公开(公告)号：US09418819B2

公开(公告)日：2016-08-16

申请号：US14476537

申请日：2014-09-03

Applicant: KLA-Tencor Corporation

Inventor： John Gerling ,  Tomas Plettner ,  Mehran Nasser-Ghodsi

IPC: G21K5/04 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/28

Abstract: A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 带电粒子检测装置具有有源部分，用于配置为产生响应从活性部分上的样品着陆点发射的二次带电粒子的信号。 活性部分被成形为在检测器处适应预期的二次带电粒子的非对称图案。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20150076697A1

公开(公告)日：2015-03-19

申请号：US14485574

申请日：2014-09-12

Applicant: KLA-Tencor Corporation

Inventor： Tomas Plettner ,  Mehran Nasser-Ghodsi ,  John Gerling

IPC: H01L21/768 ,  H01L23/532 ,  H01L23/522

CPC classification number: H01L21/76865 ,  H01J9/025 ,  H01L23/522 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A semiconductor device comprises a plurality of device features formed on a substrate and a plurality of dummy features formed on the substrate and across an open region between the device features. Adjacent device features are spaced apart by a distance of 100 microns or more. Each device feature includes a barrier island and a metal layer on top of the barrier island. Each dummy feature has a structure that corresponds to the structure of the barrier island. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 半导体器件包括形成在衬底上的多个器件特征以及形成在衬底上并穿过器件特征之间的开放区域的多个虚拟特征。 相邻的设备特征间隔开100微米或更大的距离。 每个设备特征包括屏障岛和在屏障岛顶部的金属层。 每个虚拟特征具有对应于屏障岛的结构的结构。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20150076350A1

公开(公告)日：2015-03-19

申请号：US14486739

申请日：2014-09-15

Applicant: KLA-Tencor Corporation

Inventor： Thomas Plettner ,  John Gerling

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/2482

Abstract: An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 靠近非相对论带电粒子束的设计轨迹放置的电磁雷达场检测器响应于带电粒子束的通过而产生光信号而不中断带电粒子束。 光子检测器接收光信号并产生相应的输出。 尾波检测器可以基于电光效应。 具体地，检测器可以测量带电粒子束的辐射束对在附近的电光波导中平行于光束行进的辐射相位的影响。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。