公开(公告)号：US20110290021A1

公开(公告)日：2011-12-01

申请号：US13112551

申请日：2011-05-20

Applicant: Robert D. Horning ,  Burgess R. Johnson ,  Robert Compton ,  Eugen Cabuz

Inventor： Robert D. Horning ,  Burgess R. Johnson ,  Robert Compton ,  Eugen Cabuz

IPC: G01C19/56 ,  H05K13/00

CPC classification number: G01C25/00 ,  G01C19/5691 ,  H03H9/2405 ,  Y10T29/49002 ,  Y10T29/49117

Abstract: One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.

Abstract translation: 一个示例性实施例涉及具有具有顶表面的基板的振动结构陀螺仪。 振动结构陀螺仪还可以包括具有椭圆形形状的谐振器，谐振器包括杆和围绕杆的外唇缘，杆附接到基底的顶表面和与顶表面分开的外唇以允许 谐振器振动。

公开(公告)号：US20110242638A1

公开(公告)日：2011-10-06

申请号：US12750383

申请日：2010-03-30

Applicant: Robert D. Horning ,  Robert Compton

Inventor： Robert D. Horning ,  Robert Compton

IPC: G02F1/03 ,  G02B26/00

CPC classification number: B82Y20/00 ,  G02B1/005 ,  G02F1/0131 ,  G02F2202/32

Abstract: Photonic structures and photonic devices are provided. A photonic structure includes a three-dimensional photonic crystal and an actuator. The three-dimensional photonic crystal comprises an elastomeric, auxetic material and configured to provide a predetermined optical bandgap. The actuator is coupled to the three-dimensional photonic crystal and is configured to compress the three-dimensional photonic crystal. When the actuator compresses the three-dimensional photonic crystal, the three-dimensional photonic crystal shifts from reflecting light in a first wavelength range to light in a second wavelength range.

Abstract translation: 提供光子结构和光子器件。 光子结构包括三维光子晶体和致动器。 三维光子晶体包括弹性材料，并且被配置为提供预定的光学带隙。 致动器耦合到三维光子晶体并被配置为压缩三维光子晶体。 当致动器压缩三维光子晶体时，三维光子晶体从第一波长范围内的反射光移动到第二波长范围内的光。

公开(公告)号：US08018229B1

公开(公告)日：2011-09-13

申请号：US12765040

申请日：2010-04-22

Applicant: Robert D. Horning ,  Jeff A. Ridley ,  Bharat Pant

Inventor： Robert D. Horning ,  Jeff A. Ridley ,  Bharat Pant

IPC: G01R33/02

CPC classification number: G01R33/0206 ,  B82Y25/00 ,  G01R33/0052 ,  G01R33/093 ,  H01L27/22 ,  H01L43/12

Abstract: A method of fabricating a multi-axis sensor is provided. The method includes forming patterns of sacrificial material overlaying a substrate and overlaying a flexible material on the sacrificial material and an anchor-surface of the substrate. The flexible material includes sensor-regions, an anchor-region, and at least one hinge-region. The method further includes forming sensor elements from orientable sensor material overlaying respective sensor-regions of the flexible material; forming at least one respective anchor-hinge in the flexible material along the boundary between the anchor-region and an adjacent sensor region; forming the sensor-regions, the anchor-region, and the at least one hinge-region in the flexible material; training the sensor elements to form respective oriented-sensor elements that are oriented in the same direction; etching the sacrificial material; and etching the substrate at an angle from the anchor-surface.

Abstract translation: 提供一种制造多轴传感器的方法。 该方法包括形成覆盖衬底的牺牲材料的图案，并将牺牲材料上的柔性材料和衬底的锚表面重叠。 柔性材料包括传感器区域，锚定区域和至少一个铰链区域。 该方法还包括从覆盖柔性材料的相应传感器区域的可定向传感器材料形成传感器元件; 在所述锚定区域和相邻的传感器区域之间的边界处在柔性材料中形成至少一个相应的锚定铰链; 在所述柔性材料中形成所述传感器区域，所述锚固区域和所述至少一个铰链区域; 训练传感器元件以形成朝向相同方向的相应定向传感器元件; 蚀刻牺牲材料; 并且从锚表面以一定角度蚀刻衬底。

公开(公告)号：US07943874B2

公开(公告)日：2011-05-17

申请号：US12019363

申请日：2008-01-24

Applicant: Robert D. Horning ,  Ryan Supino ,  Alan B. Touchberry

Inventor： Robert D. Horning ,  Ryan Supino ,  Alan B. Touchberry

IPC: H01H3/14 ,  H01H3/02 ,  H01H35/00

CPC classification number: G01C22/006 ,  G01C21/16 ,  Y10S2/905

Abstract: A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.

Abstract translation: 地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。 惯性测量单元可耦合到第一物体。 一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。 一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。

公开(公告)号：US20100220291A1

公开(公告)日：2010-09-02

申请号：US12710941

申请日：2010-02-23

Applicant: Robert D. Horning ,  Thomas Ohnstein ,  Bernard Fritz

Inventor： Robert D. Horning ,  Thomas Ohnstein ,  Bernard Fritz

IPC: A61B3/113

CPC classification number: G06F3/013 ,  A61B3/113 ,  G02B27/017 ,  G02B2027/0138 ,  G02B2027/0187 ,  G06K9/00604

Abstract: An eye tracking system includes a transparent lens, at least one light source, and a plurality of light detectors. The transparent lens is adapted for disposal adjacent an eye. The at least one light source is disposed within the transparent lens and is configured to emit light toward the eye. The at least one light source is transparent to visible light. The plurality of light detectors is disposed within the transparent lens and is configured to receive light that is emitted from the at least one light source and is reflected off of the eye. Each of the light detectors is transparent to visible light and is configured, upon receipt of light that is reflected off of the eye, to supply an output signal.

