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21.
公开(公告)号:US12193210B2
公开(公告)日:2025-01-07
申请号:US17719622
申请日:2022-04-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyunchul Lee , Kijeong Kim , Jongcheon Kim , Donghwi Shin , Hyunsil Hong
IPC: H10B12/00 , H01L21/027 , H01L21/311
Abstract: In a method of forming a wiring, an insulating interlayer including a low-k dielectric material is formed on a substrate. A first etching mask is formed on the insulating interlayer. A first etching process is performed using the first etching mask to form a first opening through the insulating interlayer. The first etching mask is removed. A protection pattern is formed on a bottom and a side of the first opening. A second etching mask is formed on the protection pattern and the insulating interlayer. A second etching process is performed using a second etching mask to form a second opening through the insulating interlayer. The second etching mask is removed. The protection pattern is removed. A wiring is formed in each of the first and second openings.
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公开(公告)号:US20240063024A1
公开(公告)日:2024-02-22
申请号:US18497172
申请日:2023-10-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sanggyo Chung , Jiseung Lee , Kyoungha Eom , Hyunchul Lee
IPC: H01L21/308 , C23C16/455 , C23C16/56 , C23C16/40 , H01L21/3065 , H10B12/00
CPC classification number: H01L21/3088 , C23C16/45525 , C23C16/56 , C23C16/401 , H01L21/3065 , H01L21/3081 , H01L21/3086 , H01L21/3085 , H10B12/34 , H10B12/053 , H10B12/315 , H10B12/0335 , H10B12/482
Abstract: In a method of cutting a fine pattern, a line structure is formed on a substrate. The line structure extends in a first direction, and includes a pattern and a first mask. The pattern and the first mask include different materials. A sacrificial layer is formed on the substrate to cover the line structure. The sacrificial layer is partially etched to form a first opening partially overlapping the line structure in a vertical direction. A portion of the first mask, an upper portion of the pattern and/or a portion of the sacrificial layer under the first opening are partially etched using an etching gas having no etching selectivity among the pattern, the first mask and the sacrificial layer. A lower portion of the pattern under the upper portion thereof is removed to divide the pattern into a plurality of pieces spaced apart from each other in the first direction.
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公开(公告)号:US11245130B2
公开(公告)日:2022-02-08
申请号:US16517302
申请日:2019-07-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyeokjo Gwon , Jinkyu Kang , Kitae Park , Hyunchul Lee , Ryounghee Kim , Euncheol Do , Soojin Park , Sangmin Ji
IPC: H01M10/052 , H01M10/0567 , H01M50/44 , H01M50/46 , H01M50/403 , H01M50/411
Abstract: Provided herein is a lithium battery including: a cathode including a cathode active material; an anode including an anode active material; an electrolyte between the cathode and the anode; and a separator impregnated with the electrolyte, wherein the separator includes cellulose nanofibers, and wherein a differential scanning calorimetry (DSC) thermogram of the separator evinces an exothermic reaction peak, represented by a differential value (dH/dT), at a temperature in a range of about 150° C. to about 200° C.
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公开(公告)号:US11211671B2
公开(公告)日:2021-12-28
申请号:US16196729
申请日:2018-11-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunchul Lee , Junhwan Ku , Hyeokjo Gwon , Nagjong Kim , Chilhee Chung , Sangmin Ji , Jinkyu Kang , Changduk Kang , Ryounghee Kim , Minsang Kim , Euncheol Do , Kitae Park , Sunghaeng Lee
IPC: H01M50/44 , C08J5/22 , H01M10/052 , D21H11/18 , D21H21/22 , B32B21/02 , B32B21/10 , B32B5/18 , B32B5/32 , H01M50/429 , H01M50/449
Abstract: Provided herein are a porous film, a separator including the same, an electrochemical device including the separator, and a method of preparing the porous film. The porous film includes first cellulose nanofibers which is impregnated with a carbonate-based solvent-containing electrolyte solution and has a reaction heat of 150 J/g or less at a temperature ranging from about 30° C. to about 300° C., as measured by differential scanning calorimetry (DSC).
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公开(公告)号:US10932125B2
公开(公告)日:2021-02-23
申请号:US16620993
申请日:2018-06-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Shinduck Lee , Hyunchul Lee
Abstract: Various embodiments of the present invention relate to an electronic device for recognizing a SIM card. The electronic device may comprise: a display; a SIM card including at least one subscriber identification module; a processor electrically connected to the display and the SIM card; and a memory electrically connected to the processor, wherein in the memory stores instructions which, when executed, cause the processor to: identify whether a SIM lock is activated or not, on the basis of the at least one subscriber identification module included in the SIM card; and when it is identified that at least one subscriber identification module, the SIM lock of which has been deactivated, display a screen corresponding to the subscriber identification module, the SIM lock of which has been deactivated. Another embodiment is possible.
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公开(公告)号:US10522366B2
公开(公告)日:2019-12-31
申请号:US16132895
申请日:2018-09-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunchul Lee , Yunseung Kang , Sounghee Lee , Jiseung Lee , Sanggyo Chung
IPC: H01L21/3213 , H01L21/033 , H01L21/308 , H01L21/311
Abstract: Disclosed is a method of fabricating a semiconductor device. The method includes forming a lower layer on a substrate, forming on the lower layer a sacrificial layer and an etching pattern, forming a first spacer layer on the sacrificial layer and the etching pattern, etching the sacrificial layer and the first spacer layer to form a sacrificial pattern and a first spacer on at least a portion of a top surface of the sacrificial pattern, forming a second spacer layer on the sacrificial pattern and the first spacer, etching the second spacer layer and the first spacer to form a second spacer on a sidewall of the sacrificial pattern, and partially etching the lower layer to form a pattern. The second spacer is used as an etching mask to partially etch the lower layer.
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