公开(公告)号：US07727366B2

公开(公告)日：2010-06-01

申请号：US11265543

申请日：2005-11-02

Applicant: Arthur Keigler ,  Qunwei Wu ,  Zhenqiu Liu ,  John Harrell

Inventor： Arthur Keigler ,  Qunwei Wu ,  Zhenqiu Liu ,  John Harrell

IPC: C25B9/02

CPC classification number: H01L21/67126 ,  C25D5/003 ,  C25D7/123 ,  C25D17/001 ,  C25D21/12 ,  H01L21/67023

Abstract: A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.

Abstract translation: 描述了用于流体密封由工件保持器保持的工件的方法和装置。 可以跨流体密封件形成压力差，以抵消试图渗透流体密封件的流体，这可能污染工件的下侧。 该装置可以包括形成与流体进入工件的阻挡物的环和提供压力以形成压力差的源。 压力或压力差可抵消吸入液体压力或静压流体压力，其作用是迫使流体通过环和工件之间的阻挡层。

公开(公告)号：US07014679B2

公开(公告)日：2006-03-21

申请号：US10467245

申请日：2002-01-31

Applicant: Bipin Parekh ,  Saksatha Ly ,  Qunwei Wu

Inventor： Bipin Parekh ,  Saksatha Ly ,  Qunwei Wu

IPC: B01D19/00 ,  B01D53/22

CPC classification number: B01D63/02 ,  B01D19/0031 ,  B01D19/0068 ,  B01D71/32 ,  B01D2313/90 ,  C25D3/38 ,  C25D21/12

Abstract: A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the fiber surfaces contacted by the solution. Gas passed through the fiber walls while liquid is prevented from infiltrating the fiber pores. The composition of the solution is monitored so that the composition can be retained substantially constant by adding components of the solution as needed.

Abstract translation: 提供了一种从镀铜液中除去氧气的方法。 将溶液通过包含壳和中空疏水性纤维多孔膜的脱气机，其中在将真空抽吸在与溶液接触的纤维表面相对的纤维表面上时，壳体。 气体通过纤维壁，同时防止液体渗透纤维孔隙。 监测溶液的组成，使得通过根据需要添加溶液的组分，可以将组合物保持基本上恒定。

公开(公告)号：US20050173243A1

公开(公告)日：2005-08-11

申请号：US10513265

申请日：2003-05-02

Applicant: Qunwei Wu ,  Craig Brodeur ,  John Pillion ,  Jieh Shyu

Inventor： Qunwei Wu ,  Craig Brodeur ,  John Pillion ,  Jieh Shyu

IPC: B01D61/00 ,  B01J4/04 ,  B01J19/00 ,  B01J19/08 ,  B01J19/24 ,  C01B3/50 ,  C25B15/08 ,  C25D5/08 ,  C25D17/00 ,  C25D17/10 ,  C25F7/00 ,  F28F13/00 ,  F28F13/02 ,  H01M2/16 ,  H01M8/02 ,  H01M8/10 ,  C25B9/00

CPC classification number: H01M8/04201 ,  B01D61/00 ,  B01J4/04 ,  B01J19/2475 ,  C01B3/503 ,  C01B2203/0405 ,  C01B2203/041 ,  C25B15/08 ,  C25D5/08 ,  C25D17/008 ,  C25D17/10 ,  C25F7/00 ,  F28F13/003 ,  F28F13/02 ,  H01M2/1673 ,  H01M8/04197 ,  H01M8/1004

Abstract: A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

Abstract translation: 一种用于增加流体池中的固体和流体界面处的化学或电化学过程的质量传输速率的装置和方法。 该装置包括与工件的表面紧密接触的膜，以将处理室分离成两个室，使得工件上的流体速度与主池流动分离地被控制。 因此，扩散边界层通过流体从工件腔室中取出的速度被控制和最小化。

公开(公告)号：US20050160977A1

公开(公告)日：2005-07-28

申请号：US10971530

申请日：2004-10-22

Applicant: Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

Inventor： Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

IPC: B23K15/00 ,  C25D5/18 ,  C25D5/22 ,  C25D7/12 ,  C25D17/00 ,  C25D21/10 ,  C25D21/12 ,  H01L21/00

CPC classification number: C25D17/001 ,  C25D5/003 ,  C25D7/123 ,  C25D17/005 ,  C25D17/06 ,  C25D21/10 ,  C25D21/12 ,  H01L21/67023 ,  H01L21/67126

Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.