Abstract:
An optical imaging apparatus includes an optical probe and an apparatus main body which controls and drives the optical probe via a connecting cable. The optical probe includes a low-coherence light source, a half mirror, an XY reflecting mirror scan, an objective optical system, a reflecting mirror, a modulating mirror, and a photo detector. In the optical probe, the modulating mirror and the objective optical system, as optical path length interlockingly adjusting elements, are integrally arranged to an optical path length interlockingly adjusting base, together with a reflecting-side lens. The optical probe has an advancing and regressing driving unit which advances and regresses the optical path length interlockingly adjusting base in the optical axis direction (Z direction).
Abstract:
A microscopy and apparatus capable of obtaining superresolution, and a fringe projection light-cut microscopy and apparatus capable of obtaining a natural light-cut image and enabling real-time observation. At the component separating step, a plurality of modulated images of an observation object (O) are formed by subjecting the observation object (O) to spatial modulation including a plurality of modulation components while varying the component ratios of the modulation components by moving a diffraction grating (21), which modulates the observation object (O), to a plurality of different positions. The modulated images are detected with an image pickup device (22). Modulated image components corresponding to the modulation components are separated from the number of modulated images that is not less than the number of the modulation components by using linear computation. At the component demodulating step, at least one of the separated modulated image components is demodulated.
Abstract:
An illuminating optical system for use in a projection exposure device with high utilization efficiency of the light from the light source and capable of easily realizing with simple construction is disclosed. The system comprises a light source, a light flux separating optical system for separating a light flux from the light source, a condenser optical system for leading the light flux separated by the light flux separating optical system on a reticle, and a diffraction optical unit included in the light flux separating optical system and having a linear grating pattern for separating the light flux from the light source into four.
Abstract:
Desired spectral characteristics are achieved while achieving reduced size and decreased noise, and detecting the distance between optical substrates with superior precision. Provided is a variable spectroscopy element (1) including optical coating layers (3) provided on opposing surfaces, which face each other, of first and second optical substrates (4a, 4b) that face each other with a gap therebetween; an actuator (4c) that changes the gap between the first and second optical substrates (4a, 4b); a first sensor portion (6a) provided on the first optical substrate (4a), for detecting the gap between the first and second optical substrates (4a, 4b); and a second sensor portion (6b) provided on the second optical substrate (4b) so as to oppose the first sensor portion (6a), for detecting the gap between the first and second optical substrates (4a, 4b), wherein the numbers of the first and second sensor electrodes (6a, 6b) differ.
Abstract:
Even in the event of movement by the operator, vibrations received from outside, changes in orientation etc., the spectral characteristics can be controlled with high precision, thus enabling acquisition of a desired observation image. Provided is an endoscope system including two optical substrates (13a, 13b) that oppose each other with a distance therebetween; an actuator (13c) that varies the distance between the two optical substrates (13a, 13b) according to an input driving signal; sensors (16) that are fixed to the two optical substrates (13a, 13b) and that detect the distance between the optical substrates (13a, 13b); an electrical circuit (17) that is disposed in the vicinity of the optical substrates (13a, 13b), that has outputs from the sensors (16) input thereto, and that includes an active element and outputs an electrical signal corresponding to the outputs from the sensors (16); and a securing portion (25) that secures electrical wires (24) connecting the electrical circuit (17) and each of the sensors (16), at any position between the electrical circuit (17) and the sensors (16).
Abstract:
Desired spectral characteristics are achieved while achieving reduced size and decreased noise, and detecting the distance between optical substrates with superior precision. Provided is a variable spectroscopy element (1) including optical coating layers (3) provided on opposing surfaces, which face each other, of first and second optical substrates (4a, 4b) that face each other with a gap therebetween; an actuator (4c) that changes the gap between the first and second optical substrates (4a, 4b); a first sensor portion (6a) provided on the first optical substrate (4a), for detecting the gap between the first and second optical substrates (4a, 4b); and a second sensor portion (6b) provided on the second optical substrate (4b) so as to oppose the first sensor portion (6a), for detecting the gap between the first and second optical substrates (4a, 4b), wherein the numbers of the first and second sensor electrodes (6a, 6b) differ.
Abstract:
A relief type diffraction optical element including a substrate made of an optical material, said substrate having formed on its surface a non-even width relief pattern which include a first zone group consisting of at least one zone whose cross sectional configuration is formed by a curvilinear portion which follows a phase shift function or at least two rectilinear portions which approximates the phase shift function, and a second zone group consisting of a plurality of zones each having a single rectilinear portion approximating the phase shift function.
Abstract:
Methods of manufacturing optical elements such as diffraction type lenses, aspherical lenses and diffraction gratings are disclosed. Deposited on a glass substrate is a workpiece film made of a material which can be machined much more easily than the substrate. Then the workpiece film is machined to form a predetermined shape or contour therein. After forming the predetermined shape or contour in the workpiece film, the workpiece film and substrate are subjected to etching to duplicate the predetermined shape or contour formed in the workpiece film into the substrate.