Characterization of an electron beam

    公开(公告)号:US11579318B2

    公开(公告)日:2023-02-14

    申请号:US17777747

    申请日:2020-11-12

    Applicant: Excillum AB

    Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.

    Method for protecting an X-ray source and an X-ray source

    公开(公告)号:US11438996B2

    公开(公告)日:2022-09-06

    申请号:US16967151

    申请日:2019-02-08

    Applicant: Excillum AB

    Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.

    X-ray source and method for generating x-ray radiation

    公开(公告)号:US11342154B2

    公开(公告)日:2022-05-24

    申请号:US16766935

    申请日:2018-11-30

    Applicant: Excillum AB

    Abstract: The present inventive concept relates to an X-ray source comprising: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to comprise a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target comprises an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.

    Structured x-ray target
    15.
    发明授权

    公开(公告)号:US10784069B2

    公开(公告)日:2020-09-22

    申请号:US16340449

    申请日:2017-10-19

    Applicant: Excillum AB

    Abstract: A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.

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