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公开(公告)号:US20220122935A1
公开(公告)日:2022-04-21
申请号:US17563995
申请日:2021-12-28
Applicant: Intel Corporation
Inventor: Kristof Darmawikarta , Sri Ranga Sai Boyapati , Hiroki Tanaka , Robert A. May
IPC: H01L23/00 , H01L21/48 , H01L23/538 , H01L23/498
Abstract: An apparatus, comprising a substrate comprising a dielectric, a conductor, comprising a via embedded within the dielectric, the via has a first end and a second end, and substantially vertical sidewalls between the first end and the second end, and a conductive structure extending laterally from the first end of the via over the dielectric, wherein the via and the conductive structure have a contiguous microstructure.
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公开(公告)号:US11264346B2
公开(公告)日:2022-03-01
申请号:US15857332
申请日:2017-12-28
Applicant: INTEL CORPORATION
Inventor: Kristof Darmawikarta , Sri Ranga Sai Boyapati , Hiroki Tanaka , Robert A. May
IPC: H01L23/00 , H01L21/48 , H01L23/538 , H01L23/498
Abstract: An apparatus, comprising a substrate comprising a dielectric, a conductor, comprising a via embedded within the dielectric, the via has a first end and a second end, and substantially vertical sidewalls between the first end and the second end, and a conductive structure extending laterally from the first end of the via over the dielectric, wherein the via and the conductive structure have a contiguous microstructure.
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公开(公告)号:US20200321281A1
公开(公告)日:2020-10-08
申请号:US16904363
申请日:2020-06-17
Applicant: Intel Corporation
Inventor: Aleksandar Aleksov , Adel A. Elsherbini , Kristof Darmawikarta , Robert A. May , Sri Ranga Sai Boyapati
IPC: H01L23/538 , H01L25/18 , H01L25/065 , H01L21/48 , H01L23/00 , H01L23/31 , H01L25/00 , H01L23/498
Abstract: An apparatus is provided which comprises: a plurality of first conductive contacts having a first pitch spacing on a substrate surface, a plurality of second conductive contacts having a second pitch spacing on the substrate surface, and a plurality of conductive interconnects disposed within the substrate to couple a first grouping of the plurality of second conductive contacts associated with a first die site with a first grouping of the plurality of second conductive contacts associated with a second die site and to couple a second grouping of the plurality of second conductive contacts associated with the first die site with a second grouping of the plurality of second conductive contacts associated with the second die site, wherein the conductive interconnects to couple the first groupings are present in a layer of the substrate above the conductive interconnects to couple the second groupings. Other embodiments are also disclosed and claimed.
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公开(公告)号:US10727185B2
公开(公告)日:2020-07-28
申请号:US16329644
申请日:2016-09-30
Applicant: Intel Corporation
Inventor: Aleksandar Aleksov , Adel A. Elsherbini , Kristof Darmawikarta , Robert A. May , Sri Ranga Sai Boyapati
IPC: H01L23/34 , H01L23/538 , H01L25/18 , H01L25/065 , H01L21/48 , H01L23/00 , H01L23/31 , H01L25/00 , H01L23/498 , H01L21/56
Abstract: An apparatus is provided which comprises: a plurality of first conductive contacts having a first pitch spacing on a substrate surface, a plurality of second conductive contacts having a second pitch spacing on the substrate surface, and a plurality of conductive interconnects disposed within the substrate to couple a first grouping of the plurality of second conductive contacts associated with a first die site with a first grouping of the plurality of second conductive contacts associated with a second die site and to couple a second grouping of the plurality of second conductive contacts associated with the first die site with a second grouping of the plurality of second conductive contacts associated with the second die site, wherein the conductive interconnects to couple the first groupings are present in a layer of the substrate above the conductive interconnects to couple the second groupings. Other embodiments are also disclosed and claimed.
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公开(公告)号:US20200176355A1
公开(公告)日:2020-06-04
申请号:US16209861
申请日:2018-12-04
Applicant: Intel Corporation
Inventor: Robert A. May , Kristof Darmawikarta , Rahul Jain , Lilia May , Maroun Moussallem , Prithwish Chatterjee
IPC: H01L23/473 , H01L23/373 , H05K7/20
Abstract: A semiconductor device package structure is provided, which includes a substrate, one or more dies coupled to the substrate, and a heat pipe device. In an example, the heat pipe device may include a conduit that is at least partially embedded within the substrate. The heat pipe device may have a first region coupled to the one or more dies. In an example, the conduit may include a first path for flow of vapor from the first region to an opposing second region. The conduit may further include a second path for flow of liquid from the second region to the first region.
