Abstract:
Within a method for forming a microelectronic fabrication there is first provided a substrate. There is then formed over the substrate a patterned conductor layer having a topographic variation at a periphery of the patterned conductor layer. There is then formed over the substrate and passivating the topographic variation at the periphery of the patterned conductor layer a planarizing passivation layer formed of a thermally reflowable material. There is then formed upon the planarizing passivation layer a dimensionally stabilizing layer. Finally, there is then thermally annealed the microelectronic fabrication to form from the planarizing passivation layer a thermally annealed planarizing passivation layer. By employing formed upon the planarizing passivation layer the dimensionally stabilizing layer, there is attenuated within the thermally annealed planarizing passivation layer replication of the topographic variation at the periphery of the patterned conductor layer.
Abstract:
Disclosed herein are a method of manufacturing a solder bump on a semiconductor device, a solder bump structure formed on a substrate, and an intermediate solder bump structure. In one embodiment, the method includes creating a bonding pad over a semiconductor substrate, and placing a mask layer over the substrate and the bonding pad. The method also includes forming an opening in the mask layer having a primary solder mold and at least one secondary solder mold joined with the primary mold, where the opening exposes a portion of the bonding pad. In this embodiment, the method further includes filling the primary solder mold and the at least one secondary solder mold with solder material to form corresponding primary and at least one secondary solder columns in electrical contact with the bonding pad. The method also includes removing the mask layer after the filling of the solder molds with the solder material. The method still further includes reflowing the solder material to form a primary solder bump from the solder material of the primary solder column and at least a portion of the solder material from the at least one secondary solder column through cohesion of the solder material from the at least one secondary solder column to the primary solder column when melted.
Abstract:
An IC chip heat sink and method for dissipating heat from an integrated circuit (IC) chip, is disclosed. In a typical embodiment, the IC chip heat sink is fabricated by depositing a metal seed layer on the backside of a semiconductor wafer having multiple IC chips fabricated thereon. A photoresist layer is then deposited on the seed layer and patterned to define multiple photoresist openings. Multiple columns are formed on the seed layer by the electrochemical plating of a metal in the photoresist openings. Finally, the photoresist is stripped from the seed layer to define the multiple columns, which extend from the seed layer, and a network of heat sink channels between the columns. During functioning of the chip, heat is dissipated from the chip through the heat sink.
Abstract:
A method of making electrically conductive bumps of improved height on a semiconductor device. The method includes steps of depositing an under bump metallurgy over a semiconductor device onto a contact pad; depositing and patterning a photoresist layer to provide an opening over the under bump metallurgy; depositing a first electrically conductive material into the opening in the photoresist layer; depositing a second electrically conductive material over the first electrically conductive material; removing the photoresist layer and the excess under bump metallurgy; applying a flux agent to the top surface of the second electrically conductive material; hard baking the semiconductor device to remove any oxide; dipping a portion of the semiconductor device in an electroless plating solution; removing the semiconductor device from the electroless plating solution; and reflowing the electrically conductive materials to provide a bump of improved height on the semiconductor device.
Abstract:
Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon. A transparent encapsulant is deposited to planarize the color filter layer and completes the solid-state color image-forming device without conventional convex microlenses.
Abstract:
A method for forming an under bump metal, comprising the following steps. A semiconductor structure is provided having an exposed I/O pad. A patterned passivation layer is formed over the semiconductor structure, the patterned passivation layer having an opening exposing a first portion of the I/O pad. A dry film resistor (DFR) layer is laminated, exposed and developed to form a patterned dry film resistor (DFR) layer over the patterned passivation layer. The patterned dry film resistor (DFR) layer having an opening exposing a second portion of the I/O pad. The patterned dry film resistor (DFR) layer opening having opposing side walls with a predetermined profile with an undercut. A metal layer is formed over the patterned dry film resistor (DFR) layer, the exposed third portion of the I/O pad, and over at least a portion of the opposing side walls of the patterned dry film resistor (DFR) layer opening. The patterned dry film resistor (DFR) layer is lifted off, along with the metal layer over patterned dry film resistor (DFR) layer and over at least the portion of the opposing side walls, leaving the metal layer over the exposed second portion of the I/O pad. The metal layer over the exposed second portion of the I/O pad being an under bump metal.
Abstract:
Disclosed herein are intermediate and solder bump structures. In one embodiment, a structure comprises a primary solder column comprising primary solder material and configured to electrically contact a bonding pad on a semiconductor substrate. The structure also comprises at least one secondary solder column comprising secondary solder material in electrical contact with the primary solder column, the at least one secondary column having a height and volume less than a height and volume of the primary solder column. In such structures, the primary solder column is further configured to form a primary solder bump comprising the primary solder material and at least a portion of the secondary solder material through cohesion from the at least one secondary solder column when the intermediate structure undergoes a reflow process.
Abstract:
Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which would aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon. A transparent encapsulant is deposited to planarize the color filter layer and completes the solid-state color image-forming device without conventional convex microlenses.
Abstract:
A method of GPS bit synchronization is disclosed. The method includes the steps of a) receiving plural serial C/A Codes, wherein a data bit is formed by m C/A Codes; b) sequentially providing a bin number ranged from 0 to m−1 to the plural C/A Codes; c) setting a sampling value k; d) sequentially determining adjacent two C/A Codes, C/A Code nk and C/A Code (n+1)k, wherein n={0, 1, 2, 3, . . . }, and calculating a sign change aggregate value of each bin number ranged from 0 to m−1; e) repeating step d) till there are k bin numbers having the sign change aggregate value equal to or greater than a first threshold, and summing the k bin numbers for obtaining a lookup value; and f) acquiring a bit boundary of the data bit according to the lookup value in the plural serial C/A Codes.
Abstract:
It is an object of the present invention to provide a method for solder bump formation using a combination of eutectic and high lead solders. The present invention provides a method for improving a solder bump composition for a flip chip.