METHOD OF FABRICATING ION IMPLANTATION MAGNETICALLY AND THERMALLY ISOLATED BITS IN HAMR BPM STACKS
    18.
    发明申请
    METHOD OF FABRICATING ION IMPLANTATION MAGNETICALLY AND THERMALLY ISOLATED BITS IN HAMR BPM STACKS 审中-公开
    在HAMR BPM堆栈中制造离子植入磁性和热隔离位的方法

    公开(公告)号:US20140370331A1

    公开(公告)日:2014-12-18

    申请号:US14158704

    申请日:2014-01-17

    CPC classification number: G11B5/855

    Abstract: The embodiments disclose a continuous thin film magnetic layer and a patterned hard mask layer configured to be deposited onto the continuous thin film magnetic layer and to have plural ion implantations, wherein the ion implantations are configured to create chemically and structurally altered localized magnetic regions unprotected by the patterned hard mask layer.

    Abstract translation: 实施例公开了连续的薄膜磁性层和被构造成沉积在连续薄膜磁性层上并且具有多个离子注入的图案化的硬掩模层,其中离子注入被配置成产生化学和结构上改变的局部磁区,不受 图案化的硬掩模层。

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