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    Double-electret mems actuator
    201.
    发明授权
    Double-electret mems actuator 失效
    双驻极体元件执行器

    公开(公告)号：US07256927B2

    公开(公告)日：2007-08-14

    申请号：US10506653

    申请日：2003-03-11

    Applicant: Martin G. Selbrede

    Inventor： Martin G. Selbrede

    IPC: G02B26/00

    CPC classification number: B81B3/0018 ,  B81B3/0035 ,  B81B2201/038 ,  H01H59/0009 ,  H01H2059/009 ,  H02N1/006 ,  H04R19/01

    Abstract: An actuator (100) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator (100) may include a first conductive layer (102) residing on a first electret layer (101). The actuator (100) may further include a moveable second electret layer (103) which is spaced apart in relation to the first conductive layer (102) when the second electret layer (103) is in a quiescent state. The actuator (100) may further include a second conductive layer (104) in a spaced apart relation to the second electret layer (103) when the second electret layer (103) is in the quiescent state. The actuator (100) may further include a voltage source (105) configured to selectively apply a voltage between the first (102) and second (104) conductive layers thereby propelling the second electret layer (103) to either the first (102) or second (104) conductive layer.

    Abstract translation: 利用运动力的致动器（100）作为输入能量的函数增强其机电性能。 致动器（100）可以包括驻留在第一驻极体层（101）上的第一导电层（102）。 致动器（100）还可以包括可移动的第二驻极体层（103），当第二驻极体层（103）处于静止状态时，其相对于第一导电层（102）间隔开。 当第二驻极体层（103）处于静止状态时，致动器（100）还可以包括与第二驻极体层（103）间隔开的第二导电层（104）。 致动器（100）还可以包括被配置为在第一（102）和第二（104）导电层之间选择性地施加电压的电压源（105），从而将第二驻极体层（103）推进到第一（102）或 第二（104）导电层。

    Multilayer composite and a method of making such
    203.
    发明申请
    Multilayer composite and a method of making such 有权
    多层复合材料及其制造方法

    公开(公告)号：US20070114885A1

    公开(公告)日：2007-05-24

    申请号：US11592651

    申请日：2006-11-03

    Applicant: Mohamed Benslimane ,  Peter Gravesen

    Inventor： Mohamed Benslimane ,  Peter Gravesen

    IPC: H01L41/00

    CPC classification number: F04B43/043 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/0471 ,  H01L41/083 ,  H01L41/0836 ,  H01L41/0986 ,  H01L41/27 ,  H01L41/297 ,  H01L41/45 ,  H02N1/002 ,  H02N1/006 ,  H04R23/00 ,  Y10T428/24521

    Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.

    Abstract translation: 多层复合材料包括至少两种复合材料，每种复合材料具有膜和电子导电层。 层压几种复合材料以提供机械和电能之间的增加的转换，这不仅是由于每层效应的增加，而且由于多层结构本身使多层复合材料更加刚性的事实。 此外，多层结构有助于在较薄的结构部分上施加电场，从而在电极之间需要更少的电位差。

    Micro-actuator, fabrication method thereof, and micro-actuating valve
    207.
    发明授权
    Micro-actuator, fabrication method thereof, and micro-actuating valve 失效
    微致动器，其制造方法和微动阀

    公开(公告)号：US07055797B2

    公开(公告)日：2006-06-06

    申请号：US10863460

    申请日：2004-06-09

    Applicant: Young-Joo Yee ,  Chang-Hyeon Ji ,  Jung-Hoon Choi

    Inventor： Young-Joo Yee ,  Chang-Hyeon Ji ,  Jung-Hoon Choi

    IPC: F16K31/02

    CPC classification number: F16K99/0001 ,  B81B7/04 ,  B81B2201/038 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0046 ,  F16K2099/0074 ,  F16K2099/008

    Abstract: Disclosed are a micro-actuator, a fabrication method thereof, and a micro-actuating valve. The micro-actuating valve comprises: a first valve housing having a fluid entrance at the middle portion thereof; a second valve housing coupled to the first valve housing thus to form a space portion therein and having a fluid exit connected to the fluid entrance of the first valve housing; a plate installed at the space portion and having a micro-channel at one side thereof to be connected to the fluid exit; a plurality of micro-driving members installed to be near the plate for discharging a fluid introduced from the fluid entrance of the first valve housing to the fluid exit of the second valve housing by selectively opening and closing the micro-channel of the plate; a micro-mover suspension installed at the plate for supporting the micro-mover; a coil installed at the micro-mover; a magnet installed with a certain gap from the coil; and an electrode portion formed at the plate for is supplying a power source to the coil.

