公开(公告)号：US20070019856A1

公开(公告)日：2007-01-25

申请号：US11476342

申请日：2006-06-28

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G06K9/00

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

公开(公告)号：US20060244958A1

公开(公告)日：2006-11-02

申请号：US11476358

申请日：2006-06-28

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 连续地比像素停留时间短，从而在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US20060002605A1

公开(公告)日：2006-01-05

申请号：US11194985

申请日：2005-08-02

Applicant: Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

Inventor： Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

IPC: G06K9/00

CPC classification number: G01N21/952 ,  G01N2201/0826 ,  G01N2201/084 ,  H04N7/18

Abstract: The present invention is directed to solving the problems associated with the detection of surface defects on metal bars as well as the problems associated with applying metal flat inspection systems to metal bars for non-destructive surface defects detection. A specially designed imaging system, which is comprised of a computing unit, line lights and high data rate line scan cameras, is developed for the aforementioned purpose. The target application is the metal bars (1) that have a circumference/cross-section-area ratio equal to or smaller than 4.25 when the cross section area is unity for the given shape, (2) whose cross-sections are round, oval, or in the shape of a polygon, and (3) are manufactured by mechanically cross-section reduction processes. The said metal can be steel, stainless steel, aluminum, copper, bronze, titanium, nickel, and so forth, and/or their alloys. The said metal bars can be at the temperature when they are being manufactured.

Abstract translation: 本发明旨在解决与检测金属棒表面缺陷相关的问题以及将金属平面检查系统应用于金属棒以用于非破坏性表面缺陷检测相关的问题。 为了上述目的开发了一种专门设计的成像系统，由计算单元，线路灯和高数据速率线扫描摄像机组成。 目标应用是当给定形状的横截面积为1时，具有等于或小于4.25的圆周/横截面积比的金属棒（1），（2）横截面为圆形，椭圆形 ，或多边形的形状，（3）通过机械截面缩小工艺制造。 所述金属可以是钢，不锈钢，铝，铜，青铜，钛，镍等，和/或它们的合金。 所述金属棒可以处于制造时的温度。

公开(公告)号：US06922246B2

公开(公告)日：2005-07-26

申请号：US10372763

申请日：2003-02-21

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: A01K1/03 ,  A22B3/00 ,  A61M16/00 ,  A61M16/10 ,  A61M16/18 ,  A61M16/20 ,  G01N21/64 ,  G01J3/30 ,  F21V9/16 ,  G01N21/25

CPC classification number: G01N21/6456 ,  A01K1/031 ,  A61M16/104 ,  A61M16/18 ,  A61M16/202 ,  A61M2016/0039 ,  G01N2021/1787 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A macroscopic fluorescence illumination assembly is provided for use with an imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface sized and dimensioned for receipt in the imaging compartment, and oriented to face toward the view port of the imaging apparatus. The support surface is substantially opaque and defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between. The illumination assembly further includes an excitation light source, and a bundle of fiber optic strands having proximal ends thereof in optical communication with the light source. The distal ends of the strands terminate proximate the window portion of the support surface. The distal ends each emit a respective beam of light originating from the light source which are then collectively directed toward the window portion and into a bottom side of the specimen wherein the diffused light passes there through and exits a topside thereof for receipt through the view port to view the fluorescence of the specimen.

公开(公告)号：US06740865B1

公开(公告)日：2004-05-25

申请号：US09743132

申请日：2001-01-03

Applicant: John Gordon Rushbrook ,  Claire Elizabeth Hooper

Inventor： John Gordon Rushbrook ,  Claire Elizabeth Hooper

IPC: G01I300

CPC classification number: G01N21/6452 ,  G01N21/76 ,  G01N2021/6421 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/0866

Abstract: Apparatus for detecting light emitted by assay samples is provided, in which light emitted by the sample is collected for transmission to a charge coupled device camera (74) by an optical fiber bundle. The cross-sectional area of the optical fiber bundle corresponds to the area of the sample, the end of which is located close to the sample for detecting any light emitted therefrom, and selected fibers (30) of those making up the bundle are separated from the remainder and extend to a source of excitation radiation (76) and serve to convey excitation radiation (if required) directly to a corresponding plurality of points distributed over the are of the end face of the bundle and therefore over the area of the sample. The remaining fibers (32, 38) of the bundle serve to collect emitted light (whether generated by fluorescence caused by excitation or otherwise) and provide a light path to the change coupled device camera, wherein the ends of the excitation fibers and the ends of the emitted light collecting fibers area distributed uniformly over the area of the fiber bundle presented to the reaction site.

