公开(公告)号：US12002698B2

公开(公告)日：2024-06-04

申请号：US17174731

申请日：2021-02-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myungjun Lee ,  Changhyeong Yoon ,  Wookrae Kim ,  Jaehwang Jung ,  Jinseob Kim

IPC: H01L21/67 ,  G01N21/47 ,  G01N21/88 ,  G01N21/95 ,  G06N20/00

CPC classification number: H01L21/67288 ,  G01N21/4788 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2201/021 ,  G01N2201/0636 ,  G06N20/00

Abstract: Provided are a diffraction-based metrology apparatus having high measurement sensitivity, a diffraction-based metrology method capable of accurately performing measurement on a semiconductor device, and a method of manufacturing a semiconductor device using the metrology method. The diffraction-based metrology apparatus includes a light source that outputs a light beam, a stage on which an object is placed, a reflective optical element that irradiates the light beam onto the object through reflection, such that the light beam is incident on the object at an inclination angle, the inclination angle being an acute angle, a detector that detects a diffracted light beam that is based on the light beam reflected and diffracted by the object and a processor that measures a 3D pupil matrix for the diffracted light beam and analyze the object based on the 3D pupil matrix.

公开(公告)号：US11674893B2

公开(公告)日：2023-06-13

申请号：US17174223

申请日：2021-02-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazushi Ino ,  Takuya Mukaibara ,  Junya Azami ,  Kazutaka Yaguchi ,  Hiroshi Kita

IPC: G01N21/31 ,  G03G15/00

CPC classification number: G01N21/31 ,  G03G15/5062 ,  G01N2201/021 ,  G01N2201/061

Abstract: A housing includes a first opening and a second opening, and encloses a light-emitting element and a first light receiving unit. The first opening is provided in a first light guide path, and is arranged so that light output from the light-emitting element travels toward a target surface. The second opening is provided in a second light guide path arranged between the target surface and the first light receiving unit. The first opening is an exit opening of a through-hole provided penetrating through the housing, and a shape of the through-hole is a shape in which diffracted light of the +1st order and higher orders and diffracted light of the −1st order and higher orders produced at the target surface to be irradiated are not incident on the first light receiving unit.

公开(公告)号：US20180220905A1

公开(公告)日：2018-08-09

申请号：US15949323

申请日：2018-04-10

Applicant: Valencell, Inc.

Inventor： Steven Francis LeBoeuf ,  Jesse Berkley Tucker ,  Michael Edward Aumer

IPC: A61B5/0205 ,  G01N21/59 ,  G01N21/47 ,  G01D11/00 ,  A61N1/32 ,  A61M37/00 ,  A61B7/04 ,  A61B7/00 ,  A61B5/00 ,  A61B5/22 ,  A61B5/1477 ,  A61B5/1455 ,  A61B5/145 ,  A61B5/12 ,  A61B5/11 ,  A61B5/103 ,  A61B5/0496 ,  A61B5/0476 ,  A61B5/04 ,  A61B5/03 ,  A61B5/029 ,  A61B5/026 ,  A61B5/024 ,  A61B5/021 ,  A61B5/01 ,  A61B5/087 ,  A61B5/08 ,  A61B5/053

CPC classification number: A61B5/02055 ,  A61B5/0002 ,  A61B5/0013 ,  A61B5/0015 ,  A61B5/0022 ,  A61B5/0059 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/01 ,  A61B5/0205 ,  A61B5/021 ,  A61B5/024 ,  A61B5/02427 ,  A61B5/02438 ,  A61B5/026 ,  A61B5/029 ,  A61B5/031 ,  A61B5/04 ,  A61B5/04001 ,  A61B5/0476 ,  A61B5/0496 ,  A61B5/0533 ,  A61B5/0816 ,  A61B5/087 ,  A61B5/1032 ,  A61B5/11 ,  A61B5/1112 ,  A61B5/1118 ,  A61B5/112 ,  A61B5/1126 ,  A61B5/12 ,  A61B5/14539 ,  A61B5/14542 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14551 ,  A61B5/14552 ,  A61B5/14556 ,  A61B5/1477 ,  A61B5/222 ,  A61B5/224 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/415 ,  A61B5/418 ,  A61B5/4205 ,  A61B5/4227 ,  A61B5/4266 ,  A61B5/4542 ,  A61B5/4806 ,  A61B5/4812 ,  A61B5/4839 ,  A61B5/4845 ,  A61B5/4848 ,  A61B5/486 ,  A61B5/4866 ,  A61B5/4872 ,  A61B5/4875 ,  A61B5/6803 ,  A61B5/6815 ,  A61B5/6816 ,  A61B5/6817 ,  A61B5/6887 ,  A61B5/7203 ,  A61B5/721 ,  A61B5/7405 ,  A61B5/742 ,  A61B7/00 ,  A61B7/04 ,  A61B2560/0242 ,  A61M37/00 ,  A61M2037/0007 ,  A61N1/325 ,  G01D11/00 ,  G01N21/47 ,  G01N21/59 ,  G01N2201/021 ,  G01N2201/0612 ,  G01N2201/062

