Abstract:
A liquid jet head includes an actuator substrate having a plurality of elongated grooves arrayed from an upper surface to a lower surface thereof. The grooves are formed from a vicinity of a peripheral end on one side of the actuator substrate to a peripheral end the other side thereof, ends of the grooves in a longitudinal direction thereof have respective inclined surfaces rising from the lower surface to the upper surface of the actuator substrate, and a crossing angle at crossing portions at which the inclined surfaces and the lower surface cross each other is in a range of 3 degrees to 80 degrees. A width W of the inclined surfaces in the longitudinal direction thereof and a thickness D of the actuator substrate satisfy a relationship 0.2≦(W/D)≦11 at the ends on one side of the grooves.
Abstract:
A liquid jet head includes an actuator substrate having ejection grooves and non-ejection grooves partitioned by walls each including a piezoelectric body. The non-ejection grooves have, at ends on one side thereof, respective inclined surfaces rising from bottom surfaces thereof to upper surface openings at upper portions thereof. Common electrodes are provided in a strip form along a longitudinal direction of the walls on both side surfaces of the walls facing the ejection grooves, and active electrodes are provided in a strip form along the longitudinal direction of the walls on both side surfaces of the walls facing the non-ejection grooves. The active electrodes extend from positions in the vicinity of the ends on one side of the non-ejection grooves to ends on the other side thereof.
Abstract:
A liquid jet head is provided with an actuator substrate partitioned by elongated walls of a piezoelectric body and having elongated ejection grooves and elongated non-ejection grooves alternately arrayed thereon so as to penetrate the actuator substrate from an upper surface through a lower surface thereof; a cover plate provided on the upper surface and having first slits communicating with the ejection grooves on one side and second slits communicating with the ejection grooves on the other side; and a nozzle plate provided on the lower surface and having nozzles communicating with the ejection grooves. The non-ejection grooves extend, on the other side, up to a second-side peripheral end of the actuator substrate, and the actuator substrate is left to form raised bottom portions on bottoms of the non-ejection grooves near the second-side peripheral end.
Abstract:
A liquid jet head includes a nozzle plate having a first nozzle row and a second nozzle row each formed of a plurality of nozzles; and a piezoelectric plate having a plurality of first ejection grooves communicating with respective ones of the plurality of nozzles of the first nozzle row, and a plurality of second ejection grooves communicating with respective ones of the plurality of nozzles of the second nozzle row. The plurality of first ejection grooves and the plurality of second ejection grooves are longitudinally separated from each other in the longitudinal direction of the grooves by a partition wall located between the plurality of first ejection grooves and the plurality of second ejection grooves.
Abstract:
A liquid jet head includes a base plate, and an actuator portion fixed to the base plate and having an array of alternating ejection channel and a dummy channel. drive electrodes are formed on inner surfaces of the ejection channels and the dummy channels, and extracting electrodes are formed on the base plate on a rear side of the actuator plate and electrically connected to the drive electrodes. an electrode formation region of the base plate on which are formed the extracting electrodes has a surface roughness greater then that of other regions of the base plate.
Abstract:
A liquid jet head includes a piezoelectric substrate having ejection grooves formed in an upper surface thereof and arranged in a reference direction. A side flow path is formed in a first side surface of the piezoelectric substrate and communicates with the ejection grooves. A cover plate is bonded to the upper surface, and a nozzle plate is bonded to the first side surface and has nozzles communicating with the respective ejection grooves.
Abstract:
A method of manufacturing a head chip includes a groove forming step for forming grooves which are the bases of ejection grooves on a first surface of the actuator substrate, a substrate grinding step for grinding a second surface of the actuator substrate so that each of the grooves has a predetermined depth, a recessed portion forming step for forming an inspection recessed portion which changes its state in the second surface of the actuator substrate according to the grinding amount of the actuator substrate in the substrate grinding step, and a grinding amount determination step for determining the grinding amount of the actuator substrate on the basis of a state of the inspection recessed portion after the substrate grinding step.
Abstract:
A method of manufacturing a liquid jet head includes: a groove forming step of alternately forming ejection grooves and non-ejection grooves in a reference direction on an upper surface of an actuator substrate; a cover plate processing step of forming a recessed portion on an upper surface of a cover plate and slits penetrating the cover plate from a bottom surface of the recessed portion through a lower surface located opposite to the upper surface of the cover plate; a substrate bonding step of bonding the lower surface of the cover plate to the upper surface of the actuator substrate to allow the slits to communicate with the respective ejection grooves; and an electrode forming step of simultaneously forming conductive films on side surfaces of the ejection grooves, side surfaces of the non-ejection grooves, and inner surfaces of the slits and the recessed portion.
Abstract:
A liquid jet head includes an actuator substrate having a principal surface on which ejection channels and non-ejection channels are formed, common electrodes formed on side surfaces of the ejection channels, individual electrodes formed on side surfaces of the non-ejection channels, individual electrode pads for connection to the individual electrodes, and common electrode pads for connection to the common electrodes. A groove is formed on the principal surface of the actuator substrate for isolating the individual electrode pads and the common electrode pads from one another. An external substrate has individual electrode terminals and common electrode terminals for connection to the individual electrode pads and common electrode pads, respectively. A connection wiring that connects the common electrode terminals to each other is formed along the groove to prevent an electrical short circuit between the connection wiring and the individual electrodes.