公开(公告)号：US20180241296A1

公开(公告)日：2018-08-23

申请号：US15752779

申请日：2016-08-22

Applicant: PHYSIK INSTRUMENTE (PI) GMBH & CO. KG

Inventor： Rainer GLÖSS

IPC: H02K41/03 ,  H02K11/21 ,  H02K11/30

CPC classification number: H02K41/031 ,  B23Q1/44 ,  H02K11/21 ,  H02K11/30 ,  H02K41/03 ,  H02K2201/18

Abstract: The invention relates to a planar positioning apparatus, comprising a stator which comprises a coil arrangement consisting of flat coils, a rotor which is arranged opposite the stator in the operating state of the positioning apparatus and which has a planar magnet arrangement comprising a plurality of rows of magnets, wherein the plane which is spanned by the planar magnet arrangement is arranged parallel to the plane of the coil arrangement, at least one position measuring head, which is arranged within the stator or rotor in the operating state of the positioning apparatus, for detecting the position of the rotor relative to the stator, an area scale which is fixed to the rotor or to the stator in a specific position, and an evaluation and control device for evaluating position signals of the position measuring head and for controlling the application of current to the coil arrangement for controlling the position of the rotor with respect to the stator. The stator or the rotor has at least one window for making the area scale visible for the position measuring head, wherein the area scale extends beyond the window between the coil and magnet arrangement, is placed directly on at least one section of the magnet or the coil arrangement, consists of a material which does not influence the magnetic field between the stator and the rotor, and has associated holding means for ensuring a parallel configuration in relation to the rotor and stator over the entire extent of said area scale.

公开(公告)号：US20180231793A1

公开(公告)日：2018-08-16

申请号：US15825719

申请日：2017-11-29

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Bong Won JEONG ,  Jae Kyung KIM ,  Young Bok YOON ,  Hyun Kag PARK

IPC: G02B27/64 ,  G03B5/00 ,  G02B13/00 ,  H02K1/34 ,  H02K33/12

CPC classification number: G02B27/64 ,  G02B13/0065 ,  G02B27/646 ,  G03B5/00 ,  G03B17/17 ,  G03B2205/0023 ,  G03B2205/003 ,  G03B2205/0069 ,  H02K1/34 ,  H02K33/12 ,  H02K41/031 ,  H02K2201/18

Abstract: There are provided a reflecting module for optical image stabilization (OIS) and a camera module including the same. The reflecting module for OIS includes: a housing including an internal space; a movable holder supported in the internal space of the housing by an elastic member; a reflecting member disposed on the movable holder; and a driving part configured to provide driving force to the movable holder so that the movable holder is moved relative to the housing, wherein the elastic member includes a fixed frame fixed to the housing, a movable frame provided in the fixed frame, and a spring connecting the fixed frame and the movable frame to each other and, the movable frame is movable in relation to two axes perpendicular to each other.

公开(公告)号：US10043609B2

公开(公告)日：2018-08-07

申请号：US15061857

申请日：2016-03-04

Applicant: CKD CORPORATION ,  NIKON CORPORATION

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Shigeru Morimoto ,  Hiromitsu Yoshimoto ,  Koji Tanaka

IPC: H01F7/08 ,  H02K41/02 ,  H02K9/22 ,  H01F5/00 ,  H01F27/16 ,  H01F7/06 ,  H02K3/24 ,  H02K9/19

CPC classification number: H01F7/08 ,  H01F5/00 ,  H01F7/06 ,  H01F27/16 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K41/02 ,  H02K2201/18

Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

公开(公告)号：US20180183310A1

公开(公告)日：2018-06-28

申请号：US15272722

申请日：2016-09-22

Applicant: Jonathan Z. Bird ,  Mojtaba B. Kouhshahi

Inventor： Jonathan Z. Bird ,  Mojtaba B. Kouhshahi

IPC: H02K41/02

CPC classification number: H02K49/102 ,  H02K7/06 ,  H02K2201/18 ,  H02K2213/03

Abstract: In some embodiments, the invention comprises a new type of high force density magnetically geared lead screw. It is shown that by using a helical inner and an annularly skewed ring translator a rotational motion can be converted into a magnetically geared translational motion. The advantage of the new design is that all of the magnets are continuously utilized to create the magnetically geared translational force.

公开(公告)号：US10008915B2

公开(公告)日：2018-06-26

申请号：US15595941

申请日：2017-05-15

Applicant: The University of British Columbia

Inventor： Xiaodong Lu ,  Irfan-Ur-Rab Usman

IPC: H01L21/67 ,  H02K41/02 ,  H02K41/03 ,  H02K1/26 ,  H02K1/27 ,  H02K3/28 ,  H02K7/09 ,  H02K21/24

CPC classification number: H02K41/02 ,  H01L21/67 ,  H02K1/26 ,  H02K1/2793 ,  H02K3/28 ,  H02K7/09 ,  H02K21/24 ,  H02K41/031 ,  H02K2201/18

Abstract: Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

公开(公告)号：US09923445B2

公开(公告)日：2018-03-20

申请号：US14755600

申请日：2015-06-30

Applicant: DR. JOHANNES HEIDENHAIN GMBH

Inventor： René Klaver ,  John Compter

IPC: H02K41/035 ,  F16C32/04 ,  G03F7/20

CPC classification number: H02K41/035 ,  F16C32/0472 ,  G03F7/70758 ,  G03F7/70816 ,  H02K41/0356 ,  H02K2201/18

Abstract: A drive for an XY-table includes a stationary, ferromagnetic and U-shaped yoke including a first limb and a second limb which are located together in one plane, and having a movable ferromagnetic bar, the yoke and the bar carrying a magnetic circuit with a flux that takes a path across air gaps between the limbs and the bar, and causes vertical reluctance forces there which counteract the gravitational force of the bar. Bar is parallel to and below the plane defined by the limbs.

