公开(公告)号：US20240105630A1

公开(公告)日：2024-03-28

申请号：US17936037

申请日：2022-09-28

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Linda Pei Ee Chua ,  Ching Meng Fang ,  Hin Hwa Goh

IPC: H01L23/538 ,  H01L21/48 ,  H01L21/56 ,  H01L23/00 ,  H01L23/31 ,  H01L23/498 ,  H01L23/552 ,  H01L25/16

CPC classification number: H01L23/5385 ,  H01L21/4853 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/561 ,  H01L21/565 ,  H01L21/568 ,  H01L23/3135 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49833 ,  H01L23/49838 ,  H01L23/5386 ,  H01L23/552 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L24/96 ,  H01L24/97 ,  H01L25/162 ,  H01L25/165 ,  H01L21/563 ,  H01L24/81 ,  H01L2224/16227 ,  H01L2224/16238 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73204 ,  H01L2224/81203 ,  H01L2224/95001 ,  H01L2924/182 ,  H01L2924/3511 ,  H01L2924/3512 ,  H01L2924/37001

Abstract: A semiconductor device has a first RDL substrate with first conductive pillars formed over a first surface of the first RDL substrate. A first electrical component is disposed over the first surface of the first RDL substrate. A hybrid substrate is bonded to the first RDL substrate. An encapsulant is deposited around the hybrid substrate and first RDL substrate with the first conductive pillars and first electrical component embedded within the encapsulant. A second RDL substrate with second conductive pillars formed over the second RDL substrate and second electrical component disposed over the second RDL substrate can be bonded to the hybrid substrate. A second RDL can be formed over a second surface of the first RDL substrate. A third electrical component is disposed over a second surface of the first RDL substrate. A shielding frame is disposed over the third electrical component.

公开(公告)号：US20240071885A1

公开(公告)日：2024-02-29

申请号：US17823827

申请日：2022-08-31

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Linda Pei Ee Chua ,  Jian Zuo ,  Hin Hwa Goh

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/00 ,  H01L25/16

CPC classification number: H01L23/49833 ,  H01L21/4857 ,  H01L21/486 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49838 ,  H01L23/49894 ,  H01L24/16 ,  H01L25/16 ,  H01L2224/16227 ,  H01L2224/16238 ,  H01L2924/3511

Abstract: A semiconductor device has a first hybrid substrate with a first thickness, and a second hybrid substrate with a second thickness different from the first thickness of the first hybrid substrate. An encapsulant is deposited around the first hybrid substrate and second hybrid substrate. A portion of the first hybrid substrate and a portion of the second hybrid substrate and a portion of the encapsulant can be removed after encapsulation to achieve uniform thickness for the first hybrid substate and second hybrid substrate. The first hybrid substrate has an embedded substrate, a first interconnect structure formed over a first surface of the embedded substrate, and a second interconnect structure formed over a second surface of the embedded substrate opposite the first surface of the embedded substrate. A plurality of conductive pillars is formed over the first interconnect structure. A plurality of conductive vias is formed through the embedded substrate.

公开(公告)号：US20230096463A1

公开(公告)日：2023-03-30

申请号：US18060115

申请日：2022-11-30

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Kang Chen

IPC: H01L21/66 ,  H01L23/00 ,  H01L23/538 ,  H01L21/56 ,  H01L21/48 ,  H01L23/498 ,  H01L23/31 ,  H01L21/78 ,  H01L23/28 ,  H01L25/10

Abstract: A semiconductor device has a substrate with first and second conductive layers formed over first and second opposing surfaces of the substrate. A plurality of bumps is formed over the substrate. A semiconductor die is mounted to the substrate between the bumps. An encapsulant is deposited over the substrate and semiconductor die. A portion of the bumps extends out from the encapsulant. A portion of the encapsulant is removed to expose the substrate. An interconnect structure is formed over the encapsulant and semiconductor die and electrically coupled to the bumps. A portion of the substrate can be removed to expose the first or second conductive layer. A portion of the substrate can be removed to expose the bumps. The substrate can be removed and a protection layer formed over the encapsulant and semiconductor die. A semiconductor package is disposed over the substrate and electrically connected to the substrate.

