公开(公告)号：US09263973B2

公开(公告)日：2016-02-16

申请号：US14691962

申请日：2015-04-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta ,  William Craig McDonald

IPC: H01H57/00 ,  H02N2/12 ,  B81B3/00 ,  B81B7/02

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

公开(公告)号：US20150229241A1

公开(公告)日：2015-08-13

申请号：US14691962

申请日：2015-04-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta ,  William Craig McDonald

IPC: H02N2/12 ,  B81B7/02

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

Abstract translation: MEMS静电致动器包括固定到基板的底板和悬挂在底板上方的顶板。 顶板具有平行板中心部分和两个电连接到中心部分的旋转部件。 每个旋转构件安装在旋转构件的中心，用于围绕旋转轴线旋转到一组锚柱。 附件包括沿着每个轴线附接的至少一对扭转弹簧，每个弹簧包括矩形金属正方形，随着旋转构件的旋转，该正方形扭曲。 静电下拉电极位于每个旋转构件的下方。