    Abstract translation: 公开了微致动器，其制造方法和微致动阀。 微型致动阀包括：第一阀壳体，其中部处具有流体入口; 第二阀壳体，其联接到第一阀壳体，从而在其中形成空间部分，并具有连接到第一阀壳体的流体入口的流体出口; 安装在所述空间部分并且在其一侧具有与所述流体出口连接的微通道的板; 多个微型驱动构件安装成靠近板，用于通过选择性地打开和关闭板的微通道，将从第一阀壳体的流体入口引入的流体排放到第二阀壳体的流体出口; 安装在板上用于支撑微动员的微型悬架; 安装在微动机上的线圈; 安装有与线圈一定间隙的磁铁; 并且形成在所述板处的用于将电源供应到所述线圈的电极部分。

    Method for supplying multiple voltages to a movable part of a MEMS device
    208.
    发明授权
    Method for supplying multiple voltages to a movable part of a MEMS device 有权
    用于向MEMS器件的可移动部分提供多个电压的方法

    公开(公告)号：US07015620B2

    公开(公告)日：2006-03-21

    申请号：US11052256

    申请日：2005-02-07

    Applicant: Dennis S. Greywall

    Inventor： Dennis S. Greywall

    IPC: H02N1/00

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B26/0841 ,  H02N1/006

    Abstract: Two or more independent voltages are applied between stationary and movable parts of a MEMS device via a multipart spring having at least two cooperating parts that are not in direct electrical contact with each other. In one embodiment, the at least two cooperating parts include a first cooperating part and one or more other cooperating parts that are physically separated from the first cooperating part, wherein first and second independent voltages are applied via the first cooperating part and the one or more other cooperating parts, respectively.

    Abstract translation: 通过具有至少两个彼此不直接电接触的配合部分的多部分弹簧，在MEMS器件的固定部件和可移动部件之间施加两个或多个独立电压。 在一个实施例中，所述至少两个协作部分包括第一协作部分和与第一协作部分物理分离的一个或多个其它协作部分，其中第一和第二独立电压经由第一协作部分和一个或多个 其他合作部分。

    Liquid droplet ejecting apparatus and method for producing same
    209.
    发明申请
    Liquid droplet ejecting apparatus and method for producing same 审中-公开
    液滴喷射装置及其制造方法

    公开(公告)号：US20050195245A1

    公开(公告)日：2005-09-08

    申请号：US11065945

    申请日：2005-02-25

    Applicant: Kyouhei Yamada ,  Yasuhiro Watanabe

    Inventor： Kyouhei Yamada ,  Yasuhiro Watanabe

    IPC: B41J2/045 ,  B01L3/02 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  C12M1/00 ,  G01N1/00 ,  G01N35/10 ,  B41J2/05

    CPC classification number: B01L3/0241 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B41J2/1433 ,  B41J2002/14475 ,  B81B2201/038 ,  G01N2035/1041

    Abstract: There is provided a liquid droplet ejecting apparatus capable of being efficiently produced at low production costs. The liquid droplet ejecting apparatus 1 includes a substrate 2 which has a hole 4 extending in thickness directions to pass through the substrate 2, and a photoresist film 3 which is formed on one side 2a of the substrate 2 so as to close one end of the hole 4, the photoresist film 3 having a small hole 5 which faces the one end of the hole 4 to open the one end of the hole 4 to the atmosphere. Thus, the liquid droplet ejecting apparatus 1 is designed to eject a droplet of a liquid from the small hole 5 by applying a pressure of a pressure source 6 to the other end of the hole 4 after the liquid is injected into the hole 4.

    Abstract translation: 提供能够以低生产成本有效地生产的液滴喷射装置。 液滴喷射装置1包括：基板2，其具有在厚度方向上延伸通过基板2的孔4;以及光致抗蚀剂膜3，其形成在基板2的一侧2a上，以封闭基板2的一端 孔4，光致抗蚀剂膜3具有面向孔4的一端的小孔5，以将孔4的一端打开到大气。 因此，液滴喷射装置1被设计成在将液体注入到孔4中之后，通过将压力源6的压力施加到孔4的另一端，从小孔5喷射液滴。

    Method for supplying multiple voltages to a movable part of a MEMS device
    210.
    发明申请
    Method for supplying multiple voltages to a movable part of a MEMS device 有权
    用于向MEMS器件的可移动部分提供多个电压的方法

    公开(公告)号：US20050156482A1

    公开(公告)日：2005-07-21

    申请号：US11052256

    申请日：2005-02-07

    Applicant: Dennis Greywall

    Inventor： Dennis Greywall

    IPC: B81B3/00 ,  B81C99/00 ,  G02B26/08 ,  H02N1/00 ,  B26B17/00

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B26/0841 ,  H02N1/006

    Abstract: Two or more independent voltages are applied between stationary and movable parts of a MEMS device via a multipart spring having at least two cooperating parts that are not in direct electrical contact with each other. In one embodiment, the at least two cooperating parts include a first cooperating part and one or more other cooperating parts that are physically separated from the first cooperating part, wherein first and second independent voltages are applied via the first cooperating part and the one or more other cooperating parts, respectively.

    Abstract translation: 通过具有至少两个彼此不直接电接触的配合部分的多部分弹簧，在MEMS器件的固定部件和可移动部件之间施加两个或多个独立电压。 在一个实施例中，所述至少两个协作部分包括第一协作部分和与第一协作部分物理分离的一个或多个其它协作部分，其中第一和第二独立电压经由第一协作部分和一个或多个 其他合作部分。

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