公开(公告)号：US09349695B2

公开(公告)日：2016-05-24

申请号：US14803128

申请日：2015-07-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shih-Fang Hong ,  Po-Chao Tsao

IPC: H01L29/78 ,  H01L23/00 ,  H01L29/06 ,  H01L21/8234 ,  H01L29/417 ,  H01L29/66 ,  H01L21/84 ,  H01L27/092 ,  H01L27/108 ,  H01L29/423 ,  H01L27/088 ,  H01L27/12

CPC classification number: H01L23/562 ,  H01L21/823431 ,  H01L21/845 ,  H01L27/0886 ,  H01L27/0924 ,  H01L27/10879 ,  H01L27/1211 ,  H01L29/0692 ,  H01L29/41791 ,  H01L29/42392 ,  H01L29/66795 ,  H01L29/6681 ,  H01L29/785 ,  H01L29/7851 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A semiconductor integrated device includes a substrate having an active region defined thereon, a plurality of active fins positioned in the active region, and a plurality of first protecting fins surrounding the active region. Each of the plurality of active fins extends along a first direction and includes a first length along the first direction. The plurality of first protecting fins extend along the first direction. One of the plurality of first protecting fins immediately adjacent to the active region has a second length along the first direction, and the second length is longer than the first length.

Abstract translation: 半导体集成器件包括具有限定在其上的有源区的衬底，位于有源区中的多个有源鳍，和围绕有源区的多个第一保护鳍。 多个活动翅片中的每一个沿着第一方向延伸并且包括沿着第一方向的第一长度。 多个第一保护翅片沿第一方向延伸。 紧邻有源区域的多个第一保护片之一具有沿第一方向的第二长度，第二长度比第一长度长。

公开(公告)号：US09318490B2

公开(公告)日：2016-04-19

申请号：US14153079

申请日：2014-01-13

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Chao Tsao ,  Yao-Hung Huang ,  Chien-Ting Lin ,  Ming-Te Wei

IPC: H01L27/092 ,  H01L21/02 ,  H01L21/321 ,  H01L21/8238 ,  H01L21/8234

CPC classification number: H01L27/0922 ,  H01L21/02164 ,  H01L21/32115 ,  H01L21/823437 ,  H01L21/82345 ,  H01L21/823456 ,  H01L21/823828 ,  H01L21/823842 ,  H01L21/82385

Abstract: The present invention provides a semiconductor structure, including a substrate, having a dielectric layer disposed thereon, a first device region and a second device region defined thereon, at least one first trench disposed in the substrate within the first device region, at least one second trench and at least one third trench disposed in the substrate within the second device region, a work function layer, disposed in the second trench and the third trench, wherein the work function layer partially covers the sidewall of the second trench, and entirely covers the sidewall of the third trench, and a first material layer, disposed in the second trench and the third trench, wherein the first material layer covers the work function layer disposed on partial sidewall of the second trench, and entirely covers the work function layer disposed on the sidewall of the third trench.

Abstract translation: 本发明提供一种半导体结构，包括其上设置有介电层的基板，限定在其上的第一器件区域和第二器件区域，设置在第一器件区域内的衬底中的至少一个第一沟槽，至少一个第二 沟槽和设置在第二器件区域内的衬底中的至少一个第三沟槽，设置在第二沟槽和第三沟槽中的功函数层，其中功函数层部分地覆盖第二沟槽的侧壁，并且完全覆盖 第三沟槽的侧壁和设置在第二沟槽和第三沟槽中的第一材料层，其中第一材料层覆盖设置在第二沟槽的部分侧壁上的功函数层，并且完全覆盖设置在第二沟槽上的功函数层 第三沟槽的侧壁。

公开(公告)号：US09196352B2

公开(公告)日：2015-11-24

申请号：US13776589

申请日：2013-02-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Po-Chao Tsao ,  Shu-Ru Wang ,  Chia-Wei Huang ,  Chieh-Te Chen ,  Feng-Yi Chang ,  Chih-Sen Huang

IPC: H01L21/70 ,  G11C11/00 ,  G11C11/412 ,  H01L27/02 ,  H01L27/11

CPC classification number: G11C11/412 ,  H01L27/0207 ,  H01L27/1104

Abstract: A static random access memory unit cell layout structure is disclosed, in which a slot contact is disposed on one active area and another one across from the one. A static random access memory unit cell structure and a method of fabricating the same are also disclosed, in which, a slot contact is disposed on drains of a pull-up transistor and a pull-down transistor, and a metal-zero interconnect is disposed on the slot contact and a gate line of another pull-up transistor. Accordingly, there is not an intersection of vertical and horizontal metal-zero interconnects, and there is no place suffering from twice etching. Leakage junction due to stitch recess can be avoided.

