22 B01D1/221 B05B9/03

    Abstract: A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.

    Abstract translation: 液体蒸发器包括:第一壳体,其具有供应化学溶液的液体供应表面,加热器,网状物,第一保持器和附接到网状物的外边缘部分的第二保持器, 第一盖螺栓,由第一壳体支撑的杆,沿着相对于液体供应表面倾斜的特定方向可移动;第二盖螺栓,螺旋弹簧,其沿着所述第一壳体的方向倾斜, 使所述网状物与所述液体供给面紧密接触,以及从所述液体供给面的一侧覆盖所述网状物的盖部件,以利用所述第一壳体密封所述液体供给面周围的空间。

    FOUR-WAY VALVE, VALVE UNIT, TEMPERATURE CONTROL SYSTEM

    公开(公告)号:US20230383854A1

    公开(公告)日:2023-11-30

    申请号:US18446479

    申请日:2023-08-09

    CPC classification number: F16K11/0856 G05D23/1306 F16K31/041 F16K27/065

    Abstract: A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

    Electromagnetic actuator
    18.
    发明授权

    公开(公告)号:US10344887B2

    公开(公告)日:2019-07-09

    申请号:US15649390

    申请日:2017-07-13

    Abstract: An electromagnetic actuator includes a pair of plate springs each of which is configured to produce elastic force in a predetermined direction in accordance with an amount of deformation; a movable member supported by the pair of plate springs to be movable in the predetermined direction; and a drive unit which is configured to drive the movable member in the predetermined direction in a non-contact state by means of electromagnetic force to be applied between the pair of plate springs in the predetermined direction.

    Coupling apparatus for chemical fluid flow channel
    20.
    发明授权
    Coupling apparatus for chemical fluid flow channel 有权
    化学流体通道耦合装置

    公开(公告)号:US09243720B2

    公开(公告)日:2016-01-26

    申请号:US14024458

    申请日:2013-09-11

    Abstract: A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.

    Abstract translation: 化学液体回路装置包括主电路部件,副电路部件和框架部件。 主电路构件具有用于使化学流体流动的药液通道和形成在药液通道的端部上的主开口。 副电路构件安装在主电路构件上并与主电路构件接触,并向主电路构件施加第一负载。 副回路构件具有用于从设备外部密封主开口的密封表面。 框架构件具有用于存储主电路构件的存储部分和设置在与存储在存储部分中的主电路构件的主开口连通的位置的连接开口。 框架构件的形状允许第一负载的反作用力从存储部分传递到主电路构件。

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