公开(公告)号：US10592618B2

公开(公告)日：2020-03-17

申请号：US15209290

申请日：2016-07-13

Applicant: ASML Netherlands B.V.

Inventor： Remco Dirks ,  Markus Gerardus Martinus Maria Van Kraaij ,  Maxim Pisarenco

IPC: G06F17/50 ,  H01L21/66 ,  H01L21/3065 ,  H01L21/308 ,  G03F7/20

Abstract: Parameters of a structure (900) are measured by reconstruction from observed diffracted radiation. The method includes the steps: (a) defining a structure model to represent the structure in a two- or three-dimensional model space; (b) using the structure model to simulate interaction of radiation with the structure; and (c) repeating step (b) while varying parameters of the structure model. The structure model is divided into a series of slices (a-f) along at least a first dimension (Z) of the model space. By the division into slices, a sloping face (904, 906) of at least one sub-structure is approximated by a series of steps (904′, 906′) along at least a second dimension of the model space (X). The number of slices may vary dynamically as the parameters vary. The number of steps approximating said sloping face is maintained constant. Additional cuts (1302, 1304) are introduced, without introducing corresponding steps.

公开(公告)号：US20190113452A1

公开(公告)日：2019-04-18

申请号：US16162009

申请日：2018-10-16

Applicant: ASML Netherlands B.V.

Inventor： Maxim Pisarenco ,  Nitesh Pandey ,  Alessandro Polo

IPC: G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  G03F7/20

Abstract: An acoustic scatterometer 502 has an acoustic source 520 operable to project acoustic radiation 526 onto a periodic structure 538 and 540 formed on a substrate 536. An acoustic detector 518 is operable to detect the −1st acoustic diffraction order 528 diffracted by the periodic structure 538 and 540 while discriminating from specular reflection (0th order 532). Another acoustic detector 522 is operable to detect the +1st acoustic diffraction order 530 diffracted by the periodic structure, again while discriminating from the specular reflection (0th order 532). The acoustic source and acoustic detector may be piezo transducers. The angle of incidence of the projected acoustic radiation 526 and location of the detectors 518 and 522 are arranged with respect to the periodic structure 538 and 540 such that the detection of the −1st and +1st acoustic diffraction orders 528 and 530 discriminates from the 0th order specular reflection 532.

公开(公告)号：US10146140B2

公开(公告)日：2018-12-04

申请号：US15285051

申请日：2016-10-04

Applicant: ASML Netherlands B.V.

Inventor： Maxim Pisarenco ,  Richard Quintanilha ,  Markus Gerardus Martinus Maria Van Kraaij

IPC: G03B27/68 ,  G03F7/20 ,  G01B15/00 ,  G01N23/201

Abstract: A structure of interest is irradiated with radiation for example in the x-ray or EUV waveband, and scattered radiation is detected by a detector (306). A processor (308) calculates a property such as linewidth (CD) by simulating interaction of radiation with a structure and comparing the simulated interaction with the detected radiation. A layered structure model (600, 610) is used to represent the structure in a numerical method. The structure model defines for each layer of the structure a homogeneous background permittivity and for at least one layer a non-homogeneous contrast permittivity. The method uses Maxwell's equation in Born approximation, whereby a product of the contrast permittivity and the total field is approximated by a product of the contrast permittivity and the background field. A computation complexity is reduced by several orders of magnitude compared with known methods.