Abstract translation: 公开了一种静态随机存取存储器单元布局结构，其中，槽触点设置在一个有源区上，另一个位于一个有源区上。 还公开了一种静态随机存取存储单元单元结构及其制造方法，其中，在上拉晶体管和下拉晶体管的漏极上设置一个槽触点，并且设置金属零互连 在槽触点和另一个上拉晶体管的栅极线上。 因此，没有垂直和水平的金属零互连，没有两次蚀刻的地方。 可以避免缝合凹陷引起的泄漏接头。

公开(公告)号：US20150325532A1

公开(公告)日：2015-11-12

申请号：US14803128

申请日：2015-07-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shih-Fang Hong ,  Po-Chao Tsao

IPC: H01L23/00 ,  H01L29/06 ,  H01L29/78

CPC classification number: H01L23/562 ,  H01L21/823431 ,  H01L21/845 ,  H01L27/0886 ,  H01L27/0924 ,  H01L27/10879 ,  H01L27/1211 ,  H01L29/0692 ,  H01L29/41791 ,  H01L29/42392 ,  H01L29/66795 ,  H01L29/6681 ,  H01L29/785 ,  H01L29/7851 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A semiconductor integrated device includes a substrate having an active region defined thereon, a plurality of active fins positioned in the active region, and a plurality of first protecting fins surrounding the active region. Each of the plurality of active fins extends along a first direction and includes a first length along the first direction. The plurality of first protecting fins extend along the first direction. One of the plurality of first protecting fins immediately adjacent to the active region has a second length along the first direction, and the second length is longer than the first length.

Abstract translation: 半导体集成器件包括具有限定在其上的有源区的衬底，位于有源区中的多个有源鳍，和围绕有源区的多个第一保护鳍。 多个活动翅片中的每一个沿着第一方向延伸并且包括沿着第一方向的第一长度。 多个第一保护翅片沿第一方向延伸。 紧邻有源区域的多个第一保护片之一具有沿第一方向的第二长度，第二长度比第一长度长。

公开(公告)号：US20150270261A1

公开(公告)日：2015-09-24

申请号：US14730230

申请日：2015-06-03

Applicant: United Microelectronics Corp.

Inventor： Ching-Wen Hung ,  Chih-Sen Huang ,  Po-Chao Tsao

IPC: H01L27/06 ,  H01L21/768 ,  H01L29/40 ,  H01L49/02 ,  H01L29/66

CPC classification number: H01L27/0629 ,  H01L21/28 ,  H01L21/76802 ,  H01L21/76877 ,  H01L27/1085 ,  H01L28/60 ,  H01L28/75 ,  H01L29/401 ,  H01L29/4966 ,  H01L29/51 ,  H01L29/66477 ,  H01L29/66545

Abstract: A semiconductor structure includes a metal gate, a second dielectric layer and a contact plug. The metal gate is located on a substrate and in a first dielectric layer, wherein the metal gate includes a work function metal layer having a U-shaped cross-sectional profile and a low resistivity material located on the work function metal layer. The second dielectric layer is located on the metal gate and the first dielectric layer. The contact plug is located on the second dielectric layer and in a third dielectric layer, thereby a capacitor is formed. Moreover, the present invention also provides a semiconductor process forming said semiconductor structure.

