公开(公告)号：US09439275B2

公开(公告)日：2016-09-06

申请号：US14590833

申请日：2015-01-06

Applicant: GIGAPHOTON INC.

Inventor： Masato Moriya ,  Osamu Wakabayashi

IPC: H05G2/00 ,  G01J1/42 ,  G01J1/04 ,  G01J9/00

CPC classification number: G01J1/4257 ,  G01J1/0429 ,  G01J1/429 ,  G01J1/44 ,  G01J9/00 ,  G03F7/70258 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A system for generating extreme ultraviolet light may include a chamber, a target supply device configured to supply a target material into the chamber, a laser apparatus configured to output a laser beam to irradiate the target material, a wavefront adjuster configured to adjust a wavefront of the laser beam, an imaging optical system configured to focus the laser beam reflected by the target material, an image detector configured to capture an image of the laser beam focused by the imaging optical system, and a controller configured to control the wavefront adjuster based on the captured image.

公开(公告)号：US09363878B2

公开(公告)日：2016-06-07

申请号：US14327401

申请日：2014-07-09

Applicant: GIGAPHOTON INC.

Inventor： Masato Moriya ,  Osamu Wakabayashi

IPC: H05G2/00 ,  H01S3/13 ,  H01S3/10 ,  H01S3/00 ,  G02B19/00 ,  B23K26/06 ,  G03F7/20 ,  H01S3/23

CPC classification number: H05G2/008 ,  B23K26/06 ,  G02B19/009 ,  G03F7/70033 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/2316

Abstract: A device is provided for controlling a laser beam. The device may include a first wavefront adjuster provided in a beam path of a laser beam outputted from a laser apparatus, a beam delivery unit provided in a beam path of the laser beam from the first wavefront adjuster, a second wavefront adjuster provided in a beam path of the laser beam from the beam delivery unit, a beam monitor provided in a beam path of the laser beam from the second wavefront adjuster, and a controller configured to control the first and second wavefront adjusters based on a detection result of the beam monitor. An extreme ultraviolet light apparatus including the device is also provided.

Abstract translation: 提供了一种用于控制激光束的装置。 该装置可以包括设置在从激光装置输出的激光束的光束路径中的第一波前调整器，设置在来自第一波前调整器的激光束的光束路径中的光束传递单元，设置在光束中的第二波前调整器 来自光束传送单元的激光束的路径，设置在来自第二波前调整器的激光束的光束路径中的光束监视器，以及控制器，被配置为基于光束监视器的检测结果来控制第一和第二波前调整器 。 还提供了包括该装置的极紫外光装置。

公开(公告)号：US08692220B2

公开(公告)日：2014-04-08

申请号：US13767789

申请日：2013-02-14

Applicant: Gigaphoton Inc.

Inventor： Masato Moriya ,  Osamu Wakabayashi

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01S3/0007 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/08095 ,  H01S3/1305 ,  H01S3/1307 ,  H01S3/2232 ,  H01S3/2308 ,  H01S3/2316 ,  H05G2/003

Abstract: A guide laser beam that has an optical axis and a beam diameter substantially equivalent to those of a driver pulsed laser beam is introduced into an amplification system that amplifies a laser beam that is output from a driver laser oscillator. The guide laser beam is output from a laser device as a continuous light, and is introduced into a light path of the driver pulsed laser beam via a guide laser beam introduction mirror. A sensor detects an angle (a direction) of a laser beam and a variation of a curvature of a wave front. A wave front correction controller outputs a signal to a wave front correction part based on a measured result of a sensor. The wave front correction part corrects a wave front of a laser beam to be a predetermined wave front according to an instruction from the wave front correction controller.

Abstract translation: 具有光轴和与驱动脉冲激光束的光束直径基本相同的光束直径的引导激光束被引入到放大从驱动激光振荡器输出的激光束的放大系统中。 引导激光束作为连续光从激光装置输出，并且通过引导激光束引入反射镜被引入到驱动脉冲激光束的光路中。 传感器检测激光束的角度（方向）和波前曲率的变化。 波前校正控制器基于传感器的测量结果向波前校正部输出信号。 波前校正部根据来自波前校正控制器的指示，将激光束的波前校正为规定的波前。