公开(公告)号：US20100160143A1

公开(公告)日：2010-06-24

申请号：US12660068

申请日：2010-02-19

Applicant: Jennifer Y. Sun ,  Ren-Guan Duan ,  Jie Yuan ,  Li Xu ,  Kenneth S. Collins

Inventor： Jennifer Y. Sun ,  Ren-Guan Duan ,  Jie Yuan ,  Li Xu ,  Kenneth S. Collins

IPC: C04B35/482 ,  H01L21/306

CPC classification number: C04B35/505 ,  B32B18/00 ,  C04B35/486 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3229 ,  C04B2235/3244 ,  C04B2235/6582 ,  C04B2235/668 ,  C04B2235/762 ,  C04B2235/80 ,  C04B2235/9669 ,  H01J37/32467 ,  H01J37/32504 ,  Y10T428/31678

Abstract: A solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. In a first embodiment, the ceramic article includes ceramic which is formed from yttrium oxide at a molar concentration ranging from about 90 mole % to about 70 mole %, and zirconium oxide at a molar concentration ranging from about 10 mole % to about 30 mole %. In a second embodiment, the ceramic article includes ceramic which is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 94 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 6 mole %.

Abstract translation: 用于半导体加工的固体溶液陶瓷制品，其耐受含卤素等离子体侵蚀。 含固溶体的陶瓷制品由氧化钇和氧化锆的组合形成。 在第一个实施方案中，陶瓷制品包括由摩尔浓度为约90摩尔％至约70摩尔％的氧化钇形成的陶瓷，摩尔浓度为约10摩尔％至约30摩尔％的氧化锆， 。 在第二个实施方案中，陶瓷制品包括由摩尔浓度为约96摩尔％至约94摩尔％的氧化锆形成的陶瓷，摩尔浓度为约4摩尔％至约6摩尔％的氧化钇 。

公开(公告)号：US07718029B2

公开(公告)日：2010-05-18

申请号：US11461689

申请日：2006-08-01

Applicant: Jennifer Y. Sun ,  Li Xu ,  Senh Thach ,  Kelly A. McDonough ,  Robert Scott Clark

Inventor： Jennifer Y. Sun ,  Li Xu ,  Senh Thach ,  Kelly A. McDonough ,  Robert Scott Clark

IPC: C04B37/00 ,  B29C65/00 ,  B32B37/00 ,  B32B38/04 ,  H01L21/00

CPC classification number: C23C16/4409 ,  H01J37/32467

Abstract: Embodiments of the invention provide a robust bonding material suitable for joining semiconductor processing chamber components. Other embodiments provide semiconductor processing chamber components joined using a bonding material having metal filler disposed in an adhesive layer. Other embodiments include methods for manufacturing a semiconductor processing chamber component having a bonding material that includes metal filled disposed in an adhesive layer. The metal filler is suitable for reacting with halogen containing plasmas such that a halogen based metal layer is formed on the exposed portion of the bonding material upon exposure to the plasma.

Abstract translation: 本发明的实施例提供了适用于接合半导体处理室部件的坚固的接合材料。 其他实施例提供使用布置在粘合剂层中的具有金属填料的接合材料连接的半导体处理室部件。 其他实施例包括用于制造半导体处理室部件的方法，所述半导体处理室部件具有包括设置在粘合剂层中的填充金属的接合材料。 金属填料适于与含卤素的等离子体反应，使得在暴露于等离子体时在接合材料的暴露部分上形成卤素基金属层。

公开(公告)号：US07621677B2

公开(公告)日：2009-11-24

申请号：US11842944

申请日：2007-08-21

Applicant: Yi Yang ,  Li Xu ,  Yi Li

Inventor： Yi Yang ,  Li Xu ,  Yi Li

IPC: G02B6/36 ,  F21V7/04 ,  H01L33/00

CPC classification number: G02B6/4298 ,  G02B6/4214

Abstract: A light source is described where the light emitted by a solid-state light emitting device such as an LED is coupled into an optical waveguide such as an optical fiber. A highly reflective coupler (reflector) is disposed around the LED and a segment of the waveguide adjacent the LED. Light emitted from the LED that falls outside of the numerical aperture of the waveguide leaks out of the waveguide, but is reflected back to the waveguide by the reflector. The reflected light is re-reflected or scattered by the LED or the substrate the LED is mounted on, and the re-reflected or scattered light that falls within the numerical aperture of the waveguide is coupled into the waveguide. As a result, light coupling efficiency is increased and the output brightness of the light at the other end of the fiber is enhanced.

