公开(公告)号：US08073571B2

公开(公告)日：2011-12-06

申请号：US12108974

申请日：2008-04-24

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G05B21/00 ,  G05B19/18 ,  G01F17/00 ,  G01H1/00

CPC classification number: F16F15/02

Abstract: To achieve improved frequency-response correction of a vibration-signal transmitter in a vibration isolation system, the invention proposes a method in which an analog sensor signal representing vibrations is generated through the use of a vibration-signal transmitter, this sensor signal is amplified for correcting frequency-dependent sensitivity of the vibration-signal transmitter, an actuator control signal is generated by processing the amplified sensor signal, and an actuator is controlled with the actuator control signal for counteracting the vibrations, wherein the amplification of the sensor signal includes first amplification through the use of an analog amplification stage and second amplification through the use of a digital amplification stage. The invention further proposes a correction device and also a vibration isolation system for carrying out the method.

Abstract translation: 为了在振动隔离系统中实现振动信号发射机的改进的频率响应校正，本发明提出了一种通过使用振动信号发射器产生表示振动的模拟传感器信号的方法，该传感器信号被放大 校正振动信号发射器的频率相关灵敏度，通过处理放大的传感器信号来产生致动器控制信号，并且用致动器控制信号控制致动器以抵消振动，其中传感器信号的放大包括第一放大 通过使用模拟放大级和通过使用数字放大级的第二次放大。 本发明还提出了一种校正装置以及用于执行该方法的隔振系统。

公开(公告)号：US20090146352A1

公开(公告)日：2009-06-11

申请号：US12330192

申请日：2008-12-08

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: F16F15/023 ,  B65G53/46

CPC classification number: F16F9/04 ,  F16F2230/30

Abstract: The invention relates to a vibration isolator for use in a vacuum in which mechanical and electrical modules are arranged within a fluid-tight chamber.

Abstract translation: 本发明涉及一种用于真空中的隔振器，其中机械和电气模块布置在流体密封室内。

公开(公告)号：US07525314B1

公开(公告)日：2009-04-28

申请号：US09423180

申请日：1998-04-29

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G01V3/00

CPC classification number: H01J37/02 ,  G01R33/025 ,  G01R33/389

Abstract: A first sensor of the device for compensating magnetic and/or electromagnetic disturbance fields in a predetermined volume range is provided beyond the predetermined volume range for producing a signal that is determined by the magnetic and/or electromagnetic field at the location of the sensor. A second sensor is provided within the predetermined volume range for producing a signal which is determined by the magnetic and/or electromagnetic field at the location of the sensor. The signals from the first and second sensors are used as an input signal for directing a regulator amplifier belonging to a Helmholtz coil. After executing an empirically determined transmission function, the signal from the second sensor is applied to the regulator input of the digital regulator amplifier and the output signal of the digital regulator amplifier controls the current through the Helmholtz coil such that the magnetic and/or electromagnetic field in the predetermined volume range is at least partially compensated.

Abstract translation: 提供超过预定体积范围的用于补偿预定体积范围内的磁场和/或电磁干扰场的装置的第一传感器，用于产生由传感器位置处的磁场和/或电磁场确定的信号。 在预定体积范围内提供第二传感器，用于产生由传感器位置处的磁场和/或电磁场确定的信号。 来自第一和第二传感器的信号用作用于引导属于亥姆霍兹线圈的调节放大器的输入信号。 在执行经验确定的传输功能之后，来自第二传感器的信号被施加到数字调节器放大器的调节器输入端，并且数字调节器放大器的输出信号控制通过亥姆霍兹线圈的电流，使得磁场和/或电磁场 在预定体积范围内至少部分地被补偿。

公开(公告)号：US20070235276A1

公开(公告)日：2007-10-11

申请号：US11697292

申请日：2007-04-05

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: F16F7/10

CPC classification number: G05D19/02 ,  F16F15/02

Abstract: The invention relates to an active vibration isolation system which detects structural vibration of the mass to be isolated via a sensor and also takes account of these disturbance variables.

Abstract translation: 本发明涉及一种通过传感器检测待隔离物质的结构振动的主动隔振系统，并且还考虑了这些干扰变量。

公开(公告)号：US20050129496A1

公开(公告)日：2005-06-16

申请号：US10810361

申请日：2004-03-26

Applicant: Peter Heiland ,  Ralf Tillmann

Inventor： Peter Heiland ,  Ralf Tillmann

IPC: B25J15/08 ,  B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B65F3/02

CPC classification number: H01L21/68707 ,  Y10S414/141

Abstract: An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.

