SYSTEMS AND APPARATUS FOR MICROMIRROR DESIGNS WITH ELECTRODE CONTACT

    公开(公告)号:US20230070502A1

    公开(公告)日:2023-03-09

    申请号:US17466775

    申请日:2021-09-03

    Abstract: Systems and Apparatus for micromirror designs with electrode contact. In some examples, a micromirror including a mirror, a mirror via coupled to the mirror, a hinge coupled to the mirror via, the hinge including a springtip associated with a first side of the micromirror, the springtip associated with a first terminal, and an electrode associated with the first side of the micromirror, the electrode having a dielectric coating in contact with the springtip, the electrode associated with a second terminal different than the first terminal.

    MEMS-BASED PHASE SPATIAL LIGHT MODULATING ARCHITECTURE

    公开(公告)号:US20250047065A1

    公开(公告)日:2025-02-06

    申请号:US18925461

    申请日:2024-10-24

    Abstract: Described examples include a device includes a first post and a spring supported by the first post. The device also includes a second post coupled to the spring and a mirror on the second post. Additionally, the device includes a movable layer coupled to the spring and to the mirror and a fixed layer, where the movable layer is between the fixed layer and the mirror. The mirror has a width and a length and the length is greater than the width. The mirror is configured to move based on a voltage difference between the movable layer and the fixed layer.

    MEMS electrostatic actuator with linearized displacements

    公开(公告)号:US11256083B2

    公开(公告)日:2022-02-22

    申请号:US16233812

    申请日:2018-12-27

    Abstract: A microelectromechanical actuator for a light beam steering device is provided that includes memory cells coupled to at least one electronic circuitry component and electrode segments coupled to a respective one of the memory cells via the at least one electronic circuitry component. A flexible metal layer having support pillars is on the electrode segments. Flexible beams are attached to the support pillars and a movable electrode attaches to the flexible beams. A mirror is attached to the movable electrode. When one or more of the electrode segments is activated, the mirror is displaced a distance to steer a light beam output from a light source in a direction.

    MEMS-BASED PHASE SPATIAL LIGHT MODULATING ARCHITECTURE

    公开(公告)号:US20210111537A1

    公开(公告)日:2021-04-15

    申请号:US16653026

    申请日:2019-10-15

    Abstract: Described examples include apparatus having a driving electrode on a substrate. The apparatus has a platform suspended above the driving electrode and conductively coupled to a platform electrode, where the platform is configured to move in a direction perpendicular to a surface of the substrate in response to a voltage difference applied between the driving electrode and the platform electrode. The apparatus also has a mirror post on the platform. The apparatus has a mirror coupled to the platform by the mirror post, where the mirror is rectangular.

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