公开(公告)号：US6050287A

公开(公告)日：2000-04-18

申请号：US102756

申请日：1998-06-23

Applicant: Kenichi Goshima ,  Yoshihisa Sudo

Inventor： Kenichi Goshima ,  Yoshihisa Sudo

IPC: F16L19/00 ,  B01J4/00 ,  B08B9/032 ,  C23C16/44 ,  F16L19/02 ,  F17C13/04 ,  F17D1/02 ,  H01L21/205 ,  H01L21/31 ,  B08B9/02

CPC classification number: C23C16/4408 ,  C23C16/4401 ,  F16L19/0231 ,  F16L19/0237 ,  F17C13/04 ,  F17C2205/0338 ,  F17C2221/014 ,  F17C2227/044 ,  F17C2270/0518

Abstract: A purge system has a purge gas piping system for substituting inert gas for process gas when a device connected in a process gas piping system is detached therefrom. In the purge system, a purge joint for connecting two pipes in the purge gas piping system is provided with an opening formed in alignment with the position where the two pipes are connected in the purge joint.

Abstract translation: 吹扫系统具有吹扫气体管道系统，用于在连接在工艺气体管道系统中的设备从其中分离时，用惰性气体代替工艺气体。 在吹扫系统中，用于连接吹扫气体管道系统中的两个管道的吹扫接头设置有与在吹扫接头中连接两个管道的位置对准的开口。

公开(公告)号：US6033631A

公开(公告)日：2000-03-07

申请号：US67932

申请日：1998-04-28

Applicant: Ronald N. Zuckermann ,  Kiet Truong ,  Selina DeRose-Juarez ,  Katy Shang-Chi Kuey ,  Matthew Geoffrey Owings ,  Benjamin Joseph Ver Steeg ,  Henry Chin

Inventor： Ronald N. Zuckermann ,  Kiet Truong ,  Selina DeRose-Juarez ,  Katy Shang-Chi Kuey ,  Matthew Geoffrey Owings ,  Benjamin Joseph Ver Steeg ,  Henry Chin

IPC: B01J4/00 ,  B01J19/00 ,  C07H21/00 ,  C07K1/04 ,  C40B40/02 ,  C40B40/10 ,  C40B50/06 ,  C40B60/14 ,  C08F5/02 ,  G05B17/00

CPC classification number: C07H21/00 ,  B01J19/0046 ,  C07K1/045 ,  B01J2219/00286 ,  B01J2219/00351 ,  B01J2219/00389 ,  B01J2219/00418 ,  B01J2219/00423 ,  B01J2219/00493 ,  B01J2219/005 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00725 ,  C40B40/10 ,  C40B60/14

Abstract: An apparatus is provided for conducting solid phase oligomer synthesis. The apparatus includes a reaction vessel in which a solid phase support is contained. The reaction vessel has a top opening through which gases and solvents can be delivered by way of a series of conduits and valves. The reaction vessel is interconnected through a bottom opening therein and through a series of conduits and valves with a vessel or series of vessels containing a reagent or series of reagents, respectively, required for the synthetic reaction. The reagent vessel serves a both a source of reagent delivered to the reaction vessel and as a repository for unused reagent returned thereto from the reaction vessel. Reagent delivery and mixing is gas-driven using an associated source of an inert gas.

Abstract translation: 提供用于进行固相低聚物合成的装置。 该装置包括其中包含固相载体的反应容器。 反应容器具有顶部开口，气体和溶剂可通过该顶部开口通过一系列管道和阀门输送。 反应容器通过其中的底部开口和通过一系列管道和阀门相互连接，所述管道和阀门具有分别含有合成反应所需的试剂或一系列试剂的容器或一系列容器。 试剂容器用于输送到反应容器的试剂源和作为从反应容器返回的未使用试剂的储存库。 试剂输送和混合是使用惰性气体的相关源气体驱动的。