Abstract translation: 提供一种用于接收和传送至少一个盘状构件的装置。 该装置包括拾取和放置机构，包括夹持装置。 实际上，该机构适于提供拾取和/或放置循环，其在操作期间提供所述夹持装置在上下位置之间的运动，反之亦然，由此，在向下位置，所述夹持装置 从装载位置拾取盘状构件，或将盘状构件放置在装载位置上。

公开(公告)号：US06816800B2

公开(公告)日：2004-11-09

申请号：US10211752

申请日：2002-08-02

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G06F1900

CPC classification number: F16F15/02

Abstract: In relation to a vibration isolation system, which comprises at least one vibration isolation device that can be assigned to an isolation element, the fact that a method of recording the system with the aid of a closed-loop and/or open-loop control device is provided, in which a closed-loop and/or open-loop control structure can be predefined and in which signals and/or variables related to the isolation system are picked up, processed and/or provided, and in which, on the basis of the definable structures and variables, at least one isolation system characteristic data set for assessing the vibration isolation system is formed, means that for the first time the indicative fundamentals for an open system for evaluation, closed-loop and open-loop control are provided.

公开(公告)号：US06308557B1

公开(公告)日：2001-10-30

申请号：US09209057

申请日：1998-12-09

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G01D328

CPC classification number: G01Q10/06 ,  G01Q30/18 ,  G01Q70/04 ,  H01J2237/0216 ,  Y10S977/851

Abstract: A device which scans in a raster mode, in particular to a raster microscope, provides a rapid and inexpensive compensation of the disturbing effects of mechanical vibrations on the scanning process. The device includes a sensor for sensing mechanical vibrations and driving a filter whose output, together with the output of the device for the production of a z-signal, is connected to an adder, the output of which drives the device for changing the distance between the specimen and the sensor.

Abstract translation: 以光栅模式扫描的装置，特别是光栅显微镜，可以快速而廉价地补偿机械振动对扫描过程的干扰作用。 该装置包括用于感测机械振动和驱动滤波器的传感器，其输出与用于产生z信号的装置的输出连接到加法器，加法器的输出驱动装置，以改变 样品和传感器。

公开(公告)号：US08682609B2

公开(公告)日：2014-03-25

申请号：US12879472

申请日：2010-09-10

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G01C9/00

CPC classification number: F16F15/027

Abstract: The present invention relates to a method for regulating an active vibration isolation system and to an active vibration isolation system, in particular for a vibration isolated positioning of lithography-devices, wafer-handling-systems and/or microscopes, as for instance scanning microscopes. The active vibration isolation system comprises the following components: a support body for bearing a load which is to be isolated; pneumatic vibration isolators with controllable valves for carrying the support body with respect to the ground; position sensors for providing vertical position signals of the support body; a first regulating system for vibration compensation in at least one degree of freedom in translation (Xt,Yt,Zt) and in at least one degree of freedom in rotation (Xr,Yr,Zr) and a second pneumatic regulating system for vibration compensation in at least one degree of freedom selected from three degrees of freedom (Zt,Xr,Yr) which are effective in vertical direction.

Abstract translation: 本发明涉及一种用于调节主动隔振系统和主动隔振系统的方法，特别是用于光刻设备，晶片处理系统和/或显微镜的振动隔离定位，例如扫描显微镜。 主动隔振系统包括以下部件：用于承受要被隔离的负载的支撑体; 具有可控阀的气动隔振器，用于相对于地面承载支撑体; 位置传感器，用于提供支撑体的垂直位置信号; 在至少一个自由度（Xt，Yt，Zt）和至少一个旋转自由度（Xr，Yr，Zr）中的振动补偿的第一调节系统和用于振动补偿的第二气动调节系统 选自在垂直方向上有效的三个自由度（Zt，Xr，Yr）的至少一个自由度。

公开(公告)号：US08256735B2

公开(公告)日：2012-09-04

申请号：US11457582

申请日：2006-07-14

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: F16M1/00

CPC classification number: F16F15/04 ,  F16F15/0275 ,  G03F7/70716 ,  G03F7/709

Abstract: The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.

Abstract translation: 本发明特别地涉及一种用于相对于基座的相对承载负载的支撑装置，该基座包括负载侧部分，基部侧部分和向负载侧部分提供支撑的中间部分，并且因此限定了支撑方向 基座和负载侧，包括由室壁限定的压力室。

公开(公告)号：US07859259B2

公开(公告)日：2010-12-28

申请号：US11770948

申请日：2007-06-29

Applicant: Peter Heiland

Inventor： Peter Heiland

IPC: G01R33/04

CPC classification number: G01R33/02

Abstract: The invention relates to a device for compensating for magnetic fields which has two sensors which are active in different frequency ranges and thus allows regulation with a bandwidth from 0 to 20 kHz.

Abstract translation: 本发明涉及一种用于补偿磁场的装置，该装置具有两个在不同频率范围内有效的传感器，从而允许以0至20kHz的带宽进行调节。