公开(公告)号：US20230030211A1

公开(公告)日：2023-02-02

申请号：US17964520

申请日：2022-10-12

Applicant: InvenSense, Inc.

Inventor： Calin Miclaus ,  Chung-Hsien Lin ,  Jye Ren ,  Tim Piessens ,  Pei-Wen Yen ,  Manish Sharma-Kulamarva

IPC: G01L19/06 ,  G01L19/00 ,  G01L9/00 ,  G01N27/22 ,  G01N25/56 ,  G01N27/04

Abstract: A device includes a housing unit with an internal volume. The device further includes a sensor coupled to a substrate via an electrical coupling, wherein the sensor is disposed within the internal volume of the housing unit, and wherein the sensor is in communication with an external environment of the housing unit from a side other than a side associated with the substrate. The device also includes a moisture detection unit electrically coupled to the sensor, wherein the moisture detection unit comprises at least two looped wires forming electrodes, and wherein the moisture detection unit is configured to detect presence of a moisture within an interior environment of the housing unit by measuring a capacitance between the electrodes and by detecting a change between the measured capacitance and a capacitance between the electrodes in absence of moisture.

公开(公告)号：US10712218B2

公开(公告)日：2020-07-14

申请号：US16370752

申请日：2019-03-29

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Ming Lin

IPC: G01L9/00 ,  B81B3/00 ,  B81C1/00 ,  H01L29/84

Abstract: A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US09958349B2

公开(公告)日：2018-05-01

申请号：US15085592

申请日：2016-03-30

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC: G01L9/00 ,  B81C1/00 ,  H01L29/84

CPC classification number: G01L9/0042 ,  B81B3/0089 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81C1/00285 ,  G01L9/0045 ,  G01L9/0073 ,  H01L29/84

Abstract: A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.