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    LIGHT-BEAM SCANNING FOR LASER RADAR AND OTHER USES
    21.
    发明申请
    LIGHT-BEAM SCANNING FOR LASER RADAR AND OTHER USES 审中-公开
    用于激光雷达和其他用途的光束扫描

    公开(公告)号：US20130241762A1

    公开(公告)日：2013-09-19

    申请号：US13840686

    申请日：2013-03-15

    Applicant: NIKON CORPORATION

    Inventor： Daniel G. Smith ,  Alexander Cooper ,  Eric Peter Goodwin ,  Yuichi Takigawa ,  Alec Robertson

    IPC: G02B26/10 ,  G01S13/86 ,  G01B11/24 ,  G01C3/08

    CPC classification number: G02B26/10 ,  G01B11/24 ,  G01C3/08 ,  G01S7/4812 ,  G01S7/4817 ,  G01S13/865 ,  G01S17/42 ,  G02B5/122 ,  G02B26/103

    Abstract: A light beam is scanned, for use in laser radar and other uses, by an optical system of which an example includes a beam-shaping optical system that includes a first movable optical element and a second movable optical element. The first optical element forms and directs an optical beam along a nominal propagation axis from the beam-shaping optical system to a target, and the second optical element includes a respective actuator by which the second optical element is movable relative to the first optical element. A controller is coupled at least to the actuator of the second optical element and is configured to induce motion, by the actuator, of the second optical element to move the optical beam, as incident on the target, relative to the nominal propagation axis.

    Abstract translation: 通过光学系统扫描光束，用于激光雷达和其它用途，该系统的示例包括包括第一可移动光学元件和第二可移动光学元件的光束整形光学系统。 第一光学元件沿着标称传播轴从光束整形光学系统形成并引导光束到目标，并且第二光学元件包括相应致动器，第二光学元件可以通过该致动器相对于第一光学元件移动。 控制器至少耦合到第二光学元件的致动器，并且被配置为通过致动器引起第二光学元件的运动，以相对于标称传播轴线将入射到靶上的光束移动。

    Apparatus and method for improving contrast detected in a fringe projection autofocus system
    22.
    发明申请
    Apparatus and method for improving contrast detected in a fringe projection autofocus system 有权
    用于改善边缘投影自动对焦系统中检测到的对比度的装置和方法

    公开(公告)号：US20130188084A1

    公开(公告)日：2013-07-25

    申请号：US13746229

    申请日：2013-01-21

    Applicant: Nikon Corporation

    Inventor： Eric Peter Goodwin

    IPC: H04N5/225

    CPC classification number: H04N5/225 ,  H04N5/357

    Abstract: A method and apparatus are provided, for improving contrast detected in a fringe projection autofocus system that projects light from a substrate to a digital camera. The method and apparatus reduce the fill factor of the digital camera in a direction that improves the contrast at spatial frequencies near or above the Nyquist limit in that direction.

    Abstract translation: 提供了一种方法和装置，用于改善在从基板投射到数字照相机的边缘投射自动对焦系统中检测到的对比度。 该方法和装置在改善在该方向上奈奎斯特极限附近或更高的空间频率处的对比度的方向上减小数字照相机的填充因子。

    TEST OF OPERATIONAL STATUS OF A DIGITAL SCANNER DURING LITHOGRAPHIC EXPOSURE PROCESS
    27.
    发明申请
    TEST OF OPERATIONAL STATUS OF A DIGITAL SCANNER DURING LITHOGRAPHIC EXPOSURE PROCESS 审中-公开

    公开(公告)号：US20200096326A1

    公开(公告)日：2020-03-26

    申请号：US16675477

    申请日：2019-11-06

    Applicant: NIKON CORPORATION

    Inventor： Eric Peter Goodwin

    IPC: G01B11/24 ,  G01M11/02 ,  G03F7/20 ,  G01J9/02 ,  G01M11/00

    Abstract: System and method for monitoring of performance of a mirror array of a digital scanner with a use of light, illuminating the mirror array at grazing (off-axis) incidence, and an optical imaging system that includes a lateral shearing interferometer (operated in either static or a phase-shifting condition) during and without interrupting the process of exposure of the workpiece with the digital scanner, to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the deformation of a mirror element of the mirror array.

    Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same
    28.
    发明授权
    Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same 有权

    公开(公告)号：US10483107B2

    公开(公告)日：2019-11-19

    申请号：US15800480

    申请日：2017-11-01

    Applicant: NIKON CORPORATION

    Inventor： Eric Peter Goodwin

    IPC: H01L21/027 ,  G02B13/14 ,  G01D5/38 ,  G02B5/30 ,  G02B27/42

    Abstract: An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with prismatic elements made of optically anisotropic material to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of these sub-beams to interact with the wafer-stage diffraction grating at the same location upon the second pass by the grating as upon the first pass by the grating, thereby solving problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head.

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