公开(公告)号：US20220396469A1

公开(公告)日：2022-12-15

申请号：US17565773

申请日：2021-12-30

Applicant: Fortemedia, Inc.

Inventor： Jien-Ming CHEN ,  Chih-Yuan CHEN ,  Feng-Chia HSU ,  Wen-Shan LIN ,  Nai-Hao KUO

IPC: B81B3/00

Abstract: A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate, an insulating layer, and a diaphragm. The substrate has an opening portion. The backplate is disposed on a side of the substrate, with protrusions protruding toward the substrate. The diaphragm is movably disposed between the substrate and the backplate and spaced apart from the backplate by a spacing distance. The protrusions are configured to limit the deformation of the diaphragm when air flows through the opening portion.