公开(公告)号：US08017408B2

公开(公告)日：2011-09-13

申请号：US12597742

申请日：2008-04-25

Applicant: Carl D. Meinhart ,  Brian Piorek ,  Seung Joon Lee ,  Martin Moskovits ,  Sanjoy Banerjee ,  Juan G. Santiago

Inventor： Carl D. Meinhart ,  Brian Piorek ,  Seung Joon Lee ,  Martin Moskovits ,  Sanjoy Banerjee ,  Juan G. Santiago

IPC: G01N21/75

CPC classification number: G01N21/658 ,  G01N21/0332 ,  G01N21/05 ,  G01N33/0057 ,  G01N2021/0346 ,  G01N2201/06113 ,  G01N2201/1087 ,  Y10S977/902

Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.

Abstract translation: 提供了利用自由表面流体学和SERS用于具有高灵敏度和特异性的分析物检测的方法，装置和系统。 分子可以是空气传播剂，包括但不限于爆炸物，麻醉剂，危险化学品或其他化学物质。 自由表面流体结构使用开放的微通道产生，并且表现出大的表面与体积比。 自由表面流体界面可以过滤干扰分子，同时浓缩空气中的分析物。 微通道流动使SERS活性探针颗粒在流动中受控聚集，从而提高检测器的灵敏度。

公开(公告)号：US07289661B2

公开(公告)日：2007-10-30

申请号：US10661633

申请日：2003-09-15

Applicant: Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

Inventor： Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

IPC: G06K9/00

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.

Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置，对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元，用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元，用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元，连接到第一图像获取单元和第二图像获取单元，用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果，并且用于检查图案的缺陷 使用第二图像在基板上形成。

公开(公告)号：US5256886A

公开(公告)日：1993-10-26

申请号：US863961

申请日：1992-04-10

Applicant: William E. Wolf ,  Robert H. Livermore ,  David D. Dreyfuss ,  John J. Majeski ,  Eugene F. Palecki ,  Thomas W. Simpson

Inventor： William E. Wolf ,  Robert H. Livermore ,  David D. Dreyfuss ,  John J. Majeski ,  Eugene F. Palecki ,  Thomas W. Simpson

IPC: G01N21/49 ,  G01N21/53 ,  G01N21/84 ,  G01N21/85 ,  G01N21/94 ,  G01N15/06

CPC classification number: G01N21/53 ,  G01N21/85 ,  G01N2021/845 ,  G01N2021/8592 ,  G01N21/94 ,  G01N2201/0642 ,  G01N2201/065 ,  G01N2201/1087

Abstract: An apparatus for optically detecting light-absorbing contamination in at least one particle of low optical-loss material comprises an optical integrating chamber for containing the particles. A laser for emitting a laser beam to illuminate the particles is mounted in the plane of rotation of a rotating mirror such that the laser beam scans in a fan scan. A scanning assembly is mounted in optical alignment with the laser for reflecting the laser beam and for causing the laser beam to scan the particles in the optical integrating chamber. A focusing assembly is mounted in optical alignment with the laser for focusing the scanning laser beam onto the particles in the chamber, the focusing assembly operating in conjunction with the scanning assembly so that light from the laser beam is reflected from the particles and is repeatedly scattered onto the interior walls of the integrating chamber. A light sensing assembly is mounted on the integrating chamber for receiving the repeatedly scattered light from the interior walls of the integrating chamber and for generating a signal indicative of the intensity of the repeatedly scattered light. A decrease in the intensity of the repeatedly scattered light is a function of the presence of light-absorbing contamination in the material.

Abstract translation: 用于光学检测低光损耗材料的至少一个颗粒中的光吸收污染的装置包括用于容纳颗粒的光学积分室。 用于发射激光束以照射颗粒的激光器安装在旋转镜的旋转平面中，使得激光束以风扇扫描扫描。 扫描组件与激光器光学对准安装，用于反射激光束并使激光束扫描光学积分室中的颗粒。 聚焦组件与激光器光学对准安装，用于将扫描激光束聚焦到腔室中的颗粒上，聚焦组件与扫描组件一起操作，使得来自激光束的光从颗粒反射并被重复散射 到整合室的内壁上。 光感测组件安装在积分室上，用于从积分室的内壁接收反复散射的光，并产生指示重复散射光强度的信号。 反复散射光的强度的降低是材料中光吸收污染的存在的函数。

