Method of forming a wiring and method of manufacturing a semiconductor device using the same

    公开(公告)号:US12193210B2

    公开(公告)日:2025-01-07

    申请号:US17719622

    申请日:2022-04-13

    Abstract: In a method of forming a wiring, an insulating interlayer including a low-k dielectric material is formed on a substrate. A first etching mask is formed on the insulating interlayer. A first etching process is performed using the first etching mask to form a first opening through the insulating interlayer. The first etching mask is removed. A protection pattern is formed on a bottom and a side of the first opening. A second etching mask is formed on the protection pattern and the insulating interlayer. A second etching process is performed using a second etching mask to form a second opening through the insulating interlayer. The second etching mask is removed. The protection pattern is removed. A wiring is formed in each of the first and second openings.

    Electronic device for recognizing SIM card and operation method thereof

    公开(公告)号:US10932125B2

    公开(公告)日:2021-02-23

    申请号:US16620993

    申请日:2018-06-18

    Abstract: Various embodiments of the present invention relate to an electronic device for recognizing a SIM card. The electronic device may comprise: a display; a SIM card including at least one subscriber identification module; a processor electrically connected to the display and the SIM card; and a memory electrically connected to the processor, wherein in the memory stores instructions which, when executed, cause the processor to: identify whether a SIM lock is activated or not, on the basis of the at least one subscriber identification module included in the SIM card; and when it is identified that at least one subscriber identification module, the SIM lock of which has been deactivated, display a screen corresponding to the subscriber identification module, the SIM lock of which has been deactivated. Another embodiment is possible.

    Method of fabricating semiconductor device

    公开(公告)号:US10522366B2

    公开(公告)日:2019-12-31

    申请号:US16132895

    申请日:2018-09-17

    Abstract: Disclosed is a method of fabricating a semiconductor device. The method includes forming a lower layer on a substrate, forming on the lower layer a sacrificial layer and an etching pattern, forming a first spacer layer on the sacrificial layer and the etching pattern, etching the sacrificial layer and the first spacer layer to form a sacrificial pattern and a first spacer on at least a portion of a top surface of the sacrificial pattern, forming a second spacer layer on the sacrificial pattern and the first spacer, etching the second spacer layer and the first spacer to form a second spacer on a sidewall of the sacrificial pattern, and partially etching the lower layer to form a pattern. The second spacer is used as an etching mask to partially etch the lower layer.

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