公开(公告)号：US20250109934A1

公开(公告)日：2025-04-03

申请号：US18477158

申请日：2023-09-28

Applicant: Orbotech Ltd.

Inventor： Yuri Paskover ,  Hanina Golan ,  Ilia Lutsker ,  Nir Turko ,  Oleg Yermak ,  Saki Hakim

IPC: G01B9/02 ,  G01N21/95

Abstract: In the system, an illumination source emits light, a first beam splitter directs a portion of the light toward a sample and directs another portion of the light toward a reference surface that reflects the light back to the first beam splitter to be recombined with light reflected by the sample, at least one second beam splitter that directs n portions of the light toward n detectors, each of the n portions of the light having a preset phase shift and n≥2, and a processor receives intensities of the n portions of the light. The processor calculates an interferogram envelope based on the intensities measured by the n detectors as the reference surface moves between a plurality of signal collection positions.

公开(公告)号：US11974046B2

公开(公告)日：2024-04-30

申请号：US17274046

申请日：2019-08-27

Applicant: ORBOTECH LTD.

Inventor： Yigal Katzir ,  Ilia Lutsker ,  Elie Meimoun

IPC: G01N21/956 ,  H04N5/265 ,  H04N23/74

CPC classification number: H04N23/74 ,  G01N21/956 ,  H04N5/265 ,  G01N2021/95638

Abstract: An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities, images of which are acquired by a single sensor forming part of the image sensing subsystem.

公开(公告)号：US11313794B2

公开(公告)日：2022-04-26

申请号：US17064212

申请日：2020-10-06

Applicant: Orbotech Ltd.

Inventor： Ram Oron ,  Hanina Golan ,  Ilia Lutsker ,  Gil Tidhar

IPC: G03H1/00 ,  G01B11/24 ,  G01B11/25 ,  G01B9/023 ,  G01B9/02 ,  G01N21/45 ,  G03H1/04 ,  G03H1/08 ,  G01B9/02015

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.

公开(公告)号：US11159712B2

公开(公告)日：2021-10-26

申请号：US16282766

申请日：2019-02-22

Applicant: Orbotech Ltd.

Inventor： Shai Wiseman ,  Yigal Katzir ,  Ofir Shnit ,  Ilia Lutsker ,  Chay Goldenberg

IPC: G01B11/25 ,  G02B7/09 ,  G02B7/28 ,  G06T1/00 ,  G06T7/50 ,  H04N5/225 ,  H04N5/232

Abstract: A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.