Abstract translation: 提供了用于检测由测定样品发射的光的装置，其中由样品发射的光被收集以通过光纤束传输到电荷耦合器件照相机（74）。 光纤束的横截面积对应于样品的面积，其端部靠近样品，用于检测从其发出的任何光，并且构成束的那些选定的纤维（30）从 剩余部分并延伸到激发辐射源（76）并且用于将激发辐射（如果需要）直接传递到分布在束的端面上并因此在样品的区域上的对应的多个点。 束的剩余纤维（32,38）用于收集发射的光（无论是由通过激发还是其他方式产生的荧光产生），并且向变换耦合器件照相机提供光路，其中激发光纤的端部和 发射的光收集纤维区域均匀分布在纤维束的呈现给反应部位的区域上。

公开(公告)号：US20040094169A1

公开(公告)日：2004-05-20

申请号：US10293331

申请日：2002-11-14

Inventor： Robert C. Lanier, JR. ,  Tejinder Gill ,  Steven M. Campbell ,  Stephen J. Bellamah

IPC: A24C005/35

CPC classification number: G01N21/8903 ,  A24D3/0295 ,  G01N21/952 ,  G01N2021/8416 ,  G01N2021/8444 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A system and process for monitoring a continuous element being incorporated within a cigarette filter includes a light source and a photoresponsive device facing each other and on opposite sides of a measuring gap, and passing the continuous element through the measuring gap and detecting movement of the continuous element by the effect of the movement on at least one light beam present between the light source and the photoresponsive device. Individual lengths of the continuous cigarette filter rod being produced can be selectively rejected based on a determination of whether the continuous element has a break or a knot along its length.

Abstract translation: 用于监测香烟过滤嘴内的连续元件的系统和过程包括彼此面对并且在测量间隙的相对侧面上的光源和光响应装置，并且使连续元件通过测量间隙并检测连续元件的运动 通过运动对光源和光响应装置之间存在的至少一个光束的影响。 根据确定连续元件是否具有断裂或其长度的结，可以选择性地拒绝所生产的连续卷烟过滤棒的单独长度。

公开(公告)号：US20040051031A1

公开(公告)日：2004-03-18

申请号：US10250956

申请日：2003-07-03

Inventor： John Gordon Rushbrook ,  Claire Elizabeth Hooper

IPC: H01L027/00

CPC classification number: G01N21/6452 ,  G01N21/6456 ,  G01N21/76 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A fibre optic epi-fluorescence imaging system in which the optical fibres are rearranged so that the system can be used for measuring luminescence samples. The system comprises at least two optical fibres (32, 46) or bundles of fibres which lead to a CCD camera (74), the fibres or bundles of fibres from all samples being arranged in two sets, a first set which are formed from a non-fluorescing material and a second set which are formed from a material which may fluoresce but enables the fibres formed therefrom to have a higher numerical aperature than those of the first set.

Abstract translation: 光纤外延荧光成像系统，其中光纤被重新排列，使得该系统可用于测量发光样品。 该系统包括通向CCD照相机（74）的至少两根光纤（32,46）或纤维束，来自所有样品的纤维或纤维束被布置成两组，第一组由 非荧光材料和第二组，其由可以发荧光但使得由其形成的纤维具有比第一组更高的数值的材料形成。

公开(公告)号：US06556299B1

公开(公告)日：2003-04-29

申请号：US09214919

申请日：2000-02-15

Applicant: John Gordon Rushbrooke ,  Claire Elizabeth Hooper ,  William Wray Neale

Inventor： John Gordon Rushbrooke ,  Claire Elizabeth Hooper ,  William Wray Neale

IPC: G01N2164

CPC classification number: G01N21/6452 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: An imaging system for fluorescence assays includes a fiber optic coupling plate (20, 24, 26) for transmitting radiation emitted by a sample (18) towards a camera. This is combined with an interference filter (22) so as to enable highly sensitive transmission of radiation to the camera, according to wavelength. The interference filter may be combined with a fiber optic coupling plate in which sample sites or wells of an array are viewed by separate fiber optic bundles, each bundle transmitting emitted light from a one sample or well to a discrete region of the field of view of the camera.