公开(公告)号：US6006701A

公开(公告)日：1999-12-28

申请号：US222287

申请日：1998-12-28

Applicant: Katsuhisa Nagano

Inventor： Katsuhisa Nagano

IPC: B01J4/00 ,  B01D1/00 ,  C23C16/44 ,  C23C16/448 ,  F22B1/28 ,  H01L21/31 ,  F22B23/06

CPC classification number: B01D1/00 ,  C23C16/4481 ,  F22B1/288

Abstract: It is intended to provide a vaporizer in a liquid material vaporizing and feeding apparatus for allowing a liquid to absorb heat efficiently and vaporizing it thereby without pulsation of the liquid or formation of air bubbles.In a lower end face of an upper member 20 is formed a recess 24 into which a liquid material inlet 22 opens, and a valve member 50 is disposed so as to cover the recess 24.With a spring S, the valve member 50 is urged in a direction in which it comes into close contact with the lower end face of the upper member 20. A vaporizing portion 26 is formed between an upper surface of the valve member 50 and the upper member 20, and a pressure intensifying portion 58 is formed by both the upper surface of the valve member 50 and the recess 24.A liquid material fed from the liquid material inlet 22 depresses the valve member 50 through the pressure intensifying portion 58, and when the liquid material is diffused in the vaporizing portion 26, it is heated and vaporizes in an instant.

Abstract translation: 旨在在液体材料蒸发和进料装置中提供一种蒸发器，用于使液体有效地吸收热量并使其蒸发，从而无需液体的脉动或气泡的形成。 在上部构件20的下端面形成有液体材料入口22打开的凹部24，并且设置阀构件50以覆盖凹部24.通过弹簧S，促使阀构件50被推动 在其与上部构件20的下端面紧密接触的方向上。在阀构件50的上表面和上部构件20之间形成有蒸发部分26，并且形成了增压部分58 通过阀构件50的上表面和凹部24两者。从液体材料入口22供给的液体材料通过加压部分58压下阀构件50，并且当液体材料在蒸发部分26中扩散时， 它在一瞬间被加热和蒸发。

公开(公告)号：US5911834A

公开(公告)日：1999-06-15

申请号：US751484

申请日：1996-11-18

Applicant: Kevin Fairbairn ,  Hari K. Ponnekanti ,  David Cheung

Inventor： Kevin Fairbairn ,  Hari K. Ponnekanti ,  David Cheung

IPC: B01J4/00 ,  C23C14/56 ,  C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  H01L21/00 ,  C23C16/00

CPC classification number: C23C16/45574 ,  B01J4/00 ,  C23C14/566 ,  C23C16/4402 ,  C23C16/4405 ,  C23C16/45565 ,  C23C16/45572 ,  C23C16/54 ,  H01L21/67017

Abstract: The present invention provides a method and apparatus for delivering one or more process gases and one or more cleaning gases into one or more processing regions. The gas distribution system includes a gas inlet and a gas conduit, each disposed to deliver one or more gases into the chamber via a desired diffusing passage. Also, a gas delivery method and apparatus for splitting a gas feed into multiple feed lines is provided having a gas filter disposed upstream from a splitting coupling disposed in the line.

Abstract translation: 本发明提供了一种将一种或多种工艺气体和一种或多种清洁气体输送到一个或多个处理区域中的方法和装置。 气体分配系统包括气体入口和气体导管，每个气体导管和气体导管设置成经由期望的扩散通道将一种或多种气体输送到腔室中。 此外，提供了一种用于将气体进料分离成多个进料管线的气体输送方法和装置，其具有设置在管线中的分离联接器的上游的气体过滤器。

公开(公告)号：US5895817A

公开(公告)日：1999-04-20

申请号：US878517

申请日：1997-06-19

Applicant: Matthew Lincoln Wagner

Inventor： Matthew Lincoln Wagner

IPC: C07D307/60 ,  B01F3/02 ,  B01F5/02 ,  B01F5/04 ,  B01F13/10 ,  B01J4/00 ,  B01J8/18 ,  B01J8/24 ,  B01J19/00 ,  C07B61/00 ,  C07C51/215 ,  C07D211/40 ,  C07D307/34 ,  C07D307/36 ,  C07D307/77 ,  C07D307/89 ,  C07D307/94

