Lithography apparatus and method employing non-environmental variable correction
    34.
    发明申请
    Lithography apparatus and method employing non-environmental variable correction 失效
    使用非环境变量校正的光刻设备和方法

    公开(公告)号:US20050037266A1

    公开(公告)日:2005-02-17

    申请号:US10639967

    申请日:2003-08-12

    CPC classification number: G03F1/78 G03F1/36 G03F1/68 G03F7/70558

    Abstract: A lithographic apparatus for forming a patterned resist layer and a method for forming a microelectronic product both employ a lithographic exposure tool controller designed to: (1) receive input data for at least one non-environmental variable that influences an exposure dose when forming a patterned resist layer from a blanket resist layer while employing a lithographic exposure tool; and (2) determine the exposure dose for forming the patterned resist layer from the blanket resist layer while employing the input data. The apparatus and method provide for forming the microelectronic product with enhanced dimensional control.

    Abstract translation: 用于形成图案化抗蚀剂层的光刻设备和用于形成微电子产品的方法都采用平版印刷曝光工具控制器,其设计成:(1)接收至少一个影响曝光剂量的非环境变量的输入数据, 使用光刻曝光工具从抗蚀剂层获得抗蚀剂层; 和(2)在采用输入数据的同时确定用于从橡皮布抗蚀剂层形成图案化抗蚀剂层的曝光剂量。 该装置和方法提供了用增强的尺寸控制形成微电子产品。

    GRIPPING MECHANISM AND MOBILE ROBOT

    公开(公告)号:US20240424690A1

    公开(公告)日:2024-12-26

    申请号:US18748133

    申请日:2024-06-20

    Abstract: Disclosed is a gripping mechanism including a first bracket, a second bracket, a first guide rod, a third bracket, an actuating module, a gripping block and two grippers. The second bracket is connected to the first bracket. The third bracket is connected to the second bracket. The actuating module is disposed on the third bracket. The gripping block is slidably disposed on the third bracket and is connected to the actuating module. The two grippers are fixed on the terminal end of the third bracket distal from the first bracket and the second bracket, wherein the gripping block is located between the actuating module and the two grippers and the actuating module is adapted to drive the gripping block to slide close to or slide away from the two grippers. A mobile robot is also disclosed.

    Control system for hand-controlled physiotherapy equipment and electrical stimulation mode

    公开(公告)号:US20210353498A1

    公开(公告)日:2021-11-18

    申请号:US15990980

    申请日:2018-05-29

    Abstract: Hand-controlled physiotherapy equipment contains: a first electrode and a second electrode which are connected with living creatures so as to form a closed loop, an electrical stimulation system, a signal receiving unit, and a signal identification unit. The electrical stimulation system includes a sensing unit. The signal receiving unit is connected with the sensing unit in a wired manner or a wireless manner, the signal identification unit is configured to transform loop signals into time series signals, wherein when each of the time series signals has a specific interruption signal and a specific recovery signal, each time series signal triggers a mode adjustment signal in a control module. The control module includes a predetermined comparison database, and the comparison database has multiple set modes, wherein the multiple set modes respectively have multiple interruption signals and multiple recovery signals.

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