Pyramid socket suspension
    21.
    发明授权
    Pyramid socket suspension 有权
    金字塔插座悬挂

    公开(公告)号:US07107840B2

    公开(公告)日:2006-09-19

    申请号:US11348742

    申请日:2006-02-06

    CPC classification number: B81B3/0072 G01P15/08 G01P15/0802 G01P15/097

    Abstract: An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

    Abstract translation: 一种用于在一对盖板之间灵活地悬挂感测机构的装置和方法,包括形成在晶体硅衬底中的感测机构; 形成在晶体硅衬底中的一对盖板; 所述感测机构与所述盖板中的第一个固定关系的第一多个互补接口; 以及第二多个互补接口,其灵活地悬挂在所述感测机构和所述盖板中的第二个之间,其中一个或多个所述柔性悬挂接口是互补的阳和凹接口。

    Pressure-compensated transducers, pressure-compensated accelerometers, force-sensing methods, and acceleration-sensing methods
    24.
    发明授权
    Pressure-compensated transducers, pressure-compensated accelerometers, force-sensing methods, and acceleration-sensing methods 失效
    压力补偿换能器,压力补偿加速度计,力感测方法和加速度感测方法

    公开(公告)号:US06230565B1

    公开(公告)日:2001-05-15

    申请号:US09087208

    申请日:1998-05-28

    Inventor: Steven A. Foote

    CPC classification number: G01P15/097 G01P2015/0828

    Abstract: Pressure-compensated transducers and accelerometers, and force-sensing and acceleration-sensing methods are described. In a preferred embodiment, regression techniques are utilized in the context of a vibrating beam force transducer to provide a measure of acceleration which is both temperature-compensated and pressure-compensated.

    Abstract translation: 描述了压力补偿换能器和加速度计,以及力感测和加速度感测方法。 在优选实施例中,在振动梁力传感器的上下文中使用回归技术来提供温度补偿和压力补偿的加速度测量。

    Force rebalance accelerometers and rebalancing methods
    26.
    发明授权
    Force rebalance accelerometers and rebalancing methods 失效
    强制重新平衡加速度计和重新平衡方法

    公开(公告)号:US5952575A

    公开(公告)日:1999-09-14

    申请号:US904059

    申请日:1997-07-31

    Inventor: Steven A. Foote

    CPC classification number: G01P15/132

    Abstract: A force rebalance accelerometer includes a magnetic assembly designed for improved scale factor performance and producibility. The magnetic assembly excitation ring includes slots. The slots are defined by an inner edge of the upper surface of the excitation ring and are separated by an upper surface portion or tongue intermediate the slots which extends away from the outer edge of the upper surface and toward a magnet received within the interior portion of the excitation ring.

    Abstract translation: 力重平衡加速度计包括设计用于改进比例因子性能和可生产性的磁性组件。 磁组件激励环包括槽。 狭槽由激励环的上表面的内边缘限定,并且由在上表面的外边缘延伸的槽之间的上表面部分或舌部分隔开,并且朝向位于 励磁环。

    Low stress magnet interface
    27.
    发明授权

    公开(公告)号:US5557044A

    公开(公告)日:1996-09-17

    申请号:US317257

    申请日:1994-10-03

    CPC classification number: G01P15/132 G01P1/006 G01P15/125

    Abstract: A force rebalance accelerometer includes a proof mass suspended by one or more flexures between stationary mounted upper and lower excitation rings. Pick-off capacitance plates formed on opposing sides of the proof mass form capacitance elements whose capacitance varies in response to displacement of the proof mass to provide a displacement signal. The displacement signal is applied to one or more electromagnets, used to force the proof mass back to a null or at-rest position. The drive current applied to the electromagnets thus represents the force or acceleration applied to the accelerometer. The electromagnets include a magnet and a pole piece which forms a magnetic return path. In order to relieve stresses due to thermal expansion, the magnet is spaced apart from the pole piece to enable the bonding area to be constrained to a minimum which, in turn, reduces the overall stress on the accelerometer. In particular, a bead of relatively noncompliant epoxy is used for bonding the excitation ring and pole piece to the magnet. In order to further reduce thermal stresses, a ring of relatively compliant epoxy is disposed concentric to the noncompliant epoxy.

