公开(公告)号：US06836372B2

公开(公告)日：2004-12-28

申请号：US10466744

申请日：2003-07-18

Applicant: Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbäcker

Inventor： Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbäcker

IPC: G02B1100

CPC classification number: H01J37/153

Abstract: An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90° about the optical axis relative to one another.

Abstract translation: 具有直线光轴的静电校正器具有两个校正部件，它们沿着光轴一个接一个布置，并且具有相应的四极场和叠加的圆形透镜场。 由轴点产生的一个横截面的像散中间图像位于一个校正部分中，并且垂直于第一横截面的另一横截面的像散中间图像位于另一校正部分中。 本发明的目的是消除粒子透镜的色差。 为了实现这一点，使用静电校正器，其包括具有相似器件结构的两个校正器单元，两个校正器单元中的每一个具有输入和输出侧，两个额外的静电四极杆位于其上。 两个校正单元以1：1表示法以伸缩方式表示轴向路径。 两个校正单元沿着光学轴线一个接一个地布置，并且相对于彼此围绕光轴旋转90°。

公开(公告)号：US06770878B2

公开(公告)日：2004-08-03

申请号：US10258486

申请日：2002-10-25

Applicant: Stephan Uhlemann ,  Maximilian Haider

Inventor： Stephan Uhlemann ,  Maximilian Haider

IPC: H01J4000

CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/2602 ,  H01J2237/2823

Abstract: The invention relates to an electron/ion gun for electron or ion beams, including a beam source and a monochromator. According to the invention, the monochromator is equipped with an additional beam guidance system and a switchover element which are provided at the input of the monochromator, and which convey the particles coming from the beam source to either the monochromator or the rest of the beam guidance system.

Abstract translation: 本发明涉及一种用于电子或离子束的电子/离子枪，包括光束源和单色器。 根据本发明，单色仪配备有附加的光束引导系统和切换元件，其设置在单色器的输入端处，并且将来自光束源的粒子传送到单色器或者其余的光束引导 系统。

公开(公告)号：US06646267B1

公开(公告)日：2003-11-11

申请号：US09508239

申请日：2000-04-24

Applicant: Maximilian Haider ,  Stephan Uhlemann

Inventor： Maximilian Haider ,  Stephan Uhlemann

IPC: H01J3710

CPC classification number: H01J37/153

Abstract: The invention relates to a method for eliminating axial image deformations &agr;n in electron optical systems, where the extra-axial image deformation of the order n+m with the same behavior in &agr;n, which thus has the form &agr;n&ggr;m, is modified by shifting or tilting the beam path towards the optical axis until compensation of the axial image deformation has been achieved, whereby &ggr; describes the extra-axial image coordinate as a complex number in both sections. The invention also relates to an adjustment method for eliminating all first-, second- and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systems with hexapoles.

Abstract translation: 本发明涉及一种用于消除电子光学系统中的轴向图像变形αn的方法，其中n + m阶的异轴图像变形具有相同的α的行为，因此具有α< 通过将光束路径朝向光轴移动或倾斜直到轴向图像变形的补偿已被实现来修改，由此γ在两个部分中将异轴图像坐标描述为复数。 本发明还涉及一种用于消除在具有六极的电子光学系统中校正三次球面像差期间的所有第一，第二和第三阶轴向图像变形的调整方法。

公开(公告)号：US5449914A

公开(公告)日：1995-09-12

申请号：US218343

申请日：1994-03-25

Applicant: Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

Inventor： Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

IPC: G01Q30/02 ,  H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J49/46 ,  H01J37/14

CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/26

Abstract: The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.

Abstract translation: 本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。 滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。 两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。 为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。 电子束通过第一均匀扇形磁体两次。 多极元件布置在三个扇形磁体之前，后面和之间。 该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。 通过多个元素校正所有二阶像差和显着的二次像差。