Abstract:
The present invention provides a system for removing organic contaminants (216) from a copper seed layer that has been deposited on a semiconductor substrate (206). The present invention provides a housing (204) to enclose the semiconductor substrate within. An ultraviolet radiation source (210) is disposed within the housing. A treatment medium (208) is also provided within the housing. The semiconductor substrate is enclosed within the housing and exposed to the treatment medium. The ultraviolet radiation source exposes the semiconductor substrate to ultraviolet radiation, desorbing the contaminants from the seed layer.
Abstract:
A wireless fetal and maternal monitoring system includes a fetal sensor unit adapted to receive signals indicative of a fetal heartbeat, the sensor optionally utilizing a Doppler ultrasound sensor. A short-range transmission unit sends the signals indicative of fetal heartbeat to a gateway unit, either directly or via an auxiliary communications unit, in which case the electrical coupling between the short-range transmission unit and the auxiliary communications unit is via a wired connection. The system includes a contraction actuator actuatable upon a maternal uterine contraction, which optionally is a EMG sensor. A gateway device provides for data visualization and data securitization. The gateway device provides for remote transmission of information through a data communication network. A server adapted to receive the information from the gateway device serves to store and process the data, and an interface system to permits remote patient monitoring.
Abstract:
Exemplary embodiments are directed to wireless power management. A method may include detecting one or more wireless chargers for charging an energy storage device of one or more monitored energy storage devices if the energy storage device drops below a threshold value. Moreover, the method may include selecting a charging scheme for an electronic device associated with the energy storage device.
Abstract:
Exemplary embodiments are directed to wireless power. A method may comprise receiving wireless power with a receiver and charging an accumulator with energy from the received wireless power. The method may further include conveying energy from the accumulator to an energy storage device upon a charging level of the accumulator reaching a threshold level.
Abstract:
A wireless fetal and maternal monitoring system includes a fetal sensor unit adapted to receive signals indicative of a fetal heartbeat, the sensor optionally utilizing a Doppler ultrasound sensor. A short-range transmission unit sends the signals indicative of fetal heartbeat to a gateway unit, either directly or via an auxiliary communications unit, in which case the electrical coupling between the short-range transmission unit and the auxiliary communications unit is via a wired connection. The system includes a contraction actuator actuatable upon a maternal uterine contraction, which optionally is a EMG sensor. A gateway device provides for data visualization and data securitization. The gateway device provides for remote transmission of information through a data communication network. A server adapted to receive the information from the gateway device serves to store and process the data, and an interface system to permits remote patient monitoring.
Abstract:
A method of removing photoresist from a surface during the manufacture of an integrated circuit. Organometallic polymers and monomers are formed during the etch of a hard mask material defining the locations of a metal-bearing film, such as tantalum nitride, when photoresist is used to mask the hard mask etch. These organometallic polymers and monomers as formed are not fully cross-linked. A liquid phase solution of sulfuric acid and hydrogen peroxide used to remove the photoresist also removes these not-fully-cross-linked organometallic polymers and monomers, thus preventing the formation of stubborn contaminants during subsequent high temperature processing.
Abstract:
Exemplary embodiments are directed to wireless power. A method may comprise receiving wireless power with a receiver and charging an accumulator with energy from the received wireless power. The method may further include conveying energy from the accumulator to an energy storage device upon a charging level of the accumulator reaching a threshold level.
Abstract:
An integrated circuit copper interconnect structure is formed by forming a dielectric layer (90) over a semiconductor substrate (10). Trenches (110) and vias (120) are formed in the dielectric layer (90) and a barrier layer (130) is formed in the trenches (110) and vias (120) using material such as iridium, iridium oxide, ruthenium, ruthenium oxide, rhodium, rhodium oxide, rhenium, rhenium oxide, platinum, platinum oxide, palladium and palladium oxide. Copper (147) is then used to fill the remaining area in the trenches (110) and vias (120).