公开(公告)号：US20150022806A1

公开(公告)日：2015-01-22

申请号：US14377753

申请日：2012-10-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Yukihiro Shibata ,  Kei Shimura ,  Sachio Uto ,  Toshifumi Honda

IPC: G01N21/94 ,  G01N21/95 ,  G01N21/958 ,  G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/958 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0697 ,  G01N2201/12 ,  G03F7/7065

Abstract: To increase the illumination efficiency by facilitating the change of the incident angle of illumination light with a narrow illumination width according to an inspection object and enabling an illumination region to be effectively irradiated with light, provided is a defect inspection method for obliquely irradiating a sample mounted on a table that is moving continuously in one direction with illumination light, collecting scattered light from the sample obliquely irradiated with the illumination light, detecting an image of the surface of the sample formed by the scattered light, processing a signal obtained by detecting the image formed by the scattered light, and extracting a defect candidate, wherein the oblique irradiation of the light is implemented by linearly collecting light emitted from a light source, and obliquely projecting the collected light onto the surface of the sample, thereby illuminating a linear region on the surface of the sample.

Abstract translation: 为了通过根据检查对象促进具有窄照明宽度的照明光的入射角的改变来提高照明效率，并且能够有效地照射照明区域，所以提供了一种用于倾斜照射安装的样本的缺陷检查方法 在利用照明光在一个方向上连续移动的台上，从倾斜照射照明光的样本收集散射光，检测由散射光形成的样品的表面的图像，处理通过检测图像而获得的信号 通过散射光形成并提取缺陷候选物，其中光的倾斜照射是通过线性收集从光源发射的光，并将收集的光倾斜地投射到样品的表面上，从而照亮线上区域 样品的表面。