Small angle optical beam steering using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS)

    公开(公告)号:US11550146B2

    公开(公告)日:2023-01-10

    申请号:US17152023

    申请日:2021-01-19

    Abstract: Small angle optical beam steering is performed using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) that minimizes diffraction for a specified steering angle, Generally speaking, this is accomplished with a MEMS MMA that exhibits a “piston” capability to translate individual mirrors in addition to the tip and tilt capabilities. Adjacent mirrors can be tipped/tilted to the specified steering angle and then translated by a requisite amount to approximate a continuous surface. For a specified steering angle, the MEMS MMA is partitioned into one or more sections with each section including the maximum number of mirrors that can be grouped together and actuated to approximate a continuous surface given a maximum translation z. As a result, the only edge discontinuities exist between adjacent sections thereby minimizing distortion for a given steering angle.

    MULTIPLE FIELD-OF-VIEW (FOV) OPTICAL SENSOR USING A MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA)

    公开(公告)号:US20220317260A1

    公开(公告)日:2022-10-06

    申请号:US17217929

    申请日:2021-03-30

    Abstract: A multiple FOV optical sensor includes a primary mirror having first and second rings of differing curvature to collect light from an object within different FOV. A secondary mirror includes a MEMS MMA in which the mirrors tip and tilt in 2 DOF or add piston in 3 DOF to (I) reflect light from the first ring within the first FOV that is focused at an imaging plane coincident with an imaging detector to form a focused image of the object at the imaging detector or (II) reflect light from the second ring within the second FOV onto the imaging detector (either focused to form a focused image or defocused to form a blurred spot). The MEMS MMA may be configured to alternate between (I) and (II) or to perform both (I) and (II) at the same time with the different FOV either overlapped or spatially separated on the detector. The sensor may be configured as an all-passive sensor, a dual-mode sensor or a hybrid of the two.

    SMALL ANGLE OPTICAL BEAM STEERING USING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAYS (MMAS)

    公开(公告)号:US20220229285A1

    公开(公告)日:2022-07-21

    申请号:US17152023

    申请日:2021-01-19

    Abstract: Small angle optical beam steering is performed using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) that minimizes diffraction for a specified steering angle, Generally speaking, this is accomplished with a MEMS MMA that exhibits a “piston” capability to translate individual mirrors in addition to the tip and tilt capabilities. Adjacent mirrors can be tipped/tilted to the specified steering angle and then translated by a requisite amount to approximate a continuous surface. For a specified steering angle, the MEMS MMA is partitioned into one or more sections with each section including the maximum number of mirrors that can be grouped together and actuated to approximate a continuous surface given a maximum translation z. As a result, the only edge discontinuities exist between adjacent sections thereby minimizing distortion for a given steering angle.

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