Abstract: Wearable apparatus for monitoring various physiological and environmental factors are provided. Real-time, noninvasive health and environmental monitors include a plurality of compact sensors integrated within small, low-profile devices, such as earpiece modules. Physiological and environmental data is collected and wirelessly transmitted into a wireless network, where the data is stored and/or processed.

公开(公告)号：US20180220903A1

公开(公告)日：2018-08-09

申请号：US15949298

申请日：2018-04-10

Applicant: Valencell, Inc.

Inventor： Steven Francis LeBoeuf ,  Jesse Berkley Tucker ,  Michael Edward Aumer

IPC: A61B5/0205 ,  G01N21/59 ,  G01N21/47 ,  G01D11/00 ,  A61N1/32 ,  A61M37/00 ,  A61B7/04 ,  A61B7/00 ,  A61B5/00 ,  A61B5/22 ,  A61B5/1477 ,  A61B5/1455 ,  A61B5/145 ,  A61B5/12 ,  A61B5/11 ,  A61B5/103 ,  A61B5/0496 ,  A61B5/0476 ,  A61B5/04 ,  A61B5/03 ,  A61B5/029 ,  A61B5/026 ,  A61B5/024 ,  A61B5/021 ,  A61B5/01 ,  A61B5/087 ,  A61B5/08 ,  A61B5/053

CPC classification number: A61B5/02055 ,  A61B5/0002 ,  A61B5/0013 ,  A61B5/0015 ,  A61B5/0022 ,  A61B5/0059 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/01 ,  A61B5/0205 ,  A61B5/021 ,  A61B5/024 ,  A61B5/02427 ,  A61B5/02438 ,  A61B5/026 ,  A61B5/029 ,  A61B5/031 ,  A61B5/04 ,  A61B5/04001 ,  A61B5/0476 ,  A61B5/0496 ,  A61B5/0533 ,  A61B5/0816 ,  A61B5/087 ,  A61B5/1032 ,  A61B5/11 ,  A61B5/1112 ,  A61B5/1118 ,  A61B5/112 ,  A61B5/1126 ,  A61B5/12 ,  A61B5/14539 ,  A61B5/14542 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14551 ,  A61B5/14552 ,  A61B5/14556 ,  A61B5/1477 ,  A61B5/222 ,  A61B5/224 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/415 ,  A61B5/418 ,  A61B5/4205 ,  A61B5/4227 ,  A61B5/4266 ,  A61B5/4542 ,  A61B5/4806 ,  A61B5/4812 ,  A61B5/4839 ,  A61B5/4845 ,  A61B5/4848 ,  A61B5/486 ,  A61B5/4866 ,  A61B5/4872 ,  A61B5/4875 ,  A61B5/6803 ,  A61B5/6815 ,  A61B5/6816 ,  A61B5/6817 ,  A61B5/6887 ,  A61B5/7203 ,  A61B5/721 ,  A61B5/7405 ,  A61B5/742 ,  A61B7/00 ,  A61B7/04 ,  A61B2560/0242 ,  A61M37/00 ,  A61M2037/0007 ,  A61N1/325 ,  G01D11/00 ,  G01N21/47 ,  G01N21/59 ,  G01N2201/021 ,  G01N2201/0612 ,  G01N2201/062

Abstract: An apparatus adapted to be worn at or near an ear of a subject includes at least one battery, a plurality of electrodes configured to contact the ear and to sense physiological information from the subject, at least one motion sensor configured to monitor subject body motion, at least one analog-to-digital convertor configured to convert analog sensor signals from the plurality of electrodes into digitized information, at least one speaker configured to supply sound to the subject, at least one digital memory device configured to store at least one algorithm for signal processing, at least one signal processor configured to process data from the plurality of electrodes and the at least one motion sensor using the at least one algorithm to monitor physiological information from the subject, and at least one transceiver configured to enable wireless communication between the apparatus and a remote device.

