Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozone generator is proposed which comprises a plurality of plate-like ozone generating elements, stacked one on top of the other, which are in at least partial contact with a process water stream, each of the ozone generating elements having at least one plate-like, electrically insulated inner electrode and at least one likewise plate-like counterelectrode, between which a space is provided for a gas discharge. According to the invention, the ozone generating elements are situated at a distance from one another, perpendicular to their plate-like extension, in such a way that process water is able to flow between the ozone generating elements over substantial surface regions of the plate-like ozone generating elements.
Abstract:
Disclosed is a device comprising an ozonizer (1) in the first region (1') of which container (1) ozone is formed which is dispersed into fluid by a gas feed organ (3). The thusly formed two-phase mixture flows through a second region (1") of the ozonizer (1) to a phase separating element (13). Through the arrangement and disposition of the gas feed organ (3) on the fluid entry side, the second region (1") forms and defines a flow region for the two-phase mixture resulting in the greatest possible ozone feed into the fluid. Such devices have especial application for the sterilization of drinking and bath water.
Abstract:
A continuous reaction is effected in a gas stream by an electric discharge at a point in the stream where the flow has been made supersonic and the pressure and temperature lowered by a substantially adiabatic expansion. Various forms of apparatus for carrying out such a process are described. The apparatus may be used for the production of ozone which is used to convert ethylene and tetramethyl-ethylene fed into the apparatus into the corresponding ozonides. On leaving the apparatus the ozonides are converted in the presence of water into formaldehyde and acetone respectively.ALSO:A continuous reaction is effected in a gas stream by an electric discharge at a point in the stream where the flow has been made supersonic and the pressure and temperature lowered by a substantially adiabatic expansion. One form of apparatus, Fig. 1, comprises a supersonic nozzle 1, a pressure reducing chamber 17 for starting the action of the nozzle and a recompression chamber 13. Gas from an inlet pipe 6 passes along a cylindrical chamber 5 to a convergent part 2 of the nozzle 1 and then expands in a divergent part 4. A hollow electrode 8 supported by insulators 9 and 10 in the chamber 5 produces a discharge at the outlet 7 of the nozzle 1. The recompression chamber 13 comprises a convergent part 14, a cylindrical part 15 and a divergent part 16. This apparatus may be used for the production of acetylene and hydrogen from methane gas, or for the cracking of other hydrocarbons. An alternative form of apparatus is described in which the electrode 8 is extended to the part 16 of the chamber 13 and is closed at the end, but is provided with side vents for the injection of methane into the part 15 of the chamber 13. Two discharges are set up, the first at the end of the nozzle 1 for producing ozone, and the second in the chamber 13 for partially oxidizing the methane.
Abstract:
An ozone generator (100) includes a flow passage (1) having a cylindrical shape, an ozone generating unit (3) disposed in the flow passage (1), and a fan (2) disposed in the flow passage (1). When a specific frequency f is one of frequencies at which an air-column resonance occurs in the flow passage (1), λ is a wavelength of sound at the specific frequency f, and m is a natural number, at least a portion of the fan (2) is disposed within a range in which a distance from the inlet (5) in a height direction is (2m−1)λ/8 or more and (2m+1)λ/8 or less.
Abstract:
A method of generating ozone by applying a silent discharge to oxygen as a first raw material gas, and an oxide compound gas, as a second raw material gas, in which excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, dissociates the oxide compound gas, or excites the oxide compound gas, accelerating dissociation of the oxygen and generation of ozone. In this way, ozone generation efficiency is raised.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.