公开(公告)号：US08276446B2

公开(公告)日：2012-10-02

申请号：US12657751

申请日：2010-01-26

Applicant: Markus Ulm ,  Michael Struchholz ,  Tristan Jobert ,  Klaus Offterdinger ,  Thomas Klaus ,  Christian Gerhardt ,  Florian Grabmaier ,  Dirk Dittmann

Inventor： Markus Ulm ,  Michael Struchholz ,  Tristan Jobert ,  Klaus Offterdinger ,  Thomas Klaus ,  Christian Gerhardt ,  Florian Grabmaier ,  Dirk Dittmann

IPC: G01D11/10

CPC classification number: G01P1/023 ,  B81B7/0012 ,  B81B2201/025 ,  B81B2207/07 ,  G01C19/56 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A sensor device includes a housing base part, a bearer part, a chip structure situated on the bearer part, and a spring/damper combination via which the housing base part and the bearer part are elastically connected to one another. In the sensor device, the housing base part, the spring/damper combination and the bearer part are situated one over the other.

Abstract translation: 传感器装置包括壳体基部，承载部分，位于承载部分上的芯片结构，以及弹簧/阻尼器组合，壳体基部和承载部分经由该弹簧/阻尼器组合彼此弹性连接。 在传感器装置中，壳体基部，弹簧/阻尼器组合和承载部分彼此重叠。

公开(公告)号：US20100263447A1

公开(公告)日：2010-10-21

申请号：US12825046

申请日：2010-06-28

Applicant: Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

Inventor： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

IPC: G01P15/09 ,  H04R17/00

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

Abstract: A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

Abstract translation: 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

公开(公告)号：US20090065928A1

公开(公告)日：2009-03-12

申请号：US12264774

申请日：2008-11-04

Applicant: Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

Inventor： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

IPC: H01L23/12

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

公开(公告)号：US20080265712A1

公开(公告)日：2008-10-30

申请号：US12172369

申请日：2008-07-14

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

IPC: H01L41/24 ,  H04R17/00

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract translation: 描述制造能量收集装置的实施例。 在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

公开(公告)号：US20080122020A1

公开(公告)日：2008-05-29

申请号：US11594525

申请日：2006-11-07

Applicant: Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

Inventor： Matthias Metz ,  Zhiyu Pan ,  Brian Stark ,  Markus Ulm ,  Gary Yama

IPC: H01L29/84 ,  H01L21/56

CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。 实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

公开(公告)号：US20080079333A1

公开(公告)日：2008-04-03

申请号：US11541966

申请日：2006-10-02

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz

IPC: H01L41/113

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract translation: 描述制造能量收集装置的实施例。 在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分。 整个组件可以封装在塑料中。

公开(公告)号：US20070229198A1

公开(公告)日：2007-10-04

申请号：US10572220

申请日：2004-07-24

Applicant: Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

Inventor： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

IPC: H01P1/10 ,  H01H65/00

CPC classification number: H01H59/0009 ,  Y10T29/49105

Abstract: A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

Abstract translation: 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。

公开(公告)号：US20050128022A1

公开(公告)日：2005-06-16

申请号：US10974621

申请日：2004-10-27

Applicant: Markus Ulm ,  Joerg Schoebel

Inventor： Markus Ulm ,  Joerg Schoebel

IPC: H01P1/26

CPC classification number: H01P3/003 ,  H01P1/268

Abstract: Novel concepts are proposed for line terminations of coplanar lines that are as anechoic as possible, having a neutral wire and two outer conductors that are situated at least from section to section on both sides of the neutral wire, the line termination including at least one resistor element, via which the neutral wire is connected at its end with the two outer conductors. A connection at the end between the two outer conductors exists independently of the at least one resistor element. Alternatively or in supplementation to this, at least one resistor element of the line termination is situated at a slanting angle to the neutral wire, i.e. at an angle which is either greater or less than 90°.

Abstract translation: 提出了用于尽可能消音的共面线的线路终端的新概念，具有中性线和至少位于中性线的两侧上的截面的两个外部导体，线路终端包括至少一个电阻器 元件，中性线在其端部与两个外导体连接。 在两个外部导体之间的端部处的连接独立于至少一个电阻器元件存在。 作为替代或补充，线路终端的至少一个电阻器元件以与中性线的倾斜角度定位，即以大于或小于90°的角度。

公开(公告)号：US07898046B2

公开(公告)日：2011-03-01

申请号：US12506219

申请日：2009-07-20

Applicant: Markus Ulm ,  Brian Stark ,  Matthias Metz ,  Tino Fuchs ,  Franz Laermer ,  Silvia Kronmueller

Inventor： Markus Ulm ,  Brian Stark ,  Matthias Metz ,  Tino Fuchs ,  Franz Laermer ,  Silvia Kronmueller

IPC: H01L21/00

CPC classification number: B81C1/0096 ,  B81B3/0005

Abstract: An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.

Abstract translation: 描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。 涂层在器件释放后，但在封装层封口之前应用。 或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

公开(公告)号：US07757555B2

公开(公告)日：2010-07-20

申请号：US11513669

申请日：2006-08-30

Applicant: Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

Inventor： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

IPC: G01P15/08

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

Abstract: A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

Abstract translation: 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。