公开(公告)号：US20180220902A1

公开(公告)日：2018-08-09

申请号：US15949266

申请日：2018-04-10

Applicant: Valencell, Inc.

Inventor： Steven Francis LeBoeuf ,  Jesse Berkley Tucker ,  Michael Edward Aumer

IPC: A61B5/0205 ,  G01N21/59 ,  G01N21/47 ,  G01D11/00 ,  A61N1/32 ,  A61M37/00 ,  A61B7/04 ,  A61B7/00 ,  A61B5/00 ,  A61B5/22 ,  A61B5/1477 ,  A61B5/1455 ,  A61B5/145 ,  A61B5/12 ,  A61B5/11 ,  A61B5/103 ,  A61B5/0496 ,  A61B5/0476 ,  A61B5/04 ,  A61B5/03 ,  A61B5/029 ,  A61B5/026 ,  A61B5/024 ,  A61B5/021 ,  A61B5/01 ,  A61B5/087 ,  A61B5/08 ,  A61B5/053

CPC classification number: A61B5/02055 ,  A61B5/0002 ,  A61B5/0013 ,  A61B5/0015 ,  A61B5/0022 ,  A61B5/0059 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/01 ,  A61B5/0205 ,  A61B5/021 ,  A61B5/024 ,  A61B5/02427 ,  A61B5/02438 ,  A61B5/026 ,  A61B5/029 ,  A61B5/031 ,  A61B5/04 ,  A61B5/04001 ,  A61B5/0476 ,  A61B5/0496 ,  A61B5/0533 ,  A61B5/0816 ,  A61B5/087 ,  A61B5/1032 ,  A61B5/11 ,  A61B5/1112 ,  A61B5/1118 ,  A61B5/112 ,  A61B5/1126 ,  A61B5/12 ,  A61B5/14539 ,  A61B5/14542 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14551 ,  A61B5/14552 ,  A61B5/14556 ,  A61B5/1477 ,  A61B5/222 ,  A61B5/224 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/415 ,  A61B5/418 ,  A61B5/4205 ,  A61B5/4227 ,  A61B5/4266 ,  A61B5/4542 ,  A61B5/4806 ,  A61B5/4812 ,  A61B5/4839 ,  A61B5/4845 ,  A61B5/4848 ,  A61B5/486 ,  A61B5/4866 ,  A61B5/4872 ,  A61B5/4875 ,  A61B5/6803 ,  A61B5/6815 ,  A61B5/6816 ,  A61B5/6817 ,  A61B5/6887 ,  A61B5/7203 ,  A61B5/721 ,  A61B5/7405 ,  A61B5/742 ,  A61B7/00 ,  A61B7/04 ,  A61B2560/0242 ,  A61M37/00 ,  A61M2037/0007 ,  A61N1/325 ,  G01D11/00 ,  G01N21/47 ,  G01N21/59 ,  G01N2201/021 ,  G01N2201/0612 ,  G01N2201/062

Abstract: An apparatus adapted to be worn at or near at least one ear of a subject includes a battery, a reflective pulse oximeter, a motion sensor, an analog-to-digital convertor configured to convert analog signals from the reflective pulse oximeter and the motion sensor into digitized information, a speaker, a digital memory device configured to store at least one algorithm for signal processing, a transceiver, and a signal processor. The signal processor is configured to process data from the reflective pulse oximeter to monitor cardiopulmonary functioning of the subject, process data from the motion sensor to monitor head and body motion, execute the at least one algorithm for assessing a health state of a subject, poll the reflective pulse oximeter and the motion sensor at certain time intervals to extend life of the battery, and process digital audio information into analog sounds to be presented to the subject via the speaker.