CPC classification number: B01J8/1827 ,  B01F5/02 ,  B01F5/0453 ,  B01F5/0466 ,  B01J19/002 ,  B01J8/1809 ,  B01J8/1818 ,  C07C51/215 ,  B01F2013/1091 ,  B01F3/02 ,  B01J2208/00017 ,  B01J2208/00548 ,  B01J2219/00263

Abstract: A system provides an oxygen-bearing gas and gaseous reactant stream to a fluidized bed reactor using a sparger to entrain the oxygen-bearing gas into the reactant gas stream. A feed line couples the sparger to the reactor's fluidized bed and introduces the reactant gas stream and entrained oxygen-bearing gas directly into contact with the fluidized bed. A controller controls and maintains both the amount of oxygen-bearing gas and the gaseous reactant above an upper flammability limit, preferably with a safety margin of at least 10%.

Abstract translation: 系统使用喷射器将含氧气体和气态反应物流提供给流化床反应器，以将含氧气体夹带到反应气体流中。 进料管将分布器与反应器的流化床相连，并将反应物气流和夹带的含氧气体直接引入与流化床接触。 控制器控制和维持上述可燃性极限以上的含氧气体和气体反应物的量，优选地具有至少10％的安全裕度。

公开(公告)号：US5871632A

公开(公告)日：1999-02-16

申请号：US856629

申请日：1997-05-14

Applicant: August Winsel

Inventor： August Winsel

IPC: B01J4/00 ,  B01J7/02 ,  F04B17/00 ,  C25B9/00 ,  B65D83/14

CPC classification number: F04B17/00 ,  B01J4/001 ,  B01J7/02

Abstract: Process and apparatus for conveying flowing substances with the aid of an electrochemical gas evolution cell whose cell current generates primarily a gas volume flow which secondarily causes the volume flow of a decomposer liquid into a catalytic decomposer and which thereby initiates a quantity flow of the decomposer gas which transports the flowable conveyed medium to the intended location.

Abstract translation: 在电化学气体放出室的辅助下输送流动物质的方法和装置，其电池电流主要产生气体体积流，其二次导致分解剂液体的体积流动进入催化分解器，从而引发分解气体的量 其将可流动的输送介质输送到预期位置。

公开(公告)号：US5862934A

公开(公告)日：1999-01-26

申请号：US502879

申请日：1995-07-17

Applicant: Stephan Sattler ,  Albert Wohland ,  Hermann Erb

Inventor： Stephan Sattler ,  Albert Wohland ,  Hermann Erb

IPC: G01N35/00 ,  B01J4/00 ,  B01L3/14 ,  B65D21/024 ,  B65D71/50 ,  A47G19/00

CPC classification number: B01L3/50825 ,  B65D71/50 ,  G01N35/00732 ,  G01N2035/00782 ,  G01N35/0099

Abstract: Packaging system for liquid reagents in which two or more vessels with holding areas are combined by pressing a plug-on plate onto the holding areas of the vessels. For this purpose the plug-on plate has two or more apertures the cross-section of which essentially corresponds to the cross-section of the holding areas of the vessels. Plug-on plate and/or holding areas of the vessels can have stop elements which, after the combination, hinder the separation vessels and plug-on plate.

Abstract translation: 用于液体试剂的包装系统，其中具有保持区域的两个或多个容器通过将插入板压在容器的保持区域上而组合。 为此，插入板具有两个或更多个孔，其横截面基本上对应于容器的保持区域的横截面。 容器的插入板和/或保持区域可以具有止动元件，其在组合之后阻碍分离容器和插入板。

公开(公告)号：US5850853A

公开(公告)日：1998-12-22

申请号：US630081

申请日：1996-04-09

Applicant: Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

Inventor： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

IPC: B01J4/00 ,  C30B25/14 ,  C30B31/16 ,  F16K31/122 ,  F16K31/42

CPC classification number: C23C16/45561 ,  B01J4/008 ,  C30B25/14 ,  C30B31/16 ,  F16K31/1226 ,  F16K31/42 ,  Y10T137/87684

