公开(公告)号：US11973133B2

公开(公告)日：2024-04-30

申请号：US18144822

申请日：2023-05-08

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Kuo-Yu Liao

IPC: H01L29/778 ,  H01L27/06 ,  H01L29/06 ,  H01L29/20 ,  H01L29/66

CPC classification number: H01L29/778 ,  H01L27/0629 ,  H01L29/0649 ,  H01L29/2003 ,  H01L29/66462

Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a first mesa isolation on the HEMT region and a second mesa isolation on the capacitor region, forming a HEMT on the first mesa isolation, and then forming a capacitor on the second mesa isolation.

公开(公告)号：US11296214B2

公开(公告)日：2022-04-05

申请号：US16525513

申请日：2019-07-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang ,  Guan-Kai Huang ,  Chien-Liang Wu

IPC: H01L29/778 ,  H01L29/66

Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).

公开(公告)号：US20210020769A1

公开(公告)日：2021-01-21

申请号：US16525513

申请日：2019-07-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang ,  Guan-Kai Huang ,  Chien-Liang Wu

IPC: H01L29/778 ,  H01L29/66

Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).

公开(公告)号：US20250113523A1

公开(公告)日：2025-04-03

申请号：US18979667

申请日：2024-12-13

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Kuo-Yu Liao

IPC: H01L29/778 ,  H01L27/06 ,  H01L29/06 ,  H01L29/20 ,  H01L29/66

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a buffer layer on the substrate, forming a mesa isolation on the HEMT region, forming a HEMT on the mesa isolation, and then forming a capacitor on the capacitor region. Preferably, a bottom electrode of the capacitor contacts the buffer layer directly.

公开(公告)号：US12206018B2

公开(公告)日：2025-01-21

申请号：US18614735

申请日：2024-03-24

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Kuo-Yu Liao

IPC: H01L29/778 ,  H01L27/06 ,  H01L29/06 ,  H01L29/20 ,  H01L29/66

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a buffer layer on the substrate, forming a mesa isolation on the HEMT region, forming a HEMT on the mesa isolation, and then forming a capacitor on the capacitor region. Preferably, a bottom electrode of the capacitor contacts the buffer layer directly.

公开(公告)号：US20230275147A1

公开(公告)日：2023-08-31

申请号：US18144822

申请日：2023-05-08

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Kuo-Yu Liao

IPC: H01L29/778 ,  H01L27/06 ,  H01L29/20 ,  H01L29/66 ,  H01L29/06

CPC classification number: H01L29/778 ,  H01L27/0629 ,  H01L29/2003 ,  H01L29/66462 ,  H01L29/0649

Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a first mesa isolation on the HEMT region and a second mesa isolation on the capacitor region, forming a HEMT on the first mesa isolation, and then forming a capacitor on the second mesa isolation.

公开(公告)号：US20230275146A1

公开(公告)日：2023-08-31

申请号：US18144811

申请日：2023-05-08

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Kuo-Yu Liao

IPC: H01L29/778 ,  H01L27/06 ,  H01L29/20 ,  H01L29/66 ,  H01L29/06

CPC classification number: H01L29/778 ,  H01L27/0629 ,  H01L29/2003 ,  H01L29/66462 ,  H01L29/0649

Abstract: A semiconductor device includes a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, a first mesa isolation on the HEMT region, a HEMT on the first mesa isolation, a second mesa isolation on the capacitor region, and a capacitor on the second mesa isolation. The semiconductor device further includes buffer layer between the substrate, the first mesa isolation, and the second mesa isolation, in which bottom surfaces of the first mesa isolation and the second mesa isolation are coplanar.

公开(公告)号：US20230135847A1

公开(公告)日：2023-05-04

申请号：US18088761

申请日：2022-12-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Te-Wei Yeh ,  Chien-Liang Wu

IPC: H10B61/00 ,  G11C7/18 ,  H10N50/80

Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).

公开(公告)号：US11605631B2

公开(公告)日：2023-03-14

申请号：US17516721

申请日：2021-11-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yung-Chen Chiu ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chien-Liang Wu ,  Chih-Kai Kang ,  Guan-Kai Huang

IPC: H01L27/085 ,  H01L27/06 ,  H01L29/66 ,  H01L29/778

Abstract: A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.

公开(公告)号：US20220181478A1

公开(公告)日：2022-06-09

申请号：US17676867

申请日：2022-02-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang ,  Guan-Kai Huang ,  Chien-Liang Wu

IPC: H01L29/778 ,  H01L29/66

Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).