公开(公告)号：US09863887B2

公开(公告)日：2018-01-09

申请号：US14441264

申请日：2012-11-15

Applicant: NEMOR TECHNOLOGIES OÜ

Inventor： Sergey Babichenko

IPC: G01N21/64 ,  G01N21/94

CPC classification number: G01N21/94 ,  G01N21/64 ,  G01N2021/6421 ,  G01N2021/945 ,  G01N2201/021 ,  G01N2201/061 ,  G01N2201/062 ,  G01N2201/0625 ,  G01N2201/0696

Abstract: The invention relates to a unit and method for detection of presence of oil on the water surface or in the water column. Unit comprises a sensor, whereby the sensor is connected to electronic compartment followed by microprocessor controller with embedded software for carrying out necessary analyses of reflected signals received by the sensor. The microprocessor controller is connected to communication means for transmitting an alarm signal through external communication line in case of oil pollution. All elements mentioned above are supplied by external power supply and are accommodated into a waterproof housing. The sensor comprises the probe light source formed by a pulsed UV LED, collimating optics and narrow band optical filter, at least one dichroic mirror, a projection-receiving lens, at least one optical filter, at least one photodetector and a reference photodetector.

公开(公告)号：US20170045444A1

公开(公告)日：2017-02-16

申请号：US15212488

申请日：2016-07-18

Applicant: Deere & Company

Inventor： Wolfram Haiges ,  Georg Kormann

IPC: G01N21/359 ,  A01D41/127 ,  G01N33/10

CPC classification number: G01N21/359 ,  A01D41/1277 ,  G01N21/85 ,  G01N33/10 ,  G01N2021/8592 ,  G01N2201/021

Abstract: A grain measurement device (76) comprises a chamber (80) having an inlet (82) and an outlet (84) for grain that is to be tested. A spectrometer is equipped with a light source (89) and a detector (91) for light which was generated by the light source (89) and was transmitted through the sample. The detector (91) is connected to an analyzer (134) for wavelength-resolved analysis of the received light. A mounting (93) of one of the light source (89) or detector (91) can be moved with respect to the other (91, 89 by a drive (106), which moves the mounting (93) for purposes of conveying the sample either in the flow direction (130) or in the opposite direction, in order to break up the sample or to avoid bridging and/or jamming of the sample in the measurement chamber (80).

Abstract translation: 颗粒测量装置（76）包括具有用于要测试的颗粒的入口（82）和出口（84）的室（80）。 光谱仪配备有由光源（89）产生并通过样品的光的光源（89）和用于光的检测器（91）。 检测器（91）连接到分析器（134），用于对接收到的光进行波长分辨分析。 光源（89）或检测器（91）中的一个的安装件（93）可以相对于另一个（91,99）由驱动器（106）移动，驱动器（106）移动安装件（93），以便传送 在流动方向（130）或相反方向上样品，以便分离样品或避免样品在测量室（80）中的桥接和/或堵塞。

公开(公告)号：US09435781B2

公开(公告)日：2016-09-06

申请号：US14614710

申请日：2015-02-05

Applicant: Dräger Safety AG & Co. KGaA

Inventor： Wilfried Diekmann

IPC: G01N21/00 ,  G01N33/00 ,  G01N21/55 ,  G01N21/3504 ,  G01N21/01

CPC classification number: G01N33/0073 ,  G01N21/01 ,  G01N21/3504 ,  G01N21/55 ,  G01N33/0027 ,  G01N2021/3513 ,  G01N2201/02 ,  G01N2201/021 ,  G01N2201/061

Abstract: A gas detection device with at least one functional device (1), which is fixed to a platform, is pivotable about at least two pivot axes (2, 3) relative to the platform. The functional device (1) is designed to emit and/or receive or reflect radiation that is analyzably variable due to the presence of a gas to be detected. The gas detection device has an adjusting device (9), which has a fixing device for temporary fixation to the platform and an application device for the defined application on the functional device (1) of forces that lead to a pivoting about the pivot axes (2, 3). The application device acts detachably on the functional device (1).

Abstract translation: 具有固定到平台的至少一个功能装置（1）的气体检测装置可相对于平台围绕至少两个枢转轴线（2,3）枢转。 功能装置（1）被设计为发射和/或接收或反射由于要检测的气体的存在而可分析地变化的辐射。 气体检测装置具有调节装置（9），其具有用于临时固定到平台的固定装置和用于在功能装置（1）上限定应用的施加装置（1），其导致围绕枢转轴线的枢转 2，3）。 所述应用装置可移动地作用于所述功能装置（1）。