Abstract translation: 眼睛跟踪系统包括透明透镜，至少一个光源和多个光检测器。 该透明透镜适于邻近眼睛处理。 所述至少一个光源设置在所述透明透镜内并且被配置为朝向所述眼睛发光。 至少一个光源对可见光是透明的。 多个光检测器设置在透明透镜内并且被配置为接收从至少一个光源发射并从眼睛反射的光。 每个光检测器对可见光是透明的，并且在接收到从眼睛反射的光时被配置以提供输出信号。

公开(公告)号：US07691723B2

公开(公告)日：2010-04-06

申请号：US11031276

申请日：2005-01-07

Applicant: Robert D. Horning

Inventor： Robert D. Horning

IPC: H01L21/30

CPC classification number: B81C3/001 ,  B81C2203/031

Abstract: An approach where items of different temperatures are bonded to each other such that upon cooling down they contract in size resulting in zero residual stress between the bonded items at an ambient temperature. If materials of the bonded items have different thermal expansion coefficients and the items are put together at different bonding temperatures, then they may have insignificant residual stress upon cooling down to the ambient temperature (e.g., room temperature) because the different ranges of the temperature drops compensate for the different contractions.

Abstract translation: 一种将不同温度的物品彼此粘合的方法，使得在冷却时，它们的尺寸收缩，导致在环境温度下粘结物品之间的零残余应力。 如果粘合物料的材料具有不同的热膨胀系数，并且在不同的接合温度下将物品放在一起，则在冷却到环境温度（例如室温）时它们可能具有不显着的残余应力，因为温度的不同范围下降 补偿不同的收缩。

公开(公告)号：US20090071805A1

公开(公告)日：2009-03-19

申请号：US12019363

申请日：2008-01-24

Applicant: Robert D. Horning ,  Ryan Supino ,  Alan B. Touchberry

Inventor： Robert D. Horning ,  Ryan Supino ,  Alan B. Touchberry

IPC: H01H35/14

CPC classification number: G01C22/006 ,  G01C21/16 ,  Y10S2/905

Abstract: A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.

Abstract translation: 地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。 惯性测量单元可耦合到第一物体。 一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。 一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。

公开(公告)号：US06888233B2

公开(公告)日：2005-05-03

申请号：US10385181

申请日：2003-03-10

Applicant: Robert D. Horning ,  Jeffrey A. Ridley

Inventor： Robert D. Horning ,  Jeffrey A. Ridley

IPC: B81B7/00 ,  H01L21/00

CPC classification number: B81C1/00301 ,  B81B2207/097

Abstract: A method for providing conductive paths into a hermetically sealed cavity is described. The sealed cavity is formed utilizing a silicon-glass micro-electromechanical structure (MEMS) process and the method includes forming recesses on a glass substrate everywhere that a conductive path is to pass into the cavity, and forming conductive leads in and around the recesses. A glass layer is deposited over the substrate, into the recesses, and over the conductive leads and then planarized to expose portions of the conductive leads. A sealing surface is formed on at least a portion of the glass layer. Silicon is then bonded to the sealing surface of the planarized glass layer, the wafer being configured such that a portion of each lead is within the sealed cavity and a portion of each lead is outside the sealed cavity.

Abstract translation: 描述了一种用于向密封腔体提供导电路径的方法。 利用硅玻璃微机电结构（MEMS）工艺形成密封空腔，该方法包括在导电通路进入空腔的各处，在玻璃基板上形成凹槽，并在凹槽内和周围形成导电引线。 玻璃层沉积在衬底上，进入凹槽中，并在导电引线上方，然后平坦化以暴露部分导电引线。 密封面形成在玻璃层的至少一部分上。 然后将硅结合到平坦化玻璃层的密封表面，晶片被构造成使得每个引线的一部分在密封空腔内并且每个引线的一部分在密封空腔的外部。

公开(公告)号：US06184608B2

公开(公告)日：2001-02-06

申请号：US09223368

申请日：1998-12-29

Applicant: Cleopatra Cabuz ,  Robert D. Horning ,  William R. Herb

Inventor： Cleopatra Cabuz ,  Robert D. Horning ,  William R. Herb

IPC: H02N100

CPC classification number: H02N1/006 ,  Y10T29/42

Abstract: A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 &mgr;m to about 100 &mgr;m thick and the cells preferably have an individual displacement of from about 5 &mgr;m to about 200 &mgr;m.

公开(公告)号：US08887550B2

公开(公告)日：2014-11-18

申请号：US13345132

申请日：2012-01-06

Applicant: Ryan Supino ,  Eugen Cabuz ,  Burgess R. Johnson ,  Robert D. Horning

Inventor： Ryan Supino ,  Eugen Cabuz ,  Burgess R. Johnson ,  Robert D. Horning

IPC: G01P21/00 ,  G01D5/34

CPC classification number: B81C1/00134 ,  B81B2201/03 ,  B81C2203/03 ,  G01D5/34 ,  G01P21/00 ,  Y10T29/49002

Abstract: Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Abstract translation: 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。