Abstract translation: 半导体结构包括金属栅极，第二电介质层和接触插塞。 金属栅极位于基板和第一电介质层中，其中金属栅极包括具有U形横截面轮廓的功函数金属层和位于功函数金属层上的低电阻率材料。 第二电介质层位于金属栅极和第一电介质层上。 接触塞位于第二电介质层上，在第三电介质层中形成电容器。 此外，本发明还提供了形成所述半导体结构的半导体工艺。

公开(公告)号：US09129985B2

公开(公告)日：2015-09-08

申请号：US13784839

申请日：2013-03-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Chao Tsao ,  Chien-Ting Lin ,  Chien-Ming Lai ,  Chi-Mao Hsu

IPC: H01L29/76 ,  H01L29/94 ,  H01L29/66 ,  H01L29/49 ,  H01L29/51 ,  H01L29/78 ,  H01L21/8238

CPC classification number: H01L29/66545 ,  H01L21/28088 ,  H01L21/28185 ,  H01L21/32115 ,  H01L21/823842 ,  H01L27/0922 ,  H01L29/42364 ,  H01L29/42376 ,  H01L29/4966 ,  H01L29/51 ,  H01L29/517 ,  H01L29/518 ,  H01L29/78 ,  H01L29/7833

Abstract: A manufacturing method of semiconductor devices having metal gate includes following steps. A substrate having a first semiconductor device and a second semiconductor device formed thereon is provided. The first semiconductor device includes a first gate trench and the second semiconductor device includes a second gate trench. A first work function metal layer is formed in the first gate trench and the second gate trench. A portion of the first work function metal layer is removed from the second gate trench. A second work function metal layer is formed in the first gate trench and the second gate trench. The second work function metal layer and the first work function metal layer include the same metal material. A third work function metal layer and a gap-filling metal layer are sequentially formed in the first gate trench and the second gate trench.

Abstract translation: 具有金属栅极的半导体器件的制造方法包括以下步骤。 提供了具有形成在其上的第一半导体器件和第二半导体器件的衬底。 第一半导体器件包括第一栅极沟槽，第二半导体器件包括第二栅极沟槽。 在第一栅极沟槽和第二栅极沟槽中形成第一功函数金属层。 第一功函数金属层的一部分从第二栅极沟槽去除。 在第一栅极沟槽和第二栅极沟槽中形成第二功函数金属层。 第二功函数金属层和第一功函数金属层包括相同的金属材料。 在第一栅极沟槽和第二栅极沟槽中依次形成第三功函数金属层和间隙填充金属层。

公开(公告)号：US09093473B2

公开(公告)日：2015-07-28

申请号：US14331229

申请日：2014-07-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ming-Te Wei ,  Wen-Chen Wu ,  Lung-En Kuo ,  Po-Chao Tsao

IPC: H01L21/00 ,  H01L29/66 ,  H01L21/8238 ,  H01L29/165 ,  H01L29/78

CPC classification number: H01L29/66689 ,  H01L21/823807 ,  H01L21/823828 ,  H01L21/823864 ,  H01L29/165 ,  H01L29/6656 ,  H01L29/66575 ,  H01L29/66636 ,  H01L29/7816 ,  H01L29/7834 ,  H01L29/7848

Abstract: A method for fabricating a metal-oxide semiconductor (MOS) transistor is disclosed. The method includes the steps of: providing a semiconductor substrate; forming a silicon layer on the semiconductor substrate; performing a first photo-etching process on the silicon layer for forming a gate pattern; forming an epitaxial layer in the semiconductor substrate adjacent to two sides of the gate pattern; and performing a second photo-etching process on the gate pattern to form a slot in the gate pattern while using the gate pattern to physically separate the gate pattern into two gates.

Abstract translation: 公开了一种用于制造金属氧化物半导体（MOS）晶体管的方法。 该方法包括以下步骤：提供半导体衬底; 在所述半导体衬底上形成硅层; 在硅层上进行第一光蚀刻工艺以形成栅极图案; 在与栅极图案的两侧相邻的半导体衬底中形成外延层; 以及对所述栅极图案执行第二光蚀刻处理以在所述栅极图案中形成槽，同时使用所述栅极图案将所述栅极图案物理分离成两个栅极。

公开(公告)号：US20150179770A1

公开(公告)日：2015-06-25

申请号：US14630666

申请日：2015-02-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shih-Fang Hong ,  Po-Chao Tsao

IPC: H01L29/66

CPC classification number: H01L29/66795 ,  H01L27/0886 ,  H01L29/6653

Abstract: A fabrication method of a semiconductor device includes the following steps. First, sacrificial patterns are formed on a substrate and a space is formed on the sidewalls of each sacrificial pattern. Then, the sacrificial patterns are removed and patterns of the spacers are transferred into the substrate to form a fin structure. The fin structure includes a horizontal fin structure extending along a first direction and a vertical fin structure extending along a second direction. Subsequently, a gate structure, source/drain structures, and an electrical connecting structure are formed sequentially on the substrate. The gate structure overlaps portions of the horizontal fin structure. The source/drain structures are respectively on each side of the gate structure. The electrical connecting structure directly covers the horizontal fin structure and the vertical fin structure.