公开(公告)号：US11488838B2

公开(公告)日：2022-11-01

申请号：US16918643

申请日：2020-07-01

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Xu Sheng Bao ,  Kang Chen

IPC: H01L21/48 ,  H01L23/00 ,  H01L23/498 ,  H01L23/538 ,  H01L21/56

Abstract: A semiconductor device has a first conductive layer and a semiconductor die disposed adjacent to the first conductive layer. An encapsulant is deposited over the first conductive layer and semiconductor die. An insulating layer is formed over the encapsulant, semiconductor die, and first conductive layer. A second conductive layer is formed over the insulating layer. A first portion of the first conductive layer is electrically connected to VSS and forms a ground plane. A second portion of the first conductive layer is electrically connected to VDD and forms a power plane. The first conductive layer, insulating layer, and second conductive layer constitute a decoupling capacitor. A microstrip line including a trace of the second conductive layer is formed over the insulating layer and first conductive layer. The first conductive layer is provided on an embedded dummy die, interconnect unit, or modular PCB unit.

公开(公告)号：US11011423B2

公开(公告)日：2021-05-18

申请号：US16204737

申请日：2018-11-29

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Thomas J. Strothmann ,  Damien M. Pricolo ,  Il Kwon Shim ,  Yaojian Lin ,  Heinz-Peter Wirtz ,  Seung Wook Yoon ,  Pandi C. Marimuthu

IPC: H01L23/522 ,  H01L21/78 ,  H01L23/28 ,  H01L23/31 ,  H01L21/56 ,  H01L23/00 ,  H01L23/498 ,  H01L21/683

Abstract: A semiconductor device has a carrier with a fixed size. A plurality of first semiconductor die is singulated from a first semiconductor wafer. The first semiconductor die are disposed over the carrier. The number of first semiconductor die on the carrier is independent from the size and number of first semiconductor die singulated from the first semiconductor wafer. An encapsulant is deposited over and around the first semiconductor die and carrier to form a reconstituted panel. An interconnect structure is formed over the reconstituted panel while leaving the encapsulant devoid of the interconnect structure. The reconstituted panel is singulated through the encapsulant. The first semiconductor die are removed from the carrier. A second semiconductor die with a size different from the size of the first semiconductor die is disposed over the carrier. The fixed size of the carrier is independent of a size of the second semiconductor die.

公开(公告)号：US10804153B2

公开(公告)日：2020-10-13

申请号：US15169095

申请日：2016-05-31

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Seng Guan Chow

IPC: H01L21/78 ,  H01L23/00 ,  H01L23/498 ,  H01L21/48 ,  H01L23/538 ,  H01L23/31 ,  H01L21/66 ,  H01L21/56

Abstract: A semiconductor device has a semiconductor die. A first insulating layer is disposed over the semiconductor die. A first via is formed in the first insulating layer over a contact pad of the semiconductor die. A first conductive layer is disposed over the first insulating layer and in the first via. A second insulating layer is disposed over a portion of the first insulating layer and first conductive layer. An island of the second insulating layer is formed over the first conductive layer and within the first via. The first conductive layer adjacent to the island is devoid of the second insulating layer. A second conductive layer is disposed over the first conductive layer, second insulating layer, and island. The second conductive layer has a corrugated structure. A width of the island is greater than a width of the first via.

公开(公告)号：US10741416B2

公开(公告)日：2020-08-11

申请号：US15605010

申请日：2017-05-25

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Xu Sheng Bao ,  Kang Chen

IPC: H01L21/48 ,  H01L23/00 ,  H01L23/498 ,  H01L23/538 ,  H01L21/56

Abstract: A semiconductor device has a first conductive layer and a semiconductor die disposed adjacent to the first conductive layer. An encapsulant is deposited over the first conductive layer and semiconductor die. An insulating layer is formed over the encapsulant, semiconductor die, and first conductive layer. A second conductive layer is formed over the insulating layer. A first portion of the first conductive layer is electrically connected to VSS and forms a ground plane. A second portion of the first conductive layer is electrically connected to VDD and forms a power plane. The first conductive layer, insulating layer, and second conductive layer constitute a decoupling capacitor. A microstrip line including a trace of the second conductive layer is formed over the insulating layer and first conductive layer. The first conductive layer is provided on an embedded dummy die, interconnect unit, or modular PCB unit.