公开(公告)号：US09921496B2

公开(公告)日：2018-03-20

申请号：US14981630

申请日：2015-12-28

Applicant: NIKON CORPORATION

Inventor： Yasuo Aoki

IPC: G03B27/58 ,  G03F7/20 ,  H02K41/03 ,  F16C39/04 ,  F16C39/06 ,  F16C29/00 ,  H02K7/09 ,  H02K16/00

CPC classification number: G03F7/70775 ,  F16C29/008 ,  F16C39/04 ,  F16C39/06 ,  G03F7/70716 ,  G03F7/70816 ,  G03F7/709 ,  H02K7/09 ,  H02K16/00 ,  H02K41/031 ,  H02K2201/18

Abstract: In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.

公开(公告)号：US09893596B2

公开(公告)日：2018-02-13

申请号：US14758720

申请日：2014-01-22

Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.

Inventor： Lin Zhang ,  Xiaowen Zhang ,  Lin Guo ,  Jun Chen ,  Zhigang Zhang

IPC: H02K11/00 ,  H02K1/22 ,  H02K15/02 ,  H02K41/03 ,  H02K11/20

CPC classification number: H02K11/20 ,  H02K1/22 ,  H02K15/02 ,  H02K41/031 ,  H02K2201/18 ,  Y10T29/49014

Abstract: A magnetic alignment system is disclosed, including a magnet array (10), a motor rotor (20), a fixed tooling (30) and a force sensor (40). The motor rotor (20) is disposed over the magnet array (10) and is connected via the force sensor (40) to the fixed tooling (30) that is positionally fixed relative to the magnet array (10). By varying an angle of a three-phase current supplied to a specific one of three-phase coil assemblies in the motor rotor (20) within an angular range for magnetic alignment and measuring a force generated by the specific one of three-phase coil assemblies using the force sensor (40), an angle of magnetic alignment for the specific one of three-phase coil assemblies is determinable based on the angle of three-phase current that causes the specific one of three-phase coil assemblies to generate a maximum force.

公开(公告)号：US09835222B2

公开(公告)日：2017-12-05

申请号：US15034042

申请日：2014-11-10

Applicant: Aalborg Universitet

Inventor： Nick Ilso Berg ,  Rasmus Koldborg Holm ,  Peter Omand Rasmussen

IPC: F16F13/00 ,  F04B17/04 ,  F04B19/02 ,  H02K49/10 ,  B60G15/04 ,  B60G17/015 ,  F16H25/24

CPC classification number: F16F13/00 ,  B60G15/04 ,  B60G17/0157 ,  B60G2202/32 ,  B60G2202/42 ,  F04B17/04 ,  F04B19/022 ,  F16F2232/06 ,  F16H25/24 ,  H02K49/104 ,  H02K2201/18

Abstract: The present invention relates to an actuator system with a magnetic lead screw, comprises a magnetic rotor and a translator cylinder, the translator cylinder comprises a magnetic stator, the translator cylinder has a closed first end and a second end confined by a lid, the lid having a shaft opening for a shaft coupled to the magnetic rotor, wherein the magnetic rotor, when inserted in the translator cylinder, is arranged to translate a linear movement of the translator cylinder into a rotational movement of the magnetic rotor by using magnetic flux interacting between the magnetic stator and the magnetic rotor, said rotational movements is being transferred through a shaft, the lid with a shaft opening arranged for receiving the shaft, wherein the shaft is arranged to make both the linear and the rotational movement in the shaft opening, the lid being arranged for confining the second end of the translator cylinder, the translator cylinder confined by the lid forms, when divided by the magnetic rotor, a first chamber with a first volume and a second chamber with a second volume, wherein the first volume and the second volume changes as a function of the linear movement. The invention also relates to a method of operating an actuator system with a magnetic lead screw.

公开(公告)号：US20170294827A1

公开(公告)日：2017-10-12

申请号：US15479054

申请日：2017-04-04

Applicant: Kim Rubin

Inventor： Kim Rubin

IPC: H02K41/03 ,  H02P25/066 ,  B23Q1/26

CPC classification number: H02K41/031 ,  H02K2201/18 ,  H02P25/066

Abstract: An X-Y movable stage with rotation is described. A fixed base comprises a magnetic bed with a checkerboard pattern of alternating north and south poles on a grid. A movable puck moves and rotates on the base. The puck comprises three or more nodes where each node may be energized for a north, south, or off magnetic field, with varying field strength. The nodes are arranged on an X-Y motion grid on the puck that are rotated 45° from the magnetic base grid. A first set of node locations on the puck may be each centered between a pair of opposite poles on the magnetic base. One arrangement of nodes is at the corners of a rectangle aligned with the motion grid. An optional second set of one node locations on the puck may be each centered between a pair of opposite poles on the magnetic base, when the first set of nodes is aligned over poles. Methods of mapping node locations, controllers, and applications are described.