公开(公告)号：USRE34214E

公开(公告)日：1993-04-06

申请号：US288287

申请日：1988-12-21

Applicant: Kjell S. Carlsson ,  Nils R. D. Aslund

Inventor： Kjell S. Carlsson ,  Nils R. D. Aslund

IPC: H01J37/22 ,  G01N21/59 ,  G02B21/00 ,  G02B21/36 ,  G02B27/40 ,  G03B15/00 ,  G03B17/48

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G02B21/0096 ,  G01N21/474 ,  G01N21/6456 ,  G01N2201/1087

Abstract: A method of microphotometering individual volume elements of a microscope specimen 10, comprising generating a luminous dot or cursor and progressively illuminating a plurality of part elements in the focal plane 11 of the microscope through the specimen. The mutual position between the specimen and the focal plane is then changed and a plurality of part elements in the focal plane are illuminated. Reflected and/or fluorescent light and transmitted light respectively created by the illumination is collected, detected and stored for generating a three-dimensional image of that part of the specimen composed of the volume elements. Illumination of multiples of part elements is implemented by deflecting the cursor and/or by moving the specimen. The change in the relative mutual position between the specimen and the focal plane of the microscope is effected either by displacing the specimen or the objective. Apparatus for carrying out the method include a specimen table 301, a microscope objective and light source 31-32-33. The table or the objective are arranged for stepwise movement along the main axis of the microscope synchronously with punctilinear light scanning of the specimen. The table is arranged for stepwise movement at right angles to the main axis and/or the light source is arranged for deflection over the focal plane 21 through the specimen.

公开(公告)号：US5009503A

公开(公告)日：1991-04-23

申请号：US479959

申请日：1990-02-14

Applicant: Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

Inventor： Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

IPC: C12M1/34 ,  G01N15/12 ,  G01N15/14 ,  G01N21/51

CPC classification number: G01N15/1468 ,  C12M23/16 ,  C12M41/36 ,  G01N15/12 ,  G01N21/51 ,  G01N2201/103 ,  G01N2201/1087

Abstract: A plurality of parallel spaced cylindrical capillary tubes contain single cells and/or cell colonies in a medium and gel-like agarose, and the tubes are carried by a frame-like holder supported by a motor driven X-Y translation stage of an automated microscope. The microscope also incorporates an electronic optical detector and an object lens located under the tube holder. The entire contents of each tube are internally illuminated by a precision light beam emitted from a helium-neon laser and reflected by a set of precisely positioned mirrors so that the beam extends axially through each tube when the tube extends across the vertical axis of the object lens. The contents of the tubes are sequentially scanned under the control of special softward within a personal computer, and the intensity of the light reflected outwardly from each cell or cell colony is sensed by the detector and recorded in the computer along with the axial location of the reflecting cell or cell colony. Preferably, the laser light is pure red, the optical detector is sensitive to the red light, and the object lens is focused on the wall of the tube to maximize the signal-to-noise ratio and to obtain full field detection across each tube.

Abstract translation: 多个平行间隔开的​​圆柱形毛细管在培养基和凝胶状琼脂糖中含有单个细胞和/或细胞集落，并且管由由自动显微镜的电机驱动的X-Y平移台支撑的框架状支架承载。 显微镜还包括位于管座下方的电子光学检测器和物镜。 每个管的整个内容物由从氦氖激光器发射并由一组精确定位的反射镜反射的精确光束内部照射，使得当管延伸穿过物体的垂直轴线时，光束轴向延伸穿过每个管 镜片。 在个人计算机内，在特别软的控制下顺序扫描管内容物，并且由每个细胞或细胞集落向外反射的光的强度由检测器检测并记录在计算机中以及 反映细胞或细胞集落。 优选地，激光是纯红色，光学检测器对红光敏感，并且物镜聚焦在管的壁上以最大化信噪比并且跨越每个管获得全场检测。

公开(公告)号：US4747684A

公开(公告)日：1988-05-31

申请号：US89893

申请日：1987-08-27

Applicant: Sidney Weiser

Inventor： Sidney Weiser

IPC: G01N21/55 ,  G01N21/01 ,  G01N21/47

CPC classification number: G01N21/55 ,  G01N2201/1045 ,  G01N2201/1087

Abstract: A specific small area of a crystal sample is scanned by a laser beam which rotates about an axis substantially perpendicular to the sample surface such that the intersection of the beam with a plane above and parallel to the surface describes a true spiral or a stepwise spiral pattern. The laser beam is reflected different amounts for different beam positions to produce a reflectance pattern indicative of crystallographic orientation.