公开(公告)号：US08872117B2

公开(公告)日：2014-10-28

申请号：US13143578

申请日：2010-01-08

Applicant: Bernhard Lendl ,  Stefan Radel ,  Markus Brandstetter

Inventor： Bernhard Lendl ,  Stefan Radel ,  Markus Brandstetter

IPC: G01T1/24 ,  H01L27/146 ,  G01N21/85 ,  G01N21/15 ,  G01N21/55 ,  G01N21/35

CPC classification number: G01N21/552 ,  G01N21/15 ,  G01N21/8507 ,  G01N2021/154 ,  G01N2021/3595 ,  G01N2201/021

Abstract: The invention relates to a device (1) for FTIR absorption spectroscopy, having an ATR sensor (5) and at least one ultrasonic transmitter (10) for generating an ultrasonic field in the manner of a standing wave. The ATR sensor (5) and the ultrasonic transmitter (10) are connected to a mounting (4) which is provided for attachment in a wall (2) or cover of a reactor (3) and which is set up to hold the ATR sensor (5) and the ultrasonic transmitter (10) so that they freely project into the interior of the reactor (3) in the mounted state.

Abstract translation: 本发明涉及一种用于FTIR吸收光谱的装置（1），具有ATR传感器（5）和用于以驻波方式产生超声波场的至少一个超声波发射器（10）。 ATR传感器（5）和超声波发射器（10）连接到安装件（4），安装件（4）被设置用于附接在反应器（3）的壁（2）或盖子中，并且被设置成保持ATR传感器 （5）和超声波发射器（10），使得它们在安装状态下自由地投入到反应器（3）的内部。

公开(公告)号：US20140051948A1

公开(公告)日：2014-02-20

申请号：US14063669

申请日：2013-10-25

Applicant: Valencell, Inc.

Inventor： Steven Francis LeBoeuf ,  Jesse Berkley Tucker ,  Michael Edward Aumer

IPC: A61B5/00 ,  A61B7/00 ,  A61B5/021 ,  A61B5/029 ,  A61B5/145 ,  A61B5/11 ,  A61B5/0205

CPC classification number: A61B5/02055 ,  A61B5/0002 ,  A61B5/0013 ,  A61B5/0015 ,  A61B5/0022 ,  A61B5/0059 ,  A61B5/0071 ,  A61B5/0084 ,  A61B5/01 ,  A61B5/0205 ,  A61B5/021 ,  A61B5/024 ,  A61B5/02427 ,  A61B5/02438 ,  A61B5/026 ,  A61B5/029 ,  A61B5/031 ,  A61B5/04 ,  A61B5/04001 ,  A61B5/0476 ,  A61B5/0496 ,  A61B5/0533 ,  A61B5/0816 ,  A61B5/087 ,  A61B5/1032 ,  A61B5/11 ,  A61B5/1112 ,  A61B5/1118 ,  A61B5/112 ,  A61B5/1126 ,  A61B5/12 ,  A61B5/14539 ,  A61B5/14542 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14551 ,  A61B5/14552 ,  A61B5/14556 ,  A61B5/1477 ,  A61B5/222 ,  A61B5/224 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/415 ,  A61B5/418 ,  A61B5/4205 ,  A61B5/4227 ,  A61B5/4266 ,  A61B5/4542 ,  A61B5/4806 ,  A61B5/4812 ,  A61B5/4839 ,  A61B5/4845 ,  A61B5/4848 ,  A61B5/486 ,  A61B5/4866 ,  A61B5/4872 ,  A61B5/4875 ,  A61B5/6803 ,  A61B5/6815 ,  A61B5/6816 ,  A61B5/6817 ,  A61B5/6887 ,  A61B5/7203 ,  A61B5/721 ,  A61B5/7405 ,  A61B5/742 ,  A61B7/00 ,  A61B7/04 ,  A61B2560/0242 ,  A61M37/00 ,  A61M2037/0007 ,  A61N1/325 ,  G01D11/00 ,  G01N21/47 ,  G01N21/59 ,  G01N2201/021 ,  G01N2201/0612 ,  G01N2201/062

Abstract: Wearable apparatus for monitoring various physiological and environmental factors are provided. Real-time, noninvasive health and environmental monitors include a plurality of compact sensors integrated within small, low-profile devices, such as earpiece modules. Physiological and environmental data is collected and wirelessly transmitted into a wireless network, where the data is stored and/or processed.

Abstract translation: 提供了用于监测各种生理和环境因素的穿戴式装置。 实时，无创的健康和环境监测器包括集成在小型，薄型设备（如耳机模块）内的多个紧凑型传感器。 收集生理和环境数据并将其无线传输到数据被存储和/或处理的无线网络中。