公开(公告)号：US06360424B1

公开(公告)日：2002-03-26

申请号：US09333554

申请日：1999-06-16

Applicant: Mehran Mehregany ,  Francis L. Merat

Inventor： Mehran Mehregany ,  Francis L. Merat

IPC: H02K1504

CPC classification number: G02B26/121 ,  F04D13/06 ,  G02B26/0816 ,  G02B26/106 ,  H02N1/004 ,  Y10T29/49012 ,  Y10T29/49812

Abstract: Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of a polygon (nickel) mirror on a polysilicon, electrostatic micromotor rotor for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micromotor constructions.

Abstract translation: 微电机在其转子上用功利特征制造。 在一些实施例中，通过在转子表面的顶部上模制添加材料形成特征。 在其它实施例中，特征是通过在转子顶部设置附加层以及从中选择性地移除材料形成的。 在其它实施例中，通过从转子本身选择性地去除材料来限定特征。 具体地参考多晶硅（镍）反射镜在多晶硅（静电微电机转子）上制造用于扫描应用的公开。 然而，本发明的原理同样可以应用于各种其他特征的制造，例如光栅，百叶窗，机械致动器，泵叶轮和翅片，以及各种不同的微电机结构。

公开(公告)号：US06171972B2

公开(公告)日：2001-01-09

申请号：US09191966

申请日：1998-11-13

Applicant: Mehran Mehregany ,  Christopher A. Bang ,  Kevin C. Stark

Inventor： Mehran Mehregany ,  Christopher A. Bang ,  Kevin C. Stark

IPC: H01L2100

CPC classification number: B05B1/3436 ,  B81B2201/051 ,  B81C1/00531

Abstract: A method for forming micromachined devices out of a polycrystalline silicon substrate using deep reactive ion etching to form the micromachined device. The method comprises the steps of providing a bulk material substrate of polycrystalline silicon, and etching the bulk material using deep reactive ion etching to form the micromachined device. The present invention also includes a method for forming a micromachined device comprising the steps of providing a first layer of single crystal silicon and etching a first set of elements on the first layer. The method further includes the steps of providing a second layer of single crystal silicon, etching a second set of elements on the second layer, and joining the first and second layers together such that the crystal planes of the first layer and the second layer are misaligned and such that the first set and the second set of elements are properly aligned.

Abstract translation: 使用深反应离子蚀刻从多晶硅衬底形成微加工器件以形成微机械加工器件的方法。 该方法包括以下步骤：提供多晶硅的散装材料基板，并使用深反应离子蚀刻来蚀刻散装材料以形成微机械加工装置。 本发明还包括一种用于形成微加工装置的方法，包括以下步骤：提供第一层单晶硅并蚀刻第一层上的第一组元件。 该方法还包括以下步骤：提供第二层单晶硅，蚀刻第二层上的第二组元件，以及将第一和第二层接合在一起，使得第一层和第二层的晶面失配 并且使得第一组和第二组元件被适当对准。

公开(公告)号：US6136243A

公开(公告)日：2000-10-24

申请号：US90526

申请日：1998-06-04

Applicant: Mehran Mehregany ,  Narayanan Rajan ,  Christian A. Zorman

Inventor： Mehran Mehregany ,  Narayanan Rajan ,  Christian A. Zorman

IPC: B29C33/42 ,  B81C1/00 ,  B81C99/00 ,  B29C41/08 ,  B29C33/52 ,  C23F1/02 ,  C23F1/04 ,  C25F3/02

CPC classification number: B81C99/009 ,  B81C99/0085 ,  B81C2201/0132 ,  B81C2201/034

Abstract: A method for molding high precision components is provided that allows inexpensive, rapid fabrication of components using a process involving a silicon substrate, in which the mold pattern is created using multiple mask layers, a deep reactive ion etch process and photolithographic patterning techniques.

Abstract translation: 提供了一种用于模制高精度部件的方法，其允许使用涉及硅衬底的工艺来廉价，快速地制造部件，其中使用多个掩模层制造模具图案，深反应离子蚀刻工艺和光刻图案化技术。

公开(公告)号：US5966066A

公开(公告)日：1999-10-12

申请号：US868705

申请日：1997-06-04

Applicant: Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

Inventor： Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

IPC: G01L1/18 ,  B81B3/00 ,  G01D9/18 ,  G01D15/00 ,  G01K5/60 ,  G01P15/08 ,  H01H1/00 ,  H01H9/00 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01L29/84 ,  H01H71/22 ,  H01H37/10 ,  H01L23/58 ,  H01H29/84

CPC classification number: G01P15/0891 ,  G01P15/0802 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02

Abstract: A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the sensor latched purely mechanically is electrically reset for repeat use.