Abstract translation: 用于荧光测定的成像系统包括用于将样品（18）发射的辐射传送到相机的光纤耦合板（20,24,26）。 这与干涉滤波器（22）组合，以便能够根据波长实现对照相机的高度敏感的辐射传输。 干涉滤波器可以与光纤耦合板组合，其中阵列的采样位置或阱由单独的光纤束观察，每个束将发射的光从一个采样或阱传输到视场的离散区域 相机。

公开(公告)号：US20020070350A1

公开(公告)日：2002-06-13

申请号：US10008008

申请日：2001-11-08

Inventor： John Gordon Rushbrooke ,  Claire Elizabeth Hooper ,  William Wray Neale

IPC: G01N021/64

CPC classification number: G01N21/6452 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A fiber optic coupling plate (24) has a sample viewing face for receiving light from a sample (12), an output window (18) for conveying sample originating (emitted) light to an imaging detector and an additional window through which excitation radiation can be projected. A primary light is provided through the plate made up of optical fibers which will convey light entering the viewing face, directly and with minimal loss, to the output window, and a secondary light path separate from the primary light path, by which excitation radiation entering the additional window is conveyed to the viewing face for irradiating the sample.

Abstract translation: 光纤耦合板（24）具有用于接收来自样品（12）的光的样品观察面，用于将样品始发（发射）光传送到成像检测器的输出窗口（18）和激发辐射可通过该附加窗口 被预计。 通过由光纤构成的板提供初级光，其将直接且以最小损失将光进入观察面的光传送到输出窗，以及与初级光路分离的次级光路，激发辐射进入 将附加窗口传送到观察面以照射样品。

公开(公告)号：US5337139A

公开(公告)日：1994-08-09

申请号：US866751

申请日：1992-04-10

Applicant: Yoshiaki Shirasawa

Inventor： Yoshiaki Shirasawa

IPC: G01N21/01 ,  G01N21/25 ,  G01N21/64 ,  G01N21/78 ,  G01N21/82 ,  G01N21/59

CPC classification number: G01N21/253 ,  G01N2021/6421 ,  G01N21/64 ,  G01N2201/0461 ,  G01N2201/0826

Abstract: A multichannel optical measuring system for measuring optical responses of samples illuminated by light of differing wavelengths has a plurality of measurement sample cuvettes each contain a sample to be measured. A first single light source provides a first illumination light. A plurality of sets of optical fibers direct the first illumination light from the first single light source to illuminate, along an optical axis, the samples contained in respective sample cuvettes. A second light source is provided for illuminating each respective sample cuvette with a second illumination light for measuring an intensity of transmitted light through the sample. The optical axis of the second illumination light is perpendicular to the optical axis of the first illumination light. A common photosensor disposed on the optical axis of the second light source measures the intensity of the first illumination light and the intensity of the transmitted light from each sample. Thus, the multichannel optical measuring system can simultaneously measure both the intensity of a first illumination light from a single light source, and the intensity of light transmitted through each sample, for a plurality of samples.

Abstract translation: 用于测量由不同波长的光照射的样品的光学响应的​​多通道光学测量系统具有多个测量样品比色皿，每个测量样本比色皿包含待测量的样品。 第一单个光源提供第一照明光。 多组光纤引导来自第一单个光源的第一照明光沿着光轴照射包含在各个样品比色皿中的样品。 提供第二光源，用于用用于测量通过样品的透射光的强度的第二照明光照射每个相应的样本比色皿。 第二照明光的光轴垂直于第一照明光的光轴。 设置在第二光源的光轴上的公共光传感器测量第一照明光的强度和来自每个样品的透射光的强度。 因此，多通道光学测量系统可以同时测量来自单个光源的第一照明光的强度和透过每个样品的光的强度，用于多个样品。