公开(公告)号：US20140294143A1

公开(公告)日：2014-10-02

申请号：US14219579

申请日：2014-03-19

Applicant: Hitachi High-Tech Science Corporation

Inventor： Hiroaki Nohara ,  Yoshiki Matoba ,  Noriaki Sakai ,  Toshitada Takeuchi

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray fluorescence spectrometer includes: a sample stage configured to place a sample thereon; an X-ray source configured to irradiate the sample with primary X-rays; a detector, which is configured to detect fluorescent X-rays produced from the sample irradiated with the primary X-rays, and which includes an X-ray incident window formed by a window material through which fluorescent X-rays is transmittable; and a gas blowing mechanism configured to blow a gas to at least one of an outer surface of the X-ray incident window and the sample stage.

Abstract translation: X射线荧光光谱仪包括：样品台，被配置为在其上放置样品; X射线源，被配置为用原始X射线照射样品; 检测器，其被配置为检测由所述主X射线照射的样品产生的荧光X射线，并且包括由可透射荧光X射线的窗口材料形成的X射线入射窗; 以及气体吹送机构，被配置为将气体吹送到X射线入射窗和样品台的外表面中的至少一个。

公开(公告)号：US11022570B2

公开(公告)日：2021-06-01

申请号：US16525352

申请日：2019-07-29

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yoshiki Matoba

IPC: G01N23/04 ,  G01N23/044 ,  G01N23/046 ,  G01N23/06 ,  G01N23/083 ,  G01N23/087 ,  G01N23/18

Abstract: An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When V1 is a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V2)/(L×F×A)] in a direction in which the sample moves.

公开(公告)号：US10054555B2

公开(公告)日：2018-08-21

申请号：US15220880

申请日：2016-07-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yoshiki Matoba ,  Akihiro Takeda ,  Shingo Tsuboi ,  Toshihiro Sakai

IPC: G01N23/04 ,  G01S17/08

CPC classification number: G01N23/04 ,  G01N2223/50 ,  G01N2223/652 ,  G01S17/08

Abstract: Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source (2) irradiating a sample with X-rays; a sample moving device (3) moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) (4) provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor (5) measuring a distance between the X-ray source and the sample; and a TDI controller (6) controlling the TDI sensor by changing a charge transfer speed of the TDI sensor (4) in real time based on variations in the distance measured by the distance sensor.

公开(公告)号：US09400255B2

公开(公告)日：2016-07-26

申请号：US14219579

申请日：2014-03-19

Applicant: Hitachi High-Tech Science Corporation

Inventor： Hiroaki Nohara ,  Yoshiki Matoba ,  Noriaki Sakai ,  Toshitada Takeuchi

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray fluorescence spectrometer includes: a sample stage configured to place a sample thereon; an X-ray source configured to irradiate the sample with primary X-rays; a detector, which is configured to detect fluorescent X-rays produced from the sample irradiated with the primary X-rays, and which includes an X-ray incident window formed by a window material through which fluorescent X-rays is transmittable; and a gas blowing mechanism configured to blow a gas to at least one of an outer surface of the X-ray incident window and the sample stage.

Abstract translation: X射线荧光光谱仪包括：样品台，被配置为在其上放置样品; X射线源，被配置为用原始X射线照射样品; 检测器，其被配置为检测由所述主X射线照射的样品产生的荧光X射线，并且包括由可透射荧光X射线的窗口材料形成的X射线入射窗; 以及气体吹送机构，被配置为将气体吹送到X射线入射窗和样品台的外表面中的至少一个。

公开(公告)号：US09001966B2

公开(公告)日：2015-04-07

申请号：US13769704

申请日：2013-02-18

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yoshiki Matoba

IPC: G01N23/083 ,  H05G1/02 ,  G21K5/10 ,  G01N21/86 ,  H01J37/20 ,  G01N23/04

CPC classification number: G01N23/04

Abstract: A transmission X-ray analyzer (1) for detecting a transmission X-ray image of a sample (100) that is continuous in a band shape includes: a TDI sensor (14); an X-ray source (12) arranged opposed to a TDI sensor; a pair of support rollers (31, 32) arranged away from the TDI sensor between the TDI sensor and the X-ray source, the pair of support rollers being configured to transport the sample to a detection position of the TDI sensor while keeping a constant interval between the TDI sensor and the sample; and a pair of outside rollers (51, 52) arranged respectively on an outer side of the pair of support rollers in a transportation direction (L). One of the pair of support rollers and one of the pair of outside rollers are arranged at different positions as to apply a tension to the sample between the pair of support rollers.

Abstract translation: 用于检测带状连续的样品（100）的透射X射线图像的透射X射线分析仪（1）包括：TDI传感器（14）; 与TDI传感器相对布置的X射线源（12）; 一对在TDI传感器和X射线源之间远离TDI传感器布置的支撑辊（31,32），所述一对支撑辊被配置成将样品运送到TDI传感器的检测位置，同时保持恒定 TDI传感器和样品之间的间隔; 以及分别在输送方向（L）上分别设置在一对支承辊的外侧的一对外侧辊（51,52）。 一对支撑辊中的一个和一对外侧辊中的一个布置在不同的位置，以在一对支撑辊之间向样品施加张力。