Abstract: A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

Abstract translation: 流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和多个分支控制线（L1，L2 ...），用于将多种类型的流体（G1，G2 ...）馈送到耦合到 主控制线和并入分支控制线（L1，L2 ...）中的多个阀组件（V），用于切换供给到处理装置（C）中的流体（G1，G2 ...）。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀（V“） 阀（V'）将工作流体（A）输送到流体压力致动器（1）中。

公开(公告)号：US5755363A

公开(公告)日：1998-05-26

申请号：US634452

申请日：1996-04-18

Applicant: Gebhard Gantner ,  Heinrich Steiner

Inventor： Gebhard Gantner ,  Heinrich Steiner

IPC: B65D83/40 ,  B01J4/00 ,  B05B9/08 ,  B05B12/00 ,  B05C5/00 ,  B05C17/005 ,  B65D83/16 ,  B65D83/00

CPC classification number: B65D83/202 ,  B05B12/002 ,  B05B9/0894 ,  B65D83/303

Abstract: A device for dispensing a flowable mass stored under pressure in a container (13) includes a handle (1) with a locking arrangement (3) at one end for coupling it to the container. The handle (1) has a manually operated trigger member (5) in a side of the handle for operating an outlet valve on the container (13). The handle (1) forms a recess (7) extending inwardly from the one end to be coupled to the container (13) toward an opposite end.

Abstract translation: 用于将存储在压力下的可流动物料分配到容器（13）中的装置包括在一端具有锁定装置（3）的手柄（1），用于将其联接到容器。 手柄（1）在手柄侧具有用于操作容器（13）上的出口阀的手动触发构件（5）。 手柄（1）形成从一端向内延伸以朝向相对端联接到容器（13）的凹部（7）。

公开(公告)号：US5749389A

公开(公告)日：1998-05-12

申请号：US173398

申请日：1993-12-22

Applicant: Joe Ritrosi ,  Gary Schmitt ,  Carl Quintino ,  Gerhard Kasper

Inventor： Joe Ritrosi ,  Gary Schmitt ,  Carl Quintino ,  Gerhard Kasper

IPC: B01J4/00 ,  B08B9/02 ,  C23C16/44 ,  C23C16/455 ,  C23F4/00 ,  F17C13/00 ,  F17C13/04 ,  B08B9/06

CPC classification number: B08B9/0325 ,  F17C13/00 ,  F17C13/04 ,  F17C2205/0332 ,  F17C2205/0335 ,  F17C2205/0338 ,  F17C2205/0341 ,  F17C2205/0385 ,  F17C2205/0391 ,  F17C2221/012 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2250/043 ,  F17C2250/0443 ,  F17C2250/0636 ,  F17C2260/044 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0419 ,  Y10T137/4259

Abstract: A method and system for purging an ultra-high purity gas supply manifold comprising: a process connection through which ultra-high purity gas is communicated to a process; a first pigtail conduit in selective flow communication with a high purity gas source; a second pigtail conduit in selective flow communication with said process connection; means for creating a vacuum and means for selectively placing said vacuum means in communication with said first pigtail; an ultra-high purity process gas source; a block valve assembly comprising an inlet port in flow communication with said process gas source, a first outlet port in selective communication with said purge gas supply through connection with said first pigtail and second outlet port in selective communication with said process connection through connection with said second pigtail.

Abstract translation: 一种用于吹扫超高纯度气体供应歧管的方法和系统，包括：超高纯度气体通过该过程连接到工艺的过程连接; 与高纯度气体源选择性流动连通的第一个尾纤导管; 与所述过程连接选择性流动连通的第二尾纤管道; 用于产生真空的装置和用于选择性地将所述真空装置与所述第一尾纤连通的装置; 超高纯度工艺气源; 阻塞阀组件，其包括与所述过程气体源流动连通的入口端口，与所述吹扫气体供应通过连接与所述第一尾纤和第二出口端口选择性连通的第一出口端口，其与所述过程连接选择性地连通， 第二尾纤