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公开(公告)号:US20240310209A1
公开(公告)日:2024-09-19
申请号:US18679296
申请日:2024-05-30
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
CPC classification number: G01H11/08 , G01N29/07 , G01S15/02 , H10N30/302 , H10N30/852 , B81B3/0021
Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.
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公开(公告)号:US20230002213A1
公开(公告)日:2023-01-05
申请号:US17364381
申请日:2021-06-30
Applicant: Exo Imaging, Inc.
Inventor: Naresh MANTRAVADI , Haesung KWON , Brian BIRCUMSHAW
Abstract: Disclosed is a multi-silicon on insulator (SOI) micromachined ultrasonic transducer (MUT) device. The device comprises a multi-SOI substrate and a MUT. The MUT is affixed to a surface of the multi-SOI substrate. The multi-SOI substrate has a first SOI layer and at least a second SOI layer disposed above the first SOI layer. The first SOI layer and the second SOI layer each comprise an insulating layer and a semiconducting layer. The first SOI layer further defines a cavity located under a membrane of a MUT and one or more trenches at least partially around a perimeter of the cavity.
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公开(公告)号:US20220205836A1
公开(公告)日:2022-06-30
申请号:US17697837
申请日:2022-03-17
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
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公开(公告)号:US20210172788A1
公开(公告)日:2021-06-10
申请号:US17180308
申请日:2021-02-19
Applicant: eXo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
Abstract: A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
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公开(公告)号:US20210078042A1
公开(公告)日:2021-03-18
申请号:US17018304
申请日:2020-09-11
Applicant: eXo Imaging, Inc.
Inventor: Brian BIRCUMSHAW , Sandeep AKKARAJU , Haesung KWON
IPC: B06B1/06 , H01L41/083 , H01L41/047
Abstract: Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.
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公开(公告)号:US20210069748A1
公开(公告)日:2021-03-11
申请号:US17099545
申请日:2020-11-16
Applicant: eXo Imaging, Inc.
Inventor: Brian BIRCUMSHAW , Sandeep AKKARAJU , Haesung KWON
Abstract: Disclosed herein are ultrasonic transducer systems comprising: an ultrasonic transducer comprising a substrate, a diaphragm, and a piezoelectric element; a first electrical circuitry coupled to the ultrasonic transducer, the first electrical circuitry configured for driving the ultrasonic transducer or detecting motion of the diaphragm; a plurality of electrical ports coupled to the ultrasonic transducer; and a second electrical circuitry connected to two or more of the plurality of electrical ports, the electrical circuitry comprising one or more of: a resistor, a capacitor, a switch, and an amplifier, wherein the second electrical circuitry is independent from the first electrical circuitry, and wherein the second electrical circuitry is configured to dampen the motion of the diaphragm.
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公开(公告)号:US20240286173A1
公开(公告)日:2024-08-29
申请号:US18656525
申请日:2024-05-06
Applicant: Exo Imaging, Inc.
Inventor: Haesung KWON , Brian BIRCUMSHAW , Sandeep AKKARAJU
CPC classification number: B06B1/0622 , G01H11/08 , G01N29/2406 , B06B1/0292 , H10N30/2047
Abstract: Described are micromachined ultrasonic transducers (MUTs) with convex or concave electrodes, which have enhanced pressure amplitude and frequency response behavior when driven at fundamental and harmonic frequencies, as well as methods of making the same.
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公开(公告)号:US20240082876A1
公开(公告)日:2024-03-14
申请号:US18514989
申请日:2023-11-20
Applicant: Exo Imaging, Inc.
Inventor: Haesung KWON , Brian BIRCUMSHAW , Sandeep AKKARAJU
IPC: B06B1/06
CPC classification number: B06B1/0603 , A61B8/4483
Abstract: A micromachined ultrasonic transducer (MUT) which comprises a first piezoelectric layer and a second piezoelectric layer. The first piezoelectric layer is disposed between a first electrode and a second electrode. The second piezoelectric layer is disposed between the second electrode and a third electrode. At least the first electrode has first and second ends along a first axis, one or more of which is defined by a radius of curvature R. A second axis normal to the first passes through a midpoint of the first axis. A half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode. A total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape. R/L is greater than 1.
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公开(公告)号:US20220304659A1
公开(公告)日:2022-09-29
申请号:US17215776
申请日:2021-03-29
Applicant: eXo Imaging, Inc.
Inventor: Brian BIRCUMSHAW , Sandeep AKKARAJU , Drake GUENTHER , Haesung KWON , Anthony BROCK
Abstract: Described are micromachined ultrasonic transducer (MUT) arrays with trenches, reducing cross-talk between MUTs to mitigate undesirable artifacts in ultrasound images, as well as methods of making the same.
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公开(公告)号:US20210364348A1
公开(公告)日:2021-11-25
申请号:US17395171
申请日:2021-08-05
Applicant: Exo Imaging, Inc.
Inventor: Sandeep AKKARAJU , Haesung KWON , Brian BIRCUMSHAW
IPC: G01H11/08 , H01L41/18 , G01N29/07 , G01S15/02 , H01L41/113
Abstract: An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.
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