Abstract translation: 半导体器件的制造方法包括以下步骤。 首先，牺牲图案形成在基板上，并且在每个牺牲图案的侧壁上形成空间。 然后，去除牺牲图案，并将间隔物的图案转移到基板中以形成翅片结构。 翅片结构包括沿着第一方向延伸的水平翅片结构和沿着第二方向延伸的垂直翅片结构。 随后，在衬底上依次形成栅极结构，源极/漏极结构和电连接结构。 门结构与水平翅片结构的部分重叠。 源极/漏极结构分别位于栅极结构的每一侧。 电连接结构直接覆盖水平翅片结构和垂直翅片结构。

公开(公告)号：US09035425B2

公开(公告)日：2015-05-19

申请号：US13875291

申请日：2013-05-02

Applicant: United Microelectronics Corp.

Inventor： Po-Chao Tsao

IPC: H01L29/00 ,  H01L27/088 ,  H01L27/06 ,  H01L21/8234 ,  H01L21/70

CPC classification number: H01L27/0886 ,  H01L21/823431 ,  H01L27/0611 ,  H01L27/0629 ,  H01L28/20 ,  H01L29/0649 ,  H01L29/0653 ,  H01L29/408 ,  H01L29/7816 ,  H01L29/7817 ,  H01L29/7835 ,  H01L29/7851

Abstract: A semiconductor integrated circuit includes a substrate, a multi-gate transistor device formed on the substrate, and an n-well resistor formed in the substrate. The substrate includes a plurality of first isolation structures and at least a second isolation structure formed therein. A depth of the first isolation structures is smaller than a depth of the second isolation structure. The multi-gate transistor device includes a plurality of fin structures, and the fin structures are parallel with each other and spaced apart from each other by the first isolation structures. The n-well resistor includes at least one first isolation structure. The n-well resistor and the multi-gate transistor device are electrically isolated from each other by the second isolation structure.

Abstract translation: 半导体集成电路包括衬底，形成在衬底上的多栅极晶体管器件和形成在衬底中的n阱电阻器。 衬底包括多个第一隔离结构和至少形成在其中的第二隔离结构。 第一隔离结构的深度小于第二隔离结构的深度。 多栅晶体管器件包括多个翅片结构，并且翅片结构彼此平行并且通过第一隔离结构彼此间隔开。 n阱电阻器包括至少一个第一隔离结构。 n阱电阻器和多栅极晶体管器件通过第二隔离结构彼此电隔离。

公开(公告)号：US20150035069A1

公开(公告)日：2015-02-05

申请号：US13954991

申请日：2013-07-31

Applicant: United Microelectronics Corp.

Inventor： Yu-Hsiang Hung ,  Ssu-I Fu ,  Chien-Ting Lin ,  Po-Chao Tsao ,  Chung-Fu Chang ,  Cheng-Guo Chen

IPC: H01L27/092 ,  H01L21/8238

CPC classification number: H01L27/1211 ,  H01L21/845

Abstract: A method for fabricating fin-shaped field-effect transistor (FinFET) is disclosed. The method includes the steps of: providing a substrate; forming a fin-shaped structure in the substrate; forming a shallow trench isolation (STI) on the substrate and around the bottom portion of the fin-shaped structure; forming a first gate structure on the STI and the fin-shaped structure; and removing a portion of the STI for exposing the sidewalls of the STI underneath the first gate structure.

Abstract translation: 公开了一种用于制造鳍状场效应晶体管（FinFET）的方法。 该方法包括以下步骤：提供衬底; 在基板中形成翅片状结构; 在衬底上并在鳍状结构的底部周围形成浅沟槽隔离（STI）; 在STI和鳍状结构上形成第一栅极结构; 以及去除STI的一部分以暴露在第一栅极结构下方的STI的侧壁。