Abstract translation: 微机械存储器传感器。 传感器包括在检测到可变状态的阈值时机械地闭锁的闩锁构件和用于检测这种锁定的电路。 传感器还包括用于电解锁闩构件的复位机构，由此将机械地完全闩锁的传感器电复位以重复使用。

公开(公告)号：US20120276674A1

公开(公告)日：2012-11-01

申请号：US13466595

申请日：2012-05-08

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/306

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: MEMS accelerometers have a substrate, and a proof mass portion thereof which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: MEMS加速度计具有基板和其与其周围的基板间隔开的检验质量部分。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US08280882B2

公开(公告)日：2012-10-02

申请号：US11379470

申请日：2006-04-20

Applicant: Adam D. Troy ,  Guo-Qiang Zhang ,  Mehran Mehregany

Inventor： Adam D. Troy ,  Guo-Qiang Zhang ,  Mehran Mehregany

IPC: G06F17/30

CPC classification number: G06F17/3069 ,  G06F17/30722

Abstract: Disclosed is an author-centric search that facilitates identifying a source commonly associated with a topic by, for example, providing a ranked listing of experts in a field of knowledge related to a search phrase. The search phrase can be captured and parsed into the individual words (e.g., substrings) of the search phrase. Based on occurrences of the words in one or more documented communications, statistics can be generated to determine the relevancy of each documented communication in relation to the search phrase. Further, additional statistics can be generated describing the occurrence of multiple words in a documented communication and/or a distance of words between the search phrase words in a documented communication. The statistics can be utilized to generate expert scores. The expert scores can be sorted for and/or displayed to the user.

Abstract translation: 公开了以作者为中心的搜索，其有助于通过例如提供与搜索短语相关的知识领域中的专家排名列表来识别通常与主题相关联的源。 可以将搜索短语捕获并分析成搜索短语的单个单词（例如，子串）。 基于在一个或多个文档化通信中出现的单词，可以生成统计数据以确定每个记录的通信与搜索短语相关的相关性。 此外，可以生成额外的统计数据，其描述在记录的通信中的文档通信中的多个单词的发生和/或文档通信中的搜索短语单词之间的距离。 统计数据可用于产生专家评分。 专家评分可以排序和/或显示给用户。

公开(公告)号：US20110209343A1

公开(公告)日：2011-09-01

申请号：US13032081

申请日：2011-02-22

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H05K3/02

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: 公开了MEMS加速度计及其制造方法。 示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且其与通过间隙围绕其的基板分离。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。 静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US20110001143A1

公开(公告)日：2011-01-06

申请号：US11736964

申请日：2007-04-18

Applicant: Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

Inventor： Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

IPC: H01L29/24 ,  H01L29/84

CPC classification number: C23C16/325

Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Abstract translation: 公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。 还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

公开(公告)号：US20090280594A1

公开(公告)日：2009-11-12

申请号：US12503382

申请日：2009-07-15

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/30

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: 公开了MEMS加速度计及其制造方法。 示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且与基板周围的基板间隔开。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。 静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US20060248076A1

公开(公告)日：2006-11-02

申请号：US11379470

申请日：2006-04-20

Applicant: Adam Troy ,  Guo-Qiang Zhang ,  Mehran Mehregany

Inventor： Adam Troy ,  Guo-Qiang Zhang ,  Mehran Mehregany

IPC: G06F17/30

CPC classification number: G06F17/3069 ,  G06F17/30722

Abstract: Disclosed is an author-centric search that facilitates identifying a source commonly associated with a topic by, for example, providing a ranked listing of experts in a field of knowledge related to a search phrase. The search phrase can be captured and parsed into the individual words (e.g., substrings) of the search phrase. Based on occurrences of the words in one or more documented communications, statistics can be generated to determine the relevancy of each documented communication in relation to the search phrase. Further, additional statistics can be generated describing the occurrence of multiple words in a documented communication and/or a distance of words between the search phrase words in a documented communication. The statistics can be utilized to generate expert scores. The expert scores can be sorted for and/or displayed to the user.

Abstract translation: 公开了以作者为中心的搜索，其有助于通过例如提供与搜索短语相关的知识领域中的专家排名列表来识别通常与主题相关联的源。 可以将搜索短语捕获并分析成搜索短语的单个单词（例如，子串）。 基于在一个或多个文档化通信中出现的单词，可以生成统计数据以确定每个记录的通信与搜索短语相关的相关性。 此外，可以生成额外的统计数据，其描述在记录的通信中的文档通信中的多个单词的发生和/或文档通信中的搜索短语单词之间的距离。 统计数据可用于产生专家评分。 专家评分可以排序和/或显示给用户。