公开(公告)号：US09891053B2

公开(公告)日：2018-02-13

申请号：US14800612

申请日：2015-07-15

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger ,  Ozan Anac

IPC: G01C19/00 ,  G01C19/5755 ,  G01C19/5733

CPC classification number: G01C19/5755 ,  G01C19/5733

Abstract: A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.

公开(公告)号：US09395183B2

公开(公告)日：2016-07-19

申请号：US14472143

申请日：2014-08-28

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger ,  Ozan Anac

IPC: G01C19/00 ,  G01C19/5733 ,  G01C19/574 ,  G01C19/5712 ,  G01C19/5755

CPC classification number: G01C19/5733 ,  G01C19/5712 ,  G01C19/574 ,  G01C19/5755

Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

Abstract translation: 公开了一种陀螺仪。 陀螺仪包括基板; 和引导质量体系。 引导质量系统包括检验质量和引导臂。 证明物质和引导臂设置在平行于基底的平面中。 证明物质联接到引导臂。 引导臂也通过弹簧与基板相连。 引导臂允许证明物质在平面中的第一方向的运动。 引导臂和证明质量围绕第一感测轴线旋转。 第一感测轴在平面内并且平行于第一方向。 陀螺仪包括用于在第一方向上振动证明物质的致动器。 陀螺仪还包括用于响应于围绕在平面中并与第一方向正交的第一输入轴的角速度来感测与平面相反的质量法向运动的换能器。

公开(公告)号：US09170107B2

公开(公告)日：2015-10-27

申请号：US14041810

申请日：2013-09-30

Applicant: InvenSense, Inc.

Inventor： Ozan Anac ,  Joseph Seeger

IPC: G01C19/56 ,  G01C19/574 ,  G01C19/5712

CPC classification number: G01C19/56 ,  G01C19/5712 ,  G01C19/574

Abstract: A gyroscope comprises a substrate and a guided mass system. The guided mass system comprises proof masses and guiding arms disposed in a plane parallel to the substrate. The proof masses are coupled to the guiding arm by springs. The guiding arm is coupled to the substrate by springs. At least one of the proof-masses is directly coupled to the substrate by at least one anchor via a spring system. The gyroscope also comprises an actuator for vibrating one of the proof-masses in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.

Abstract translation: 陀螺仪包括基板和引导质量系统。 引导质量系统包括设置在平行于基板的平面中的检验质量块和引导臂。 检测质量通过弹簧联接到引导臂。 引导臂通过弹簧联接到基板。 至少一个校验物质通过弹簧系统由至少一个锚定件直接耦合到衬底。 陀螺仪还包括用于在第一方向上振动一个证明质量块的致动器，这导致另一个证明物质在平面中旋转。 最后，陀螺仪还包括用于响应于围绕单个轴或多个输入轴的角速度来感测被引导质量系统的运动的换能器。