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公开(公告)号:USD736901S1
公开(公告)日:2015-08-18
申请号:US29441792
申请日:2013-01-09
Applicant: CKD CORPORATION
Designer: Masayuki Kouketsu , Hiroshi Itafuji , Masayo Okada
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公开(公告)号:US09031391B2
公开(公告)日:2015-05-12
申请号:US13630987
申请日:2012-09-28
Applicant: CKD Corporation
Inventor: Masayuki Kouketsu , Hiroshi Itafuji
CPC classification number: B01B1/005
Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface and a guiding member that is provided to contact an opposite side of the mesh form body to the main body side.
Abstract translation: 控制液体扩散的液体控制装置具有主体,该主体具有供应对象表面,液体被供应到主体表面。 该装置还具有网状体,其被编织成网状并且设置成与供体对象表面接触并且被设置成与网状体的相对侧接触主体侧的引导构件。
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公开(公告)号:US09010736B2
公开(公告)日:2015-04-21
申请号:US13631003
申请日:2012-09-28
Applicant: CKD Corporation
Inventor: Masayuki Kouketsu , Hiroshi Itafuji
CPC classification number: F16K49/002 , B01B1/005 , Y10T137/6416
Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.
Abstract translation: 控制液体扩散的液体控制装置具有主体,该主体具有供应对象表面,液体被供应到主体表面。 该装置还具有网状物体,其被编织成网状并设置成与供应物体表面接触。 在主体的内部设置加热供给对象面的加热器。 供给口设置在主体中,以将液体从主体的内部供给到与网状体接触的供给对象面的一部分。 在供给对象表面设置有凹槽,以抑制液体从供给口到供电对象表面的宽度方向上与加热器相反的一侧的扩展。
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公开(公告)号:US11796247B2
公开(公告)日:2023-10-24
申请号:US17100227
申请日:2020-11-20
Inventor: Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
CPC classification number: F25D29/001 , F25D17/02 , F25D2303/085 , F25D2400/34 , F25D2500/04 , F25D2600/02 , F25D2700/121 , F25D2700/123 , F25D2700/16
Abstract: A temperature control system is used for controlling a temperature of a control target to a target temperature that changes with lapse of time. The system includes: a first adjustment apparatus that includes a first tank that stores a first heat transfer medium, adjusts the temperature of the first heat transfer medium to a first set temperature, and supplies the temperature-adjusted first heat transfer medium; a first circulation circuit through which the first heat transfer medium flows from the first adjustment apparatus to a first flow-through path and returns to the first adjustment apparatus; an adjustment section that adjusts an amount of heat supplied from the first flow-through path to the control target; a memory that stores a relation between the lapse of time and the target temperature; and a controller.
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公开(公告)号:US11566723B2
公开(公告)日:2023-01-31
申请号:US17130731
申请日:2020-12-22
Applicant: CKD Corporation
Inventor: Akihiro Ito , Masayuki Kouketsu , Keiichi Nishikawa , Yasuhisa Hirose , Takahiro Minatani
IPC: F16K31/06 , F16K3/18 , F16K3/316 , F16K11/065
Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.
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公开(公告)号:US20210148621A1
公开(公告)日:2021-05-20
申请号:US17100191
申请日:2020-11-20
Inventor: Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
Abstract: A cooling system includes: a first cooling apparatus electrically driven to supply a first heat transfer medium cooled to a first set temperature or lower; a plurality of second cooling apparatuses each of which includes a heat exchanger that exchanges heat between the first heat transfer medium supplied from the first cooling apparatus and a second heat transfer medium, and is electrically driven to supply a third heat transfer medium cooled to a second set temperature or lower, the second set temperature being changed individually with lapse of time; and a processor that obtains second set temperatures of the second cooling apparatuses and sets the first set temperature based on the obtained second set temperatures.
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公开(公告)号:US20210140688A1
公开(公告)日:2021-05-13
申请号:US17093002
申请日:2020-11-09
Inventor: Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
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公开(公告)号:US10121590B2
公开(公告)日:2018-11-06
申请号:US15619268
申请日:2017-06-09
Applicant: CKD Corporation
Inventor: Akihiro Ito , Masayuki Kouketsu , Takashi Yamaguchi , Takeshi Fukuda
Abstract: A method produces a coil sheet from an initial coil sheet in which a conductor layer, a thermally resistant insulating layer, a thermosetting, uncured adhesive layer, and a base layer are stacked in this order. The method includes a first cutting step of cutting the conductor layer into a predetermined shape through etching, and a second cutting step of cutting, after the first cutting step, the insulating layer and the adhesive layer into the predetermined shape through etching.
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公开(公告)号:US10043609B2
公开(公告)日:2018-08-07
申请号:US15061857
申请日:2016-03-04
Applicant: CKD CORPORATION , NIKON CORPORATION
Inventor: Akihiro Ito , Masayuki Kouketsu , Shigeru Morimoto , Hiromitsu Yoshimoto , Koji Tanaka
CPC classification number: H01F7/08 , H01F5/00 , H01F7/06 , H01F27/16 , H02K3/24 , H02K9/19 , H02K9/22 , H02K41/02 , H02K2201/18
Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.
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公开(公告)号:US09127359B2
公开(公告)日:2015-09-08
申请号:US13945710
申请日:2013-07-18
Applicant: CKD CORPORATION
Inventor: Masayuki Kouketsu , Hiroshi Itafuji
CPC classification number: C23C16/4482 , B01B1/00 , B01B1/005 , B01D1/14 , B01F3/022 , C23C14/24 , H01L21/67017
Abstract: A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.
Abstract translation: 液体蒸发器被配置为蒸发液体试剂并将气化液体试剂与气体介质混合。 液体蒸发器配备有具有混合气体发生空间的主蒸发器主体和设置在混合气体生成空间内的蒸发单元。 蒸发单元具有蒸发表面的蒸发单元主体和通过以网状形状规则地编织线形成为平面形状的网状体。 网状体形成由电线包围的多个网状空间,并且在面内方向规则地配置。 由于网状体和蒸发面彼此抵接,蒸发单元形成由线和蒸发表面包围的多个液体试剂供应空间。 液体试剂供给空间在网状体的面内方向上规则地配置。
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