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公开(公告)号：US10983438B2
公开(公告)日：2021-04-20
申请号：US16781370
申请日：2020-02-04
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
IPC: G03F7/20 , H01L21/683
Abstract: An exposure apparatus that scans and exposes each of a plurality of areas on a glass substrate, by irradiating the substrate with an illumination light via a projection optical system and relatively driving the substrate with respect to the illumination light, is equipped with: a substrate holder that levitates and supports a first area of the substrate; a substrate carrier that holds the glass substrate levitated and supported by the substrate holder; an X coarse movement stage that drives the substrate holder; an X voice coil motor that drives the substrate carrier; and a controller that controls the X coarse movement stage and the X voice coil motor so that the substrate holder and the substrate carrier are driven, respectively, in scanning exposure. Accordingly, an exposure apparatus with improved position controllability of an object can be provided.
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公开(公告)号：US10802407B2
公开(公告)日：2020-10-13
申请号：US15763475
申请日：2016-09-29
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
Abstract: A substrate stage device of an exposure apparatus is equipped with: a noncontact holder that supports, in a noncontact manner, a first area and at least a partial area of a second area, of a substrate, the second area being arranged side by side with the first area in the Y-axis direction; a substrate carrier that holds the substrate held in a noncontact manner by the noncontact holder, at a position not overlapping the noncontact holder in the X-axis direction; Y linear actuators and Y voice coil motors that relatively move the substrate carrier with respect to the noncontact holder in the Y-axis direction; X voice coil motors that move the substrate carrier in the X-axis direction; and actuators that move the noncontact holder in the X-axis direction.
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公开(公告)号：US10514616B2
公开(公告)日：2019-12-24
申请号：US15957297
申请日：2018-04-19
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
IPC: G03F7/20
Abstract: An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member supports the substrate holding member from below. The second supporting member supports the first supporting member from below such that the first supporting member and the second supporting member are capable of moving relative to each other. The driving system moves the substrate holding member, the first supporting member and the second supporting member. The driving system includes a first driving device and a second driving device, the first driving device moving the substrate holding member and the first supporting member in a direction along a predetermined axis, and the second driving device moving the second supporting member in the direction along the predetermined axis.
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公开(公告)号：US11774864B2
公开(公告)日：2023-10-03
申请号：US17178940
申请日：2021-02-18
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
IPC: G03F7/00
CPC classification number: G03F7/70716
Abstract: A carrier device that carries a substrate to a noncontact holder that is configured to support the substrate in a noncontact manner is equipped with: holding pads that hold a part of the substrate at a first position located above the noncontact holder; a drive section that moves downward the holding pads holding the substrate so that the substrate is supported in a noncontact manner by the noncontact holder; and adsorption pads that hold the substrate supported in a noncontact manner by the noncontact holder, after the substrate held by the holding pads is moved by the drive section, wherein the drive section moves the holding pads from the first position to a second position where the substrate can be delivered to the adsorption pads.
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公开(公告)号：US10935894B2
公开(公告)日：2021-03-02
申请号：US16695746
申请日：2019-11-26
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
Abstract: A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves the noncontact holder; scale plates that serve as a reference of movement of the noncontact holder; a first measurement section that has scale plates and Y heads, one of the scale plates and the Y heads being provided at the noncontact holder and the other of the scale plates and the Y heads being provided between the scale plates and the noncontact holder, and that measures position information of the Y heads; a second measurement section that measures position information of the other of the scale plates and the Y heads; and a position measurement system that obtains position information of the noncontact holder on the basis of the position information measured by the first and the second measurement sections.
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Patent Agency Ranking
公开(公告)号：US09921496B2
公开(公告)日：2018-03-20
申请号：US14981630
申请日：2015-12-28
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
CPC classification number: G03F7/70775 , F16C29/008 , F16C39/04 , F16C39/06 , G03F7/70716 , G03F7/70816 , G03F7/709 , H02K7/09 , H02K16/00 , H02K41/031 , H02K2201/18
Abstract: In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.
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公开(公告)号：US11520242B2
公开(公告)日：2022-12-06
申请号：US17109443
申请日：2020-12-02
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
Abstract: A liquid crystal exposure apparatus that moves a substrate supported in a noncontact manner by a noncontact holder to a projection optical system, and performs scanning exposure to the substrate equipped with: holding pads that hold a part of the substrate located at a first position above the noncontact holder; adsorption pads that hold another part of the substrate; a first drive section moves the holding pads from below the substrate direction intersecting a vertical direction, where the substrate is located at the first position held by the adsorption pads; and a second drive section that moves the adsorption pads holding the substrate, to a second position where the substrate is supported in a noncontact manner by the noncontact holder, wherein the scanning exposure, the second drive section moves the adsorption pads holding the substrate supported in a noncontact manner by the noncontact holder to the projection optical system.
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公开(公告)号：US10852647B2
公开(公告)日：2020-12-01
申请号：US16337894
申请日：2017-09-29
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
Abstract: A movable body apparatus has: a substrate holder holding a substrate and can move in the X and Y-axes directions; a Y coarse movement stage movable in the Y-axis direction; a first measurement system acquiring position information on the substrate holder by heads on the substrate holder and a scale on the Y coarse movement stage; a second measurement system acquiring position information on the Y coarse movement stage by heads on the Y coarse movement stage and a scale; and a control system controlling the position of the substrate holder based on position information acquired by the first and second measurement systems. The first measurement system irradiates a measurement beam while moving the heads in the X-axis direction with respect to the scale, and the second measurement system irradiates a measurement beam while moving the heads in the Y-axis direction with respect to the scale.
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公开(公告)号：US10782619B2
公开(公告)日：2020-09-22
申请号：US16337226
申请日：2017-09-29
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
IPC: G03F7/20
Abstract: A movable body apparatus is provided with: a substrate holder which holds a substrate and which can move in the X- and Y-axis directions; a Y coarse movement stage which can move in the Y-axis direction; a first measurement system which acquires position information on substrate holder by means of heads provided on substrate holder and a scale provided on Y coarse movement stage; a second measurement system which acquires position information on Y coarse movement stage by means of heads provided on Y coarse movement stage and a scale; and a control system which controls the position of substrate holder based on position information acquired by first and second measurement systems. The first measurement system irradiates a measurement beam while moving heads in X-axis direction with respect to the scale, and second measurement system irradiates a measurement beam while moving heads in Y-axis direction with respect to the scale.
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公开(公告)号：US10564548B2
公开(公告)日：2020-02-18
申请号：US15711377
申请日：2017-09-21
Applicant: NIKON CORPORATION
Inventor： Yasuo Aoki
IPC: G03F7/20 , H01L21/683
Abstract: An exposure apparatus that scans and exposes each of a plurality of areas on a glass substrate, by irradiating the substrate with an illumination light via a projection optical system and relatively driving the substrate with respect to the illumination light, is equipped with: a substrate holder that levitates and supports a first area of the substrate; a substrate carrier that holds the glass substrate levitated and supported by the substrate holder; an X coarse movement stage that drives the substrate holder; an X voice coil motor that drives the substrate carrier; and a controller that controls the X coarse movement stage and the X voice coil motor so that the substrate holder and the substrate carrier are driven, respectively, in scanning exposure. Accordingly, an exposure apparatus with improved position controllability of an object can be provided.
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