Abstract translation: 描述了由诸如LED的固态发光器件发射的光耦合到诸如光纤的光波导中的光源。 在LED周围设置高反射耦合器（反射器）以及邻近LED的波导段。 落在波导的数值孔径之外的LED发出的光从波导泄漏出来，但被反射器反射回波导。 反射光被LED或LED安装在其上的基板重新反射或散射，并且落在波导的数值孔径内的再反射或散射的光耦合到波导中。 结果，光耦合效率提高，光纤另一端的光的输出亮度提高。

公开(公告)号：US20090142247A1

公开(公告)日：2009-06-04

申请号：US11999083

申请日：2007-12-03

Applicant: Jennifer Y. Sun ,  Irene A. Chou ,  Li Xu ,  Kenneth S. Collins ,  Thomas Graves

Inventor： Jennifer Y. Sun ,  Irene A. Chou ,  Li Xu ,  Kenneth S. Collins ,  Thomas Graves

IPC: H01L21/302 ,  C01B31/36

CPC classification number: C23C16/4404 ,  C04B41/009 ,  C04B41/5353 ,  C04B41/91 ,  C04B35/565

Abstract: Method of removing damaged silicon carbide crystalline structure from the surface of a silicon carbide component. The method comprises at least two liquid chemical treatment processes, where one treatment converts silicon carbide to silicon oxide, and another treatment removes silicon oxide. The liquid chemical treatments are typically carried out at a temperature below about 100° C. The time period required to carry out the method is generally less than about 100 hours.

Abstract translation: 从碳化硅组件的表面去除损坏的碳化硅晶体结构的方法。 该方法包括至少两种液体化学处理方法，其中一种处理将碳化硅转化为氧化硅，另一种处理将氧化硅除去。 液体化学处理通常在低于约100℃的温度下进行。进行该方法所需的时间通常小于约100小时。

公开(公告)号：US20090111209A1

公开(公告)日：2009-04-30

申请号：US12346750

申请日：2008-12-30

Applicant: Timothy WEIDMAN ,  Li Xu ,  Peter G. Borden

Inventor： Timothy WEIDMAN ,  Li Xu ,  Peter G. Borden

IPC: H01L21/06

CPC classification number: H01L31/0749 ,  H01L31/03923 ,  H01L31/0465 ,  H01L31/18 ,  Y02E10/541

Abstract: A processing method described herein provides a method of patterning a MoSe2 and/or Mo material, for example a layer of such material(s) in a thin-film structure. According to one aspect, the invention relates to etch solutions that can effectively etch through Mo and/or MoSe2. According to another aspect, the invention relates to etching such materials when such materials are processed with other materials in a thin film photovoltaic device. According to other aspects, the invention includes a process of etching Mo and/or MoSe2 with selectivity to a layer of CIGS material in an overall process flow. According to still further aspects, the invention relates to Mo and/or MoSe2 etch solutions that are useful in an overall photolithographic process for forming a photovoltaic cell and/or interconnects and test structures in a photovoltaic device.

Abstract translation: 本文所述的处理方法提供了一种图案化MoSe 2和/或Mo材料的方法，例如薄膜结构中的这种材料层。 根据一个方面，本发明涉及可以有效地通过Mo和/或MoSe2蚀刻的蚀刻溶液。 根据另一方面，本发明涉及当这种材料在薄膜光伏器件中用其它材料加工时蚀刻这种材料。 根据其它方面，本发明包括在整个工艺流程中对具有选择性的CIGS材料的Mo和/或MoSe2进行蚀刻的工艺。 根据另外的方面，本发明涉及可用于在光伏器件中形成光伏电池和/或互连和测试结构的整体光刻工艺中的Mo和/或MoSe2蚀刻溶液。

公开(公告)号：US20090063696A1

公开(公告)日：2009-03-05

申请号：US12140101

申请日：2008-06-16

Applicant: Linghsiao Wang ,  Li Xu

Inventor： Linghsiao Wang ,  Li Xu

IPC: G06F15/16

CPC classification number: H04L1/188

Abstract: Disclosed is a system and methods for accelerating network protocol processing for devices configured to process network traffic at relatively high data rates. The system incorporates a hardware-accelerated protocol processing module that handles steady state network traffic and a software-based processing module that handles infrequent and exception cases in network traffic processing.