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公开(公告)号:US10453812B2
公开(公告)日:2019-10-22
申请号:US15855961
申请日:2017-12-27
Applicant: Intel Corporation
Inventor: Hiroki Tanaka , Aleksandar Aleksov , Sri Ranga Sai Boyapati , Robert A. May , Kristof Darmawikarta
IPC: H01L23/00 , H01L23/485 , H01L21/027
Abstract: Techniques that can assist with fabricating a semiconductor package that includes a zero misalignment-via (ZMV) and/or a trace formed using a polarization process are described. The disclosed techniques can result in creation of ZMVs and/or traces between the ZMVs using a process comprising application of polarized light to one or more resist layers (e.g., a photoresist layer, etc.). One embodiment of a technique includes modulating an intensity of light applied to one or more resist layers by interaction of a light source with a photomask and at least one polarizer such that one or more patterns are created on the one or more resist layers. One embodiment of another technique includes creating patterns on one or more resist layers with different types of polarized light formed from a photomask and at least one polarizer. The disclosed techniques can assist with reducing manufacturing costs, reducing development time, and increasing I/O density.
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公开(公告)号:US20190304912A1
公开(公告)日:2019-10-03
申请号:US15937645
申请日:2018-03-27
Applicant: INTEL CORPORATION
Inventor: Jeremy D. Ecton , Hiroki Tanaka , Oscar Ojeda , Arnab Roy , Vahidreza Parichehreh , Leonel R. Arana , Chung Kwang Tan , Robert A. May
IPC: H01L23/538 , H01L21/48
Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.
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公开(公告)号:US10403564B2
公开(公告)日:2019-09-03
申请号:US15859332
申请日:2017-12-30
Applicant: Intel Corporation
Inventor: Aleksandar Aleksov , Hiroki Tanaka , Robert A. May , Kristof Darmawikarta , Changhua Liu , Chung Kwang Tan , Srinivas Pietambaram , Sri Ranga Sai Boyapati
IPC: H01L21/027 , H01L21/48 , H01L23/485 , H01L23/498 , H01L23/00
Abstract: Techniques that can assist with fabricating a package layer that includes a plurality of dual-damascene zero-misalignment-vias (dual-damascene ZMVs) and a trace between the dual-damascene ZMVs are described. The disclosed techniques allow for the dual-damascene ZMVs and their corresponding trace to be plated simultaneously in a single step or operation. As such, there is little or no misalignment between the dual-damascene ZMVs, the trace, and the metal pads connected to the ZMVs. In this way, one or more of the embodiments described herein can assist with reducing manufacturing costs, reducing development time of fabricating a package layer, and with increasing the I/O density in a semiconductor package.
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公开(公告)号:US20190198467A1
公开(公告)日:2019-06-27
申请号:US15855961
申请日:2017-12-27
Applicant: Intel Corporation
Inventor: Hiroki Tanaka , Aleksandar Aleksov , Sri Ranga Sai Boyapati , Robert A. May , Kristof Darmawikarta
IPC: H01L23/00 , H01L23/485 , H01L21/027
Abstract: Techniques that can assist with fabricating a semiconductor package that includes a zero misalignment-via (ZMV) and/or a trace formed using a polarization process are described. The disclosed techniques can result in creation of ZMVs and/or traces between the ZMVs using a process comprising application of polarized light to one or more resist layers (e.g., a photoresist layer, etc.). One embodiment of a technique includes modulating an intensity of light applied to one or more resist layers by interaction of a light source with a photomask and at least one polarizer such that one or more patterns are created on the one or more resist layers. One embodiment of another technique includes creating patterns on one or more resist layers with different types of polarized light formed from a photomask and at least one polarizer. The disclosed techniques can assist with reducing manufacturing costs, reducing development time, and increasing I/O density.
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30.
公开(公告)号:US12218071B2
公开(公告)日:2025-02-04
申请号:US18208785
申请日:2023-06-12
Applicant: Intel Corporation
Inventor: Srinivas V. Pietambaram , Sri Ranga Sai Boyapati , Robert A. May , Kristof Darmawikarta , Javier Soto Gonzalez , Kwangmo Lim
IPC: H01L23/538 , H01L23/00
Abstract: A foundation layer and methods of forming a conductive via are described. A die pad is formed over a die. A seed layer is deposited over the die pad and the foundation layer. A first photoresist layer is deposited over the seed layer, and the first layer is patterned to form a conductive line opening over the die pad. A conductive material is deposited into the conductive line opening to form a conductive line. A second photoresist layer is deposited over the first layer, and the second layer is patterned to form a via opening over the conductive line. The conductive material is deposited into the via opening to form the conductive via, where the conductive material only deposits on portions of exposed conductive line. The second and first layers are removed. Portions of exposed seed layer are recessed, and then a top surface of the conductive via is exposed.
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