公开(公告)号：US11195831B2

公开(公告)日：2021-12-07

申请号：US16596764

申请日：2019-10-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yung-Chen Chiu ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chien-Liang Wu ,  Chih-Kai Kang ,  Guan-Kai Huang

IPC: H01L29/778 ,  H01L27/06 ,  H01L27/085 ,  H01L29/66

Abstract: A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.

公开(公告)号：US20210082911A1

公开(公告)日：2021-03-18

申请号：US16596764

申请日：2019-10-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yung-Chen Chiu ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chien-Liang Wu ,  Chih-Kai Kang ,  Guan-Kai Huang

IPC: H01L27/06 ,  H01L29/778 ,  H01L29/66 ,  H01L27/085

Abstract: A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.

公开(公告)号：US12150314B2

公开(公告)日：2024-11-19

申请号：US18512058

申请日：2023-11-17

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Te-Wei Yeh ,  Chien-Liang Wu

IPC: H10B61/00 ,  G11C7/18 ,  H10N50/80

Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).

公开(公告)号：US11854632B2

公开(公告)日：2023-12-26

申请号：US17502056

申请日：2021-10-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chien-Liang Wu ,  Wen-Kai Lin ,  Te-Wei Yeh ,  Sheng-Yuan Hsueh ,  Chi-Horn Pai

IPC: G11C17/16 ,  G11C16/10 ,  H10B20/25 ,  H10B20/20

CPC classification number: G11C17/165 ,  G11C16/10 ,  H10B20/20 ,  H10B20/25 ,  G11C2216/26

Abstract: A semiconductor memory structure includes a substrate having thereon a transistor forming region and a capacitor forming region. A transistor is disposed on the substrate within the transistor forming region. A capacitor is disposed within the capacitor forming region and electrically coupled to the transistor. A first inter-layer dielectric layer covers the transistor forming region and the capacitor forming region. The first inter-layer dielectric layer surrounds a metal gate of the transistor and a bottom plate of the capacitor. A cap layer is disposed on the first inter-layer dielectric layer. The cap layer has a first thickness within the transistor forming region and a second thickness within the capacitor forming region. The first thickness is greater than the second thickness. The cap layer within the capacitor forming region acts as a capacitor dielectric layer of the capacitor.

公开(公告)号：US11631761B2

公开(公告)日：2023-04-18

申请号：US17676867

申请日：2022-02-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang ,  Guan-Kai Huang ,  Chien-Liang Wu

IPC: H01L29/778 ,  H01L29/66

Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).

公开(公告)号：US20230015480A1

公开(公告)日：2023-01-19

申请号：US17391067

申请日：2021-08-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chun-Hsien Lin ,  Yung-Chen Chiu ,  Chien-Liang Wu ,  Te-Wei Yeh

IPC: H01L27/112

Abstract: A one-time programmable (OTP) memory cell includes a substrate having a first conductivity type and having an active area surrounded by an isolation region, a transistor disposed on the active area, and a capacitor disposed on the active area and electrically coupled to the transistor. The capacitor comprises a diffusion region of a second conductivity type in the substrate, a metallic film in direct contact with the active area, a capacitor dielectric layer on the metallic film, and a metal gate surrounded by the capacitor dielectric layer. The diffusion region and the metallic film constitute a capacitor bottom plate.

公开(公告)号：US20220093584A1

公开(公告)日：2022-03-24

申请号：US17075707

申请日：2020-10-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Te-Wei Yeh ,  Yi-Chun Chen

IPC: H01L27/06 ,  H01L49/02 ,  H01L29/20 ,  H01L29/205 ,  H01L29/40 ,  H01L29/778 ,  H01L29/66 ,  H01L21/306 ,  H01L21/765 ,  H01L21/8252

Abstract: A resistor-transistor-logic (RTL) circuit with GaN structure, including a GaN layer, a AlGaN barrier layer on the GaN layer, multiple p-type doped GaN capping layers on the AlGaN barrier layer, wherein parts of the p-type doped GaN capping layers in a high-voltage region and in a low-voltage region convert the underlying GaN layer into gate depletion areas, the GaN layer not covered by the p-type doped GaN capping layers in a resistor region becomes a 2DEG resistor.

公开(公告)号：US20220059528A1

公开(公告)日：2022-02-24

申请号：US17516721

申请日：2021-11-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yung-Chen Chiu ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chien-Liang Wu ,  Chih-Kai Kang ,  Guan-Kai Huang

IPC: H01L27/06 ,  H01L27/085 ,  H01L29/66 ,  H01L29/778

Abstract: A 3D semiconductor structure includes a buffer layer, a n-type high electron mobility transistor (HEMT) disposed on a first surface of the buffer layer, and a p-type high hole mobility transistor (HHMT) disposed on a second surface of the buffer layer opposite to the first surface.

公开(公告)号：US20210391383A1

公开(公告)日：2021-12-16

申请号：US16924169

申请日：2020-07-08

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Te-Wei Yeh ,  Chien-Liang Wu

IPC: H01L27/22 ,  H01L43/02 ,  G11C7/18

Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).

公开(公告)号：US20240429228A1

公开(公告)日：2024-12-26

申请号：US18829265

申请日：2024-09-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Te-Wei Yeh ,  Yi-Chun Chen

IPC: H01L27/06 ,  H01L21/306 ,  H01L21/765 ,  H01L21/8252 ,  H01L29/20 ,  H01L29/205 ,  H01L29/40 ,  H01L29/66 ,  H01L29/778

Abstract: A method of manufacturing a resistor-transistor-logic circuit with GaN structures, including steps of forming a GaN layer, an AlGaN barrier layer and a p-type doped GaN capping layer on a substrate, patterning the p-type doped GaN capping layer into multiple p-type doped GaN capping patterns, wherein the GaN layer under parts of the p-type doped GaN capping patterns is converted into gate depletion regions, and the GaN layer not covered by the p-type doped GaN capping patterns in a resistor region functions as 2DEG resistors, forming a passivation layer on the GaN layer and the p-type doped GaN capping patterns, forming multiple sources and drains on the GaN layer, and forming multiple gates on the p-type doped GaN capping patterns, wherein the gates, sources and drains in a high-voltage device region constitute high-voltage HEMTs, and the gates, sources and drains in a low-voltage device region constitute low-voltage logic FETs.