Abstract translation: 公开了一种用于加速网络协议处理的系统和方法，该设备被配置为以相对高的数据速率处理网络流量。 该系统包含处理稳态网络流量的硬件加速协议处理模块，以及处理网络流量处理中不频繁和异常情况的基于软件的处理模块。

公开(公告)号：US07451033B2

公开(公告)日：2008-11-11

申请号：US11160148

申请日：2005-06-10

Applicant: Li Xu ,  Hongtei Eric Tseng ,  Joseph C. Meyers

Inventor： Li Xu ,  Hongtei Eric Tseng ,  Joseph C. Meyers

IPC: B60G17/06 ,  G06F17/00

CPC classification number: B60R21/0132 ,  B60R2021/01327 ,  B60T8/172 ,  B60T2250/04 ,  B60W30/02 ,  B60W30/045 ,  B60W40/10

Abstract: A system (18) for controlling a safety system (44) of a vehicle (10) is disclosed herein. The system includes a longitudinal acceleration sensor (36), a vehicle or wheel speed sensor(s) (20), a lateral acceleration sensor (32), a yaw rate sensor (28), and a controller (26). The controller determines a stability index and provides a first observer that determines a reference longitudinal velocity in response to the sensors. The controller determines a reference lateral velocity in response to the sensors. The controller provides a second observer that determines a second longitudinal velocity in response to the sensors and a first adjustment based on the reference longitudinal velocity. The controller determines a second lateral velocity in response to the sensors and a second adjustment based on the reference lateral velocity. The controller determines an output lateral velocity and an output longitudinal velocity in response to the first and second observers and the stability index and accordingly controls the safety system.

Abstract translation: 本文公开了一种用于控制车辆（10）的安全系统（44）的系统（18）。 该系统包括纵向加速度传感器（36），车辆或车轮速度传感器（20），横向加速度传感器（32），偏航率传感器（28）和控制器（26）。 控制器确定稳定性指标，并提供响应于传感器确定参考纵向速度的第一观察者。 控制器响应于传感器确定参考横向速度。 控制器提供第二观测器，其响应于传感器确定第二纵向速度，并且基于参考纵向速度进行第一调整。 控制器响应于传感器确定第二横向速度，并且基于参考横向速度进行第二调整。 控制器响应于第一和第二观察者和稳定性指标确定输出横向速度和输出纵向速度，并因此控制安全系统。

公开(公告)号：US07431103B2

公开(公告)日：2008-10-07

申请号：US11732684

申请日：2007-04-04

Applicant: Craig A. Schell ,  Ashok Samuel Baskar ,  Paul G. Gross ,  Charles L. Bradenbaugh, IV ,  Robert Alan Berry ,  David C. Tomayko ,  Li Xu

Inventor： Craig A. Schell ,  Ashok Samuel Baskar ,  Paul G. Gross ,  Charles L. Bradenbaugh, IV ,  Robert Alan Berry ,  David C. Tomayko ,  Li Xu

IPC: B25C1/04

CPC classification number: B25C1/043 ,  B25C1/008 ,  B25C1/046 ,  B25C1/06 ,  Y10T16/44

Abstract: A contact trip assembly for a power nailer, wherein a contact member includes a curved portion that loops rearwardly towards a handle of the nailer. Also provided is an adjustment assembly including an adjustment plate and a pinion gear, a trigger that is slidably engageable within a housing of the tool, a trigger lock including a ring element, an anti-discharge mechanism including a stop member, and a contact trip lock.