公开(公告)号：US10242887B2

公开(公告)日：2019-03-26

申请号：US15674247

申请日：2017-08-10

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin

IPC: H01L21/56 ,  H01L23/00 ,  H01L23/31

Abstract: A semiconductor device includes a carrier and a plurality of semiconductor die disposed over the carrier. An encapsulant is deposited over the semiconductor die. A composite layer is formed over the encapsulant to form a panel. The carrier is removed. A conductive layer is formed over the panel. An insulating layer is formed over the conductive layer. The carrier includes a glass layer, a second composite layer formed over the glass layer, and an interface layer formed over the glass layer. The composite layer and encapsulant are selected to tune a coefficient of thermal expansion of the panel. The panel includes panel blocks comprising an opening separating the panel blocks. The encapsulant or insulating material is deposited in the opening. A plurality of support members are disposed around the panel blocks. An interconnect structure is formed over the conductive layer.

公开(公告)号：US20190088603A1

公开(公告)日：2019-03-21

申请号：US16184134

申请日：2018-11-08

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Pandi Chelvam Marimuthu ,  Andy Chang Bum Yong ,  Aung Kyaw Oo ,  Yaojian Lin

IPC: H01L23/66 ,  H01L23/00 ,  H01L23/498 ,  H01L21/56 ,  H01L23/522 ,  H01L23/552 ,  H01L23/538 ,  H01L21/48 ,  H01L23/528

Abstract: A semiconductor device has a semiconductor die and an encapsulant deposited over the semiconductor die. A first conductive layer is formed with an antenna over a first surface of the encapsulant. A second conductive layer is formed with a ground plane over a second surface of the encapsulant with the antenna located within a footprint of the ground plane. A conductive bump is formed on the ground plane. A third conductive layer is formed over the first surface of the encapsulant. A fourth conductive layer is formed over the second surface of the encapsulant. A conductive via is disposed adjacent to the semiconductor die prior to depositing the encapsulant. The antenna is coupled to the semiconductor die through the conductive via. The antenna is formed with the conductive via between the antenna and semiconductor die. A PCB unit is disposed in the encapsulant.

公开(公告)号：US20190047845A1

公开(公告)日：2019-02-14

申请号：US16169817

申请日：2018-10-24

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： Yaojian Lin ,  Won Kyoung Choi ,  Kang Chen ,  Ivan Micallef

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81B2207/092 ,  B81B2207/098 ,  B81C1/0023 ,  B81C1/00301 ,  B81C1/00904 ,  B81C2203/0792 ,  H01L21/561 ,  H01L21/568 ,  H01L23/5389 ,  H01L23/552 ,  H01L24/16 ,  H01L24/19 ,  H01L24/81 ,  H01L24/96 ,  H01L24/97 ,  H01L25/105 ,  H01L25/50 ,  H01L2224/03 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/131 ,  H01L2224/16227 ,  H01L2224/16237 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48235 ,  H01L2224/73265 ,  H01L2224/73267 ,  H01L2224/81005 ,  H01L2224/81191 ,  H01L2224/81815 ,  H01L2224/83 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2924/00012 ,  H01L2924/13091 ,  H01L2924/15 ,  H01L2924/15311 ,  H01L2924/16251 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/3511 ,  H01L2224/11 ,  H01L2224/81 ,  H01L2224/85 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/014

Abstract: A semiconductor device has a first semiconductor die and a modular interconnect structure adjacent to the first semiconductor die. An encapsulant is deposited over the first semiconductor die and modular interconnect structure as a reconstituted panel. An interconnect structure is formed over the first semiconductor die and modular interconnect structure. An active area of the first semiconductor die remains devoid of the interconnect structure. A second semiconductor die is mounted over the first semiconductor die with an active surface of the second semiconductor die oriented toward an active surface of the first semiconductor die. The reconstituted panel is singulated before or after mounting the second semiconductor die. The first or second semiconductor die includes a microelectromechanical system (MEMS). The second semiconductor die includes an encapsulant and an interconnect structure formed over the second semiconductor die. Alternatively, the second semiconductor die is mounted to an interposer disposed over the interconnect structure.