Abstract translation: 晶体样品的特定小区域被激光束扫描，激光束围绕基本上垂直于样品表面的轴线旋转，使得光束与平面在平面上方并且平行于表面的交叉描述了真正的螺旋或逐步螺旋图案 。 对于不同的光束位置，激光束被反射不同的量以产生指示晶体取向的反射率图案。

公开(公告)号：US20240319108A1

公开(公告)日：2024-09-26

申请号：US18679435

申请日：2024-05-30

Applicant: CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED

Inventor： Xiaoyun Fan ,  Ruixiang Hu ,  Yuanqiao Fu ,  Wu CHEN ,  Chongxi Wang ,  Jiebin Huang ,  Jingyu Hu ,  Yanming Wang ,  Yuan Wang ,  Guotao Xie

IPC: G01N21/89 ,  G01N21/95

CPC classification number: G01N21/89 ,  G01N21/95 ,  G01N2201/1087

Abstract: This application provides a cell detection method, device and system as well as a processor and a controller. The cell detection method may include: obtaining target detection data of a target cell; and determining a detection result of the target cell based on the target detection data and standard data. The cell detection method improves the detection efficiency and detection effect of the cells.

公开(公告)号：US20240044863A1

公开(公告)日：2024-02-08

申请号：US18365867

申请日：2023-08-04

Applicant: Applied Materials, Inc.

Inventor： Christopher Bencher

IPC: G01N33/483 ,  G01N21/17

CPC classification number: G01N33/4833 ,  G01N21/17 ,  G01N2021/1787 ,  G01N2201/1087

Abstract: An imaging system for capturing spatial images of biological tissue samples may include an imaging chamber configured to hold a biological tissue sample placed in the imaging system; a light source configured to illuminate the biological tissue sample to activate one or more fluorophores in the biological tissue sample; a Time Delay and Integration (TDI) imager comprising a plurality of partitions, where the plurality of partitions may be configured to capture images at a plurality of different depths in the biological tissue sample simultaneously during a scan by the TDI imager; and a controller configured to cause the TDI imager to scan the biological tissue sample.

公开(公告)号：US20230271199A1

公开(公告)日：2023-08-31

申请号：US18313639

申请日：2023-05-08

Applicant: SpinChip Diagnostics AS

Inventor： Ole Christian TRONRUD ,  Rolf Jahren ,  Sebastian Stenmark ,  Stig Morten Borch

IPC: B04B13/00 ,  B01L3/00 ,  B04B5/02 ,  G01N21/07 ,  G01N35/00 ,  G01N35/04

CPC classification number: B04B13/00 ,  B01L3/502715 ,  B01L3/50273 ,  B04B5/02 ,  G01N21/07 ,  G01N35/00069 ,  G01N35/04 ,  B01L2200/0647 ,  B01L2200/143 ,  B01L2300/0803 ,  B01L2400/0409 ,  G01N2035/0491 ,  G01N2201/06113 ,  G01N2201/1087

Abstract: Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sensor system, controlling rotation of the cartridge and disc, checking whether the initial focus point of the focusing sensor system corresponds to the target point on the processing result, comparing (x, y) target positions in captured images with the initial focus point of the focusing sensor system, adjusting rotation of the cartridge and disc such that the focus point of the focusing sensor system corresponds to the target point on the processing result, and detecting and examining signals received from the focusing sensor system for determining properties of the processing result.

公开(公告)号：US20180024067A1

公开(公告)日：2018-01-25

申请号：US15665095

申请日：2017-07-31

Applicant: The Regents of the University of California ,  The Board of Trustees of the Leland Stanford Junior University

Inventor： Carl D. Meinhart ,  Brian Piorek ,  Seung Joon Lee ,  Martin Moskovits ,  Sanjoy Banerjee ,  Juan Santiago

IPC: G01N21/65 ,  G01N33/00 ,  G01N21/05

CPC classification number: G01N21/658 ,  G01N21/0332 ,  G01N21/05 ,  G01N33/0057 ,  G01N2021/0346 ,  G01N2201/06113 ,  G01N2201/1087 ,  Y10S977/902

Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.