Abstract translation: 一种用于电动打钉机的接触跳闸组件，其中，接触构件包括向后朝向所述敲钉器的手柄回转的弯曲部分。 还提供了一种调节组件，包括调节板和小齿轮，可滑动地接合在工具的壳体内的触发器，包括环形元件的触发器锁，包括止动构件的防放电机构和接触脱扣 锁。

公开(公告)号：US20080213496A1

公开(公告)日：2008-09-04

申请号：US11890221

申请日：2007-08-02

Applicant: Jennifer Y. Sun ,  Shun Jackson Wu ,  Senh Thach ,  Ananda Kumar ,  Robert W. Wu ,  Hong Wang ,  Yixing Lin ,  Clifford C. Stow ,  Jim Dempster ,  Li Xu ,  Kenneth S. Collins ,  Ren-Guan Duan ,  Thomas Graves ,  Xiaoming He ,  Jie Yuan

Inventor： Jennifer Y. Sun ,  Shun Jackson Wu ,  Senh Thach ,  Ananda Kumar ,  Robert W. Wu ,  Hong Wang ,  Yixing Lin ,  Clifford C. Stow ,  Jim Dempster ,  Li Xu ,  Kenneth S. Collins ,  Ren-Guan Duan ,  Thomas Graves ,  Xiaoming He ,  Jie Yuan

IPC: C23C4/10 ,  C23C14/34

CPC classification number: C23C28/042 ,  C23C4/11 ,  C23C4/18 ,  C23C16/4404

Abstract: Methods of applying specialty ceramic materials to semiconductor processing apparatus, where the specialty ceramic materials are resistant to halogen-comprising plasmas. The specialty ceramic materials contain at least one yttrium oxide-comprising solid solution. Some embodiments of the specialty ceramic materials have been modified to provide a resistivity which reduces the possibility of arcing within a semiconductor processing chamber.

Abstract translation: 将特种陶瓷材料应用于半导体加工设备的方法，其中特种陶瓷材料耐卤素等离子体。 特种陶瓷材料含有至少一种含氧化钇的固溶体。 已经修改了特种陶瓷材料的一些实施例以提供降低半导体处理室内的电弧的可能性的电阻率。

公开(公告)号：US20070288152A1

公开(公告)日：2007-12-13

申请号：US11771708

申请日：2007-06-29

Applicant: Jianbo Lu ,  Todd Brown ,  Li Xu ,  Joseph Meyers

Inventor： Jianbo Lu ,  Todd Brown ,  Li Xu ,  Joseph Meyers

IPC: G06F19/00

CPC classification number: B60G17/018 ,  B60G17/0185 ,  B60G17/019 ,  B60G17/0195 ,  B60G2400/0521 ,  B60G2400/0522 ,  B60G2400/0523 ,  B60G2400/102 ,  B60G2400/104 ,  B60G2400/106 ,  B60G2600/08 ,  B60G2800/70

Abstract: A vehicle control system includes a housed sensor cluster generating a plurality of signals. An integrated controller includes a sensor signal compensation unit and a kinematics unit, wherein the sensor signal compensation unit receives at least one of the plurality of signals and compensates for an offset within the signal and generates a compensated signal as a function thereof. The integrated controller further generates a kinematics signal including a sensor frame with respect to an intermediate axis system as a function of the compensated signal and generates a vehicle frame signal as a function of the kinematics signal. A dynamic system controller receives the vehicle frame signal and generates a dynamic control signal in response thereto. A safety device controller receives the dynamic control signal and further generates a safety device signal in response thereto.

Abstract translation: 车辆控制系统包括产生多个信号的容纳传感器簇。 集成控制器包括传感器信号补偿单元和运动单元，其中所述传感器信号补偿单元接收所述多个信号中的至少一个信号并且补偿所述信号内的偏移量并且产生作为其功能的补偿信号。 集成控制器进一步根据补偿信号生成包括相对于中轴系的传感器框架的运动学信号，并产生作为运动学信号的函数的车辆框架信号。 动态系统控制器接收车辆帧信号并响应于此生成动态控制信号。 安全装置控制器接收动态控制信号，并进一步响应于此产生安全装置信号。