    Flux control groove
    28.
    发明授权
    Flux control groove 失效
    焊剂控制槽

    公开(公告)号:US5524488A

    公开(公告)日:1996-06-11

    申请号:US186057

    申请日:1994-01-24

    Inventor: Steven A. Foote

    CPC classification number: G01P15/125 G01P1/006 G01P15/132

    Abstract: A force rebalance accelerometer includes a proof mass suspended by one or more flexures between stationary mounted upper and lower excitation rings. Pick-off capacitance plates formed on opposing sides of the proof mass are used to form upper and lower capacitance elements whose capacitance varies in response to displacement of the proof mass to provide a displacement signal. The displacement signal is applied to one or more electromagnets which are used to force the proof mass back to a null or at-rest position. The drive current applied to the electromagnets thus represents the force or acceleration applied to the accelerometer. The electromagnets include a magnet, rigidly secured to an excitation ring which forms a magnetic return path. A flux control groove is formed in the excitation ring to reduce leakage flux and flux concentration which would otherwise result in the magnetic return path at the magnet interface. By relieving the stress and leakage flux at the magnet interface, the accelerometer in accordance with the present invention will provide relatively stable output signals and not be particularly sensitive to temperature or environmental variations while providing relatively stable thermal hysteresis and drift performance.

    Abstract translation: 力重平衡加速度计包括通过固定安装的上和下激励环之间的一个或多个挠曲物悬挂的检验质量块。 形成在证明块的相对侧上的拾取电容板用于形成上下电容元件,其电容响应于证明块的位移而变化以提供位移信号。 位移信号被施加到一个或多个电磁体,这些电磁体用于迫使质量块回到空或静止位置。 因此,施加到电磁体的驱动电流表示施加到加速度计的力或加速度。 电磁体包括刚性地固定到形成磁返回路径的激励环的磁体。 励磁环中形成磁通控制槽,以减少漏磁通和磁通浓度,否则会导致磁性界面处的磁回路。 通过减轻磁体界面处的应力和漏磁通,根据本发明的加速度计将提供相对稳定的输出信号,并且不会对温度或环境变化特别敏感,同时提供相对稳定的热滞和漂移性能。

    Charge balancing detection circuit
    30.
    发明授权
    Charge balancing detection circuit 失效
    电荷平衡检测电路

    公开(公告)号:US4634965A

    公开(公告)日:1987-01-06

    申请号:US687648

    申请日:1984-12-31

    Inventor: Steven A. Foote

    CPC classification number: G01P15/125 G01R15/09 G01R27/2605

    Abstract: Prior detection circuits for measuring capacitance differences have commonly included error source, such as P-N junctions, in the DC signal path. The present invention provides an improved detection circuit for measuring the capacitance difference between first (C.sub.1) and second (C.sub.2) capacitive elements. The detection circuit comprises a first capacitor (C.sub.3) serially connected to the first capacitive element at a first common node (36) to form a first series circuit, and a second capacitor (C.sub.4) serially connected to the second capacitive element at a second common node (38) to form a second series circuit. The detection circuit also includes switch a circuit (32) connected between the common nodes and a reference potential, a driver (30) for applying a drive signal across each series circuit, a line for activating the switch circuit (48) and a difference detector (34) for measuring the voltage difference between the common nodes. The switch circuit has a first state in which the common nodes are connected to the reference potential and a second state in which the common nodes are isolated from the reference potential and from one another. The drive signal comprises a series of first voltage transitions (104, 106) operative to vary the total voltage drop across each series circuit. The line for activating the switch circuit changes the switch circuit from the first state to the second state at or prior to each first voltage transition. Therefore after each first voltage transition, the difference between the voltages of the first and second common nodes is a measure of the difference between the capacitances of the first and second capacitive elements. A similar technique may be applied to the measurement of the capacitance of a single capacitor.

    Abstract translation: 用于测量电容差的现有检测电路在DC信号路径中通常包括诸如P-N结的误差源。 本发明提供一种用于测量第一(C1)和第二(C2)电容元件之间的电容差的改进的检测电路。 检测电路包括在第一公共节点(36)处串联连接到第一电容元件以形成第一串联电路的第一电容器(C3)和在第二公共端串联连接到第二电容元件的第二电容器(C4) 节点(38)以形成第二串联电路。 检测电路还包括连接在公共节点和参考电位之间的开关电路(32),用于在每个串联电路上施加驱动信号的驱动器(30),用于激活开关电路(48)的线路和差分检测器 (34),用于测量公共节点之间的电压差。 开关电路具有第一状态,其中公共节点连接到参考电位,第二状态是公共节点与参考电位彼此隔离的第二状态。 驱动信号包括一系列第一电压转换(104,106),其可操作以改变每个串联电路上的总电压降。 用于激活开关电路的线路在每个第一电压转换期间或之前将开关电路从第一状态改变到第二状态。 因此,在每个第一电压转换之后,第一和第二公共节点的电压之间的差是测量第一和第二电容元件的电容之间的差。 类似的技术可以应